MKS 937B Series, Руководство по эксплуатации и обслуживанию, Страница: 49 / 106

937B Connector
End
Low Power
Nude (LPN)
A2 C (Collector)
A3 G (Grid, 2x)
A4 F2
A5 FC (Fil. Comm.)
A6 F1
1--Jumpered to 2
2--Jumpered to 1
5--Jumpered to 6
6--Jumpered to 5
7--no connect
937B Connector
End
Mini Ionization
Gauge (MIG)
A2 7 (Collector)
A3 2, 5 (Grid)
A4 4 (Fil. 2)
A5 3, 6 (Fil.Comm.)
A6 1 (Fil. 1)
1--Jumpered to 2
2--Jumpered to 1
5
6--Jumpered to 7
7--Jumpered to 6
Table 7-1 Pin Assignments for HC Sensor (LPN on left, MIG on right)
If there is the possibility of forces on the cable, use a separate strain relief to prevent damage to the sensor
or controller. Cables are available in standard lengths of 10, 25 & 50 feet only. Tighten the cable jackscrews
into the mating screw locks to ensure proper electrical connection and prevent stress on the connector.
Remove power from the controller before connecting or disconnecting the cable
from the sensor or controller.
7.4 Installing Convection Pirani, Convectron, or Pirani Sensors
7.4.1 Locating the Sensor
Locate a Pirani sensor appropriately for measuring a chamber or manifold pressure. Install the sensor away
from pumps and gas sources for the most representative data. Place the sensor in a location with minimal
vibration.
7.4.2 Preventing Contamination in a Pirani Sensor
Locate and orient the heat-loss sensor to avoid contaminants that might affect the tube's element. For
example, if a sensor is installed directly above a roughing pump oil vapor could contaminate the filament
wire and cause incorrect readings.
Install the sensor with the vacuum port facing downward whenever possible. This helps to prevent
particulates and liquids from entering the sensor. The use of a screen or porous filter at the port can be
helpful, such as MKS seal and centering ring assembly with screen.
7.4.3 Orienting the Series 317Convection Pirani or Convectron Sensor
When measuring pressures greater than 1 Torr, the Series 317 or Series 275
Convectron sensors must be mounted with their axis horizontal.
Measurements below 1 Torr are less affected by position, but readings will be incorrect at higher pressures.
The sensors are calibrated with the tube axis horizontal. Incorrect mounting could result in under- or
over-pressure, damaging equipment, or injury.