MKS HPQ3, Руководство по оборудованию

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MKS Instruments UK Ltd
HPQ3 Hardware Manual – SP101019.101 October 2012
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3.3 Installing the analyser
The vacuum chamber in which you intend to mount the analyser must have a 2 .75 inch UHV
Conflat® flange fitted with a tube of 35.0mm (1.378 ") minimum ID, inclusive of a good welded joint.
The distance from the end of the analyser to its mounting flange depends on the type of system.
Refer to the analyser dimensions given on Page 6.
There must be at least the distances stated free of obstructions inside the vacuum chamber. If your
chamber does not meet the above criteria, you should use a specially designed adapter so that the
analyser may be mounted outside the chamber. Please contact your local MKS representative for
assistance.
3.4 Checking the system pressure
Ensure your system is capable of meeting the pressure specifications below before operating your
RGA.
Maximum recommended operating pressure
HPQ3 1e-3 Torr (1.3e-3 mbar)
HPQ3S 8e-3 Torr (1e-2 mbar)
– Application dependant
Maximum transient burst pressure
4e-2 Torr (5e-2 mbar)
– gas dependant
Operation above these limits will cause irreversible damage to the filaments and possibly the ion
source.
Make use of the X-Trip interlock to prevent accidental damage to the analyser.