937B Controller Instruction Manual
pg. 19
5
MKS Series 937B Vacuum System Controller
The MKS Series
937BVacuum System Controller provides accurate and reliable pressure measurement
between 1
10
-11
Torr to 1
10
+5
Torr. A number of different MKS pressure sensors can be connected to
the 937B.
•
MKS Baratron Capacitance Manometers with ranges from 0.02 to 10,000 Torr (up to 6)
•
MKS Series 423 I-Mag or Series 431/422 Cold Cathode sensors (up to 3)
•
MKS Low Power Nude gauge or Mini BA Hot Cathode sensors (up to 3)
•
MKS Series 317 Convection Pirani sensors (up to 6)
•
MKS Series 275 Convectron sensors (up to 6)
Figure 5-1 937B Front View
With 3 module slots available and the ability to configure a variety of sensor combinations, the Series
937B Vacuum System Controller can accommodate many unique requirements and applications. It is
designed with versatility and ease-of-use in mind, with a large LCD screen that displays:
•
Pressure readings for all sensors connected to the controller (up to 6)
•
Units of the indicated pressures--Torr, mbar, Pa, microns
•
The type of pressure sensor in operation
•
Turn ON / Turn OFF of hot or cold cathode sensors by a higher pressure sensor
•
Relay status (enabled and activated relays are displayed)
•
The operating status of Hot Cathode sensor (active filament, degas)
•
The control status of hot and cold cathode pressure sensors
•
The auto zero channel for Pirani/CP/CM sensors
•
Leak checking mode (activated by the leak check button)
•
System self-checking information (module status, sensor status, pressure range, and etc.)
•
Front panel control lockout is possible to prevent unintended set up changes