MKS 937B Series, Руководство по эксплуатации и обслуживанию, Страница: 74 / 106

937B Controller Instruction Manual pg. 74
9.7 Cold Cathode Control Commands
Command Parameter Response Function
PROn
(n=1, 3, 5)
d.dd E

ee
(d,e=0 to 9)
d.dd E

ee
(d,e=0 to 9)
Query or set protection set point value for sensor on channel
n. The valid PRO range is 1x10
-5
to 1x10
-2
Torr. Use 0.0 to
disable the protect set point control. Default value is 5x10
-3
Torr.
CSPn
(n=1, 3, 5)
d.dd E

ee
(d,e=0 to 9)
d.dd E

ee
(d,e=0 to 9)
Query and set control set point value for a CC sensor on
channel n. Valid CSP range is 5x10
-4
to 1x10
-2
Torr for
Pirani, 2x10
-3
to 1x10
-2
Torr for convention Pirani, and 0.2%
of Full scale to 0.02 Torr for Capacitance Manometer.
Capacitance Manometer full scale range has to be =< 2
Torr. Control channel (CSE command) needs to be set to a
valid channel prior to setting this command.
XCSn
(n=1, 3, 5)
ON or OFF ON or OFF Query or set the upper control set point sta
tus. If “ON” the
range extended from 1x10
-2
Torr to 9.5x10
-1
Torr.
CHPn
(n=1, 3, 5)
d.dd E

ee
(d,e=0 to 9)
d.dd E

ee
(d,e=0 to 9)
Query and set control set point hysteresis value for a CC
sensor on channel n. Valid CHP range is 1.2
×
CSP to
1.1x10
-2
Torr for Convention Pirani and Pirani, and 1.2
×
CSP
to 0.03 Torr for Capacitance Manometer. Default value is
1.5X the control set point value.
CSEn
(n=1, 3, 5)
A1, B1,
A2, B2,
C1, C2,
OFF A1, B1,
A2, B2,
C1, C2,
OFF
Query, enable/disable the control channel status for a CC
gauge on channel n.
CTLn
(n=1, 3, 5)
AUTO,
SAFE,
OFF AUTO,
SAFE,
OFF AUTO: CC sensor can be turned ON & OFF by the
controlling sensor. SAFE, CC sensor can be turned OFF,
but not be turned ON by the controlling sensor.
UCn
(n=1,3, 5)
dd.d
(d=0 to 9)
dd.d
(d=0 to 9)
Query or set a gas correction factor for a CC on Channel n.
Valid range is from 0.1 to 10.0.
CPn
(n=1,3, 5)
ON or OFF ON or OFF Query the channel power status for PR, CP, HC or high
voltage status for CC.
Turn ON/OFF the channel power for PR, CP, HC, or high
voltage for CC).
GTn
(n=1,3, 5)
Nitrogen
Argon
Helium Nitrogen
Argon
Helium Query or set a gas type for HC/CC on channel n.
Tn
(n=1,3, 5)
W, O, G, P,
C, R, H, L Sensor status query.
W = WAIT
O = OFF
G = GOOD
C = Control
P = PROTECT
R = Rear panel Ctrl OFF
H = High
L = LOW
TDCn
(n=1,3, 5)
ddd
(d=0 to 9)
ddd
(d=0 to 9)
Time delay until relays and output for CG are active, 3 to
300 secs
FRCn
(n=1,3,5)
d.d E

ee
(d,e=0 to 9)
d.d E

ee
(d,e=0 to 9)
Query or set the pressure to trigger fast relay control output.
Only available for special CC board with fast relay, and the
set point value needs to be between 5x10
-5
to 2x10
-10
Torr.
Table 9-7 937B Cold Cathode Control Commands