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Copyright © 2021 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information
storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments,
Inc.
Printed in the United States of America

Swagelok

®

, VCR

®

, and VCO

®

are registered trademarks of Swagelok Co., Solon, OH, USA.

mksinst

TM

is a trademark and Baratron

®

is a registered trademark of MKS Instruments, Inc.,

Andover, MA, USA.

Inconel

®

and Incoloy

®

are registered trademarks of Inco Alloys International, Huntington, WV,

USA.

Some Baratron

®

products may not be exported to many end user countries without both US and

local government export licenses under ECCN 2B230.

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Содержание Baratron 622D

Страница 1: ...20054392 001 Rev A 11 21 MKS Baratron Type 622D 626D Absolute Pressure Transducers and 623H Absolute Pressure Transducer with Trippoint Relays...

Страница 2: ...ed in writing by MKS Instruments Inc Printed in the United States of America Swagelok VCR and VCO are registered trademarks of Swagelok Co Solon OH USA mksinstTM is a trademark and Baratron is a regis...

Страница 3: ...Symboles utilis s dans ce manuel d utilisation 9 Symboles apparaissant sur l unit 10 Mesures de s curit et pr cautions 11 Medidas de seguridad del transductor de presi n 13 S mbolos usados en este man...

Страница 4: ...e for Control 36 Type 623H End Cap 37 Hysteresis of Type 623H Trip Relays 37 How To Set the Trip Points on Type 623H 39 How To Adjust the Trip Point Direction 40 How To Adjust the Trip Point Hysteresi...

Страница 5: ...ype 623H 39 Figure 11 The Relay Board 41 Figure 12 The Alternate Relay Board 42 Tables Table 1 Definition of Symbols Found on the Unit 2 Tabelle 2 Bedeutung der am Ger t angebrachten Symbole 6 Tableau...

Страница 6: ...List of Figures and Tables vi...

Страница 7: ...a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention...

Страница 8: ...20206 Caution refer to accompanying documents ISO 3864 No B 3 1 Caution risk of electric shock ISO 3864 No B 3 6 Caution hot surface IEC 417 No 5041 Table 1 Definition of Symbols Found on the Unit O n...

Страница 9: ...E CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety precautions completely purge the instrument when necessary...

Страница 10: ...to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use Contamination such as dust dirt lint gla...

Страница 11: ...stand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ger...

Страница 12: ...anschlu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg ng...

Страница 13: ...ng nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal...

Страница 14: ...eeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr auf...

Страница 15: ...ition ou toute autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l...

Страница 16: ...masse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu...

Страница 17: ...ISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise des mesures de pr caution appropri es de la purge compl te de l appareil quand cel...

Страница 18: ...u syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants p n trer dans l unit avant ou pendant l utilisation Des produits co...

Страница 19: ...ales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilida...

Страница 20: ...tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente cont...

Страница 21: ...OS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o reparaci n deben ser realizadas nicam...

Страница 22: ...ALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de vac o para evitar que se produzcan exp...

Страница 23: ...e conditions 45 psia with minimal or no shifts in output over their range The advanced bridge signal conditioning technology provides high accuracy and operation which is extremely temperature stable...

Страница 24: ...s Chapter Five Maintenance and Troubleshooting provides maintenance and troubleshooting information Appendix A Product Specifications lists the specifications of the instrument Appendix B Model Code E...

Страница 25: ...thorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Unpacking Checklist Standar...

Страница 26: ...60 PR4000 PDR2000 PDR C 1C 2C 622D RCB112S 2 10 n a RCB473S 1 10 623H RCB112S 2 10 n a RCB473S 1 10 626D RCB259S 5 10 RCB2000S 1 M1 RCB127S 1 10 Table 5 Interface Cables For cables connecting to non M...

Страница 27: ...es with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length Refer to Figures 1 and 2 page 22 A in...

Страница 28: ...nsducer Overall Insulation if present Bare Metal Cable Clamp Making Firm Contact To Braid Braid Here Is Desirable but not usually necessary Keep Wires and Braid Flat Against Case Metal Cable Clamp Scr...

Страница 29: ...maximum with 20 mV p p noise and ripple Type 623H Ambient operating temperature should remain between 0 C and 50 C 32 F and 122 F Input required is 15 VDC 5 75 mA maximum with 20 mV p p noise and ripp...

Страница 30: ...le Swagelok 8 VCO female 1 33 inch 33 8 mm O D CF Caution MKS does not warranty the 622B 623H or 626D transducers when single or double metal ferrule compression type vacuum fittings shown in Figure 3...

Страница 31: ...ized before you change the zero adjustment Stabilization is accomplished by allowing the unit to warm up for approximately 15 minutes Pump the unit with the power on down to a pressure less than the t...

Страница 32: ...readout displays zero 0000 Highest Pressure Suggested for Proper Zero Adjustment Full Scale Range Torr Highest Pressure for Zero Adjustment Torr 0 1 5 x 10 6 0 25 5 x 10 6 1 5 x 10 5 2 1 x 10 4 10 5 x...

Страница 33: ...lution refer to Table 6 page 26 for recommended pressure levels 4 Center the ZERO pot located at the top of the transducer adjust the screw to leave an equal amount of adjustment both clockwise and co...

Страница 34: ...Setup Chapter Two Installation 28 Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses...

