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MKS Baratron 121A Скачать руководство пользователя страница 10

List of Figures and Tables

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Содержание Baratron 121A

Страница 1: ...7 98 Instruction Manual MKS Baratron Type 121A Absolute Pressure Transducer Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http...

Страница 2: ...r before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shall make specific written arrangements with respect to the responsibility for shipping th...

Страница 3: ...113733 P1 Rev C 7 98 MKS Baratron Type 121A Absolute Pressure Transducer...

Страница 4: ...g or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United States of America Baratron is a registered trademark of...

Страница 5: ...teur de pression 9 Symboles utilis s dans ce manuel d utilisation 9 Symboles apparaissant sur l unit 10 Mesures de s curit et pr cautions 11 Medidas de seguridad del transductor de presi n 13 S mbolos...

Страница 6: ...tion 33 Warm Up and Start Up 33 How To Prepare for Maximum Bakeout 34 Disassembly 35 How To Reassemble the Unit After Bakeout 36 Reassembly 36 Warm Up and Start Up 37 Chapter Five Theory of Operation...

Страница 7: ...Table of Contents v Appendix D High Pressure Fitting Selection 49 Description 49 Index 51...

Страница 8: ...Table of Contents vi...

Страница 9: ...e 5 Sensor Assembly 34 Tables Table 1 Definition of Symbols Found on the Unit 2 Tabelle 2 Bedeutung der am Ger t angebrachten Symbole 6 Tableau 3 D finition des symboles apparaissant sur l unit 10 Tab...

Страница 10: ...List of Figures and Tables viii...

Страница 11: ...a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention...

Страница 12: ...arth ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC...

Страница 13: ...rvice must be made by qualified service personnel only USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety p...

Страница 14: ...urce install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit befor...

Страница 15: ...stand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ger...

Страница 16: ...anschlu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg ng...

Страница 17: ...ng nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal...

Страница 18: ...eeignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr auf...

Страница 19: ...ition ou toute autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l...

Страница 20: ...masse IEC 417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu...

Страница 21: ...age doit tre uniquement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise d...

Страница 22: ...r un disque d chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits...

Страница 23: ...ales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilida...

Страница 24: ...tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente cont...

Страница 25: ...BEN SER EFECTUADAS NICAMENTE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento...

Страница 26: ...hallar la presi n m xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de...

Страница 27: ...Type 121 instrument measures down to 1x10 4 Torr 1 Torr Full Scale In addition to the sensor and remote electronics unit signal conditioner the 121 instrument has a shielded cable 8 ft standard length...

Страница 28: ...ironmental requirements and describes how to mount the instrument in your system Chapter Three Overview gives a brief description of the instrument and its functionality Chapter Four Operation describ...

Страница 29: ...n the use of your Type 121 instrument or to obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument...

Страница 30: ...Customer Support Chapter One General Information 20 This page intentionally left blank...

Страница 31: ...Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Caution Only qualified individuals sho...

Страница 32: ...re compliance with Directives 92 59 EEC and 73 23 EEC Note 1 An overall metal braided shielded cable properly grounded at both ends is required during use to meet CE specifications 2 To order an overa...

Страница 33: ...ood contact to the device s case ground Good contact is about 0 01 ohms and the ground should surround all wires Contact to ground at just one point may not suffice 4 For shielded cables with flying l...

Страница 34: ...conditioner is 0 C to 50 C 32 F to 122 F 3 The power input required is 15 VDC 5 35 mA 4 The overpressure limit is 35 psia or 120 of sensor Full Scale whichever is greater 5 It is important that the u...

Страница 35: ...easured Refer to Figure 1 for the sensor dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses Dimension A 2 560 65 0 2 50 63 5 Diameter Swagelok 8 VCR couplin...

Страница 36: ...tion Refer to Figure 2 for horizontal dimensions and Figure 3 page 27 for vertical dimensions Note Be sure to allow access to the zero potentiometer zero adjust 0 187 4 75 Dia 4 Mounting Holes 3 90 99...

Страница 37: ...Chapter Two Installation Setup 27 4 62 117 Zero Adjust 0 12 3 05 1 65 41 9 Figure 3 Electronics Unit Vertical Dimensions...

Страница 38: ...al scratches 2 Insert the tubing through the compression nut and O ring all the way to the shoulder 3 Tighten the nut Optional Fittings The following fittings are available as options when specified N...

