Safety Procedures and Precautions
Valve Safety Information
4
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All valve fittings must be consistent with valve specifications