MKS 943 Series, Инструкция по эксплуатации

Страница: 31 / 46

5 Operation
31
Series 943 Cold Cathode Vacuum Sensor
Instruction Manual - #100009887
5.4 Using the Series 943 System with Gases other than Air or N
2
Before using the Series 943 Controller to measure pressure of gases other than air or nitrogen, read
and understand this section. If additional information is needed, contact MKS Customer Support at:
phone +1-833-986-1686 or email insidesales@mksinst.com.
In a cold cathode ionization sensor, the degree of ionization, hence the indicated pressure, is gas-
type dependent (see Section 5.1).
The 943 System provides analog voltage output for air or nitrogen according to Figure 5-4 and
Figure 5-5. If used with another gas, the Controller displays nitrogen equivalent pressure, a pressure
corresponding to ionization for nitrogen, which may be higher or lower than its true pressure.
Figure 5-4: True Pressure vs. Indicated Pressure