Страница 39: ...ty 10 7 Torr and is maintained at high vacuum low pressure by an integral chemical getter system The diaphragm deflects with changing absolute pressure force per unit area independent of the compositi...

Страница 40: ...ons page 43 for electrical requirements of the Type 121 pressure transducer Table 7 lists the pinout of the micro ribbon connector located on the electronics unit Micro Ribbon Connector Pinout Pin Num...

Страница 41: ...ber labels one is affixed to the sensor the other is affixed to the pre amplifier An example serial number label is shown in Figure 4 121AA 00010B Serial Model 123456789 Input 15 VDC Output 0 10 VDC M...

Страница 42: ...Labels Chapter Three Overview 32 This page intentionally left blank...

Страница 43: ...r a list of available MKS power supply readout units 3 Apply power to the transducer The power requirement is 15 VDC 5 35 mA 4 Vacuum pump the system to a pressure below the transducer s resolution 0...

Страница 44: ...housing Flat blade screwdriver Philips screwdriver nut driver Needle nose pliers Refer to Figure 5 when removing or replacing the sensor housing Face Plate Lower Standoff 2 places Coaxial Cable white...

Страница 45: ...m housing screws that attach the housing to the faceplate 5 Remove the housing 6 Use a nut driver to loosen and remove the upper two standoffs at the top of the cable clamping assembly 7 Disengage the...

Страница 46: ...gh pins Caution Be sure the coaxial cables are oriented to the sensor correctly Refer to Figure 5 page 34 4 Gently press the pin connector into place 5 Put the top of the cable assembly into position...

Страница 47: ...Vacuum pump the system to a pressure below the transducer s resolution 0 01 F S Allow a minimum of 15 minutes for the electronics to stabilize 3 Zero the output of the transducer by adjusting the zero...

Страница 48: ...How To Reassemble the Unit After Bakeout Chapter Four Operation 38 This page intentionally left blank...

Страница 49: ...balanced As pressure deflects the diaphragm toward the electrode the center capacitance changes more than the outer capacitance causing the bridge to become unbalanced By amplifying and demodulating...

Страница 50: ...Overpressure Considerations Chapter Five Theory of Operation 40 This page intentionally left blank...

Страница 51: ...General Information It is recommended that the instrument be recalibrated annually if no other time interval has been established by the user Note Refer to the inside of the back cover of this instruc...

Страница 52: ...General Information Chapter Six Maintenance 42 This page intentionally left blank...

Страница 53: ...S Range Consult factory for other available ranges 1 2 10 100 1K 5K 10K 15K 20K and 25K Torr mmHg Input Required 15 VDC 35 mA regulated 5 Material Exposed to Gases Inconel Number of Decades Covered 4...

Страница 54: ...Specifications 44 Temperature Coefficients Zero Span 0 02 of F S C 200 ppm 0 04 Reading C 400 ppm Volume Px side 7 0 cc Due to continuing research and development activities these product specificatio...

Страница 55: ...tified as follows 121AXXXXXY where Type Number Full Scale Range Fittings XXXXX Y 121A Type Number 121A This designates the model number of the instrument Full Scale Range XXXXX The full scale range is...

Страница 56: ...r code Note The fitting choice is restricted for high pressure units Refer to Appendix D High Pressure Fitting Selection page 49 for additional information Fittings Ordering Code Diameter tubulation A...

Страница 57: ...wing MKS power supplies readout units PDR D 1 single channel unit in compact DIN case PDR C 1C single channel unit with two set point relays PDR C 2C two channel unit with two set point relays PDR 5B...

Страница 58: ...Companion Products Appendix C Companion Products and Cables 48 This page intentionally left blank...

Страница 59: ...Fitting Ordering Code Pressure Range 5000 Torr 96 7 psia through 25000 Torr 483 5 psia Comments Swagelok 8 VCR B All The lowest published pressure rating for any weld gland for tubing is 2600 psig Mi...

Страница 60: ...Description Appendix D High Pressure Fitting Selection 50 This page intentionally left blank...

Страница 61: ...43 Full scale ranges 17 H High pressure 49 I Interface cables 23 47 L Labels 31 M Maintenance 41 Manual organization 18 Model code 45 O Output 17 29 43 Overpressure 39 Overpressure limit 24 43 P Pino...

Страница 62: ...Index 52...

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