MKS Baratron 622D, Руководство пользователя

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Appendix A: Product Specifications MKS Types 622D and 626D Units
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Appendix A: Product Specifications
MKS Types 622D and 626D Units
Accuracy (includes non-linearity,
hysteresis and non-repeatability) 0.25% of Reading standard for ranges of 1 to 1000 Torr,
with option for 0.15% of reading
1 . For ranges of < 1
Torr, standard specification is 0.50% of reading.
Ambient operating temperature range 1 0° to 50° C (32° to 122° F) for ranges of 1 to 1000 Torr.
For ranges < 1 Torr, ambient temperature range is 15° to
40°C (59° to 104°F)
Compliance CE and UKCA compliant
RoHS (Restriction of Hazardous
Substances) Compliance
Compliant to Directive 2002/95/EC
Electrical Connector
622B
626B
5-post terminal block
15-pin male D-subminiature
Fittings
Standard
Optional
½ inch (12.7 mm) tubulation
NW16-KF, NW25-KF, mini-CF, Swagelok
8 VCR
®
female, 8 VCO
®
female
Full Scale Range (Torr) 0.10 (626D only), 0.25 (626D only), 1, 2, 10, 20, 100,
500, 1000
Input required ±15 VDC (±5%) @ 35 mA.
Materials exposed to gases Inconel
®
and Incoloy
®
. Some optional fittings may be
built from 300-series stainless steel.
Output
0 to +10 VDC into

10K ohm load
Overpressure limit without damage 45 psia (310 kPa)
Temperature coefficients
Zero
Span
0.005% F.S./°C
2
0.04% Reading/°C
Time constant < 20 msec
Usable measurement range
1 x 10
-4
F.S.
Volume (P x side) 6.3 cc
Due to continuing research and development activities, these specifications are subject to change without notice.
1Some specifications may vary outside this temperature range - consult factory for further information. 626D 0.10 and 0.25 T
ambient operating temperature range 15°C to 40°C (59°F to 104°F)
2For Types 622D/626D
2 Torr transducers, the zero temp. coef. is 0.010% F.S./°C.
For Types 622D/626D 1 Torr transducers, the zero temp. coef. is 0.015% F.S./°C.
For Type 626D 0. 10 Torr transducers, the zero temp. coef. is 0.02% F.S./°C.