Страница 35: ...Chapter Two Installation Setup 29 Figure 6 Dimensions of the Types 622B 623H and 626D Transducers...

Страница 36: ...e any possible ground loops which can affect the performance and stability of the system Input Required Types 622D 626B Type 623H At Startup 15 VDC 5 35 mA 15 VDC 5 75 mA After 1 hour of operation at...

Страница 37: ...transducer uses two 2 terminal blocks a 5 post block known as TB1 and an 8 post block designated as TB2 The post assignments for both of these blocks are shown in Tables 10 and 11 Post Assignments of...

Страница 38: ...umber Assignment 1 No connection 2 Signal Output 3 No connection 4 No connection 5 Power Common 6 15 VDC 7 15 VDC 8 No connection 9 No connection 10 No connection 11 No connection 12 Signal Common 13...

Страница 39: ...of Type 623H Transducer TB1 Terminal Block 2 TB2 Pinout Type 623H only Pin Number Signal 1 Trip Point A Level 0 to 10 Volts 2 Trip Point A Relay Normally Closed 3 Trip Point A Relay Common 4 Trip Poi...

Страница 40: ......

Страница 41: ...ounted ceramic disc containing two electrodes The reference side is permanently evacuated 10 7 Torr and its vacuum is maintained with a chemical getter system The diaphragm deflects with changing abso...

Страница 42: ...Bookmark not defined 2 page 36 unheated transducers can obtain these measurements down to 1 x 10 4 Torr Lowest Suggested Pressure to Use for Control The pressures listed in the last column of Table E...

Страница 43: ...epeatedly switch states a condition known as relay chatter Each trip point has a separate hysteresis setting Setting the hysteresis too high creates a deadband around the trip point The deadband preve...

Страница 44: ...the inaccuracy which results from too much hysteresis the hysteresis may be reduced Too little hysteresis however may not be enough to overcome relay chatter Ideally the hysteresis should be as close...

Страница 45: ...ment screw until the voltmeter reads 8 Volts If you want an output signal of 8 Volts at the trip point turn the appropriate trip point adjustment screw until the voltmeter reads 8 Volts Note Due to hy...

Страница 46: ...pressure rises above their respective trip points To change the trip point direction 1 Turn off power to the transducer and disconnect the cables from TB1 and TB2 2 Push down on the colored ring on t...

Страница 47: ...rection 41 1 2 3 4 1 2 3 4 5 6 J16 J13 Trip Point A J15 J12 Trip Point B J10 Trip Point B hysteresis J11 Trip Point A hysteresis J12 J13 J14 and J16 have pins numbered as show n here J10 and J11 have...

Страница 48: ...on 42 J12 J13 J14 and J16 have pins numbered as show n here 1 2 3 4 J16 J13 J15 J12 Trip Point A Trip Point B J10 and J11 have pins numbered as show n here 1 3 4 2 5 6 J10 Trip Point B hysteresis J11...

Страница 49: ...ip Point Energized Above Trip Point Trip Point A J13 1 3 2 4 J16 1 3 2 4 J13 1 2 3 4 J16 1 2 3 4 Trip Point B J12 1 3 2 4 J15 1 3 2 4 J12 1 2 3 4 J15 1 2 3 4 Table 13 Factory Set Positions of the Shor...

Страница 50: ...f power to the unit and disconnect the cables from TB1 and TB2 2 Push down on the colored ring on the endcap turn it about turn counterclockwise and lift it off the endcap 3 Remove the two screws on e...

Страница 51: ...lace the graphics panel 7 Replace the two screws on each side of TB1 8 Replace the ring on the endcap and push down while turning it about turn clockwise 9 Reconnect the trip point cable to TB2 10 Rec...

Страница 52: ...Instruments for service In production operations such as semiconductor manufacturing verify the transducer zero and adjust if necessary each time the equipment is shut down for routine maintenance No...

Страница 53: ...l block Inspect cable and transducer Replace if necessary Measurement slowly goes positive over time Overpressure and or a build up of contamination in the Px cavity Return to MKS for servicing or tra...

Страница 54: ......

Страница 55: ...VCR female 8 VCO female Full Scale Range Torr 0 10 626D only 0 25 626D only 1 2 10 20 100 500 1000 Input required 15 VDC 5 35 mA Materials exposed to gases Inconel and Incoloy Some optional fittings m...

Страница 56: ...aterials exposed to gases Inconel and Incoloy Some optional fittings may be built from 300 series stainless steel Output 0 to 10 VDC into 10k ohm load Overpressure limit without damage 45 psia 310 kPa...

Страница 57: ...The model code is identified as follows 62XBXXXYYZ where Type Number 62XB This designates the model number of the instrument 622B Terminal block electrical connector 623H Two 2 trip relays with two 2...

Страница 58: ...is designated by a single letter code Fittings Ordering Code inch 12 7 mm tubulation A Swagelok 8 VCR female B 1 33 inch 33 8 mm O D CF rotatable C NW16 KF D Swagelok 8 VCO female NW25 KF E Q Accurac...

Страница 59: ...ance 44 Manual organization 18 Model code 51 Orientation 25 Pinout 30 Pressure lowest for control 34 lowest for reading 34 Returning the product 18 19 44 RoHS Restriction of Hazardous Substances 17 47...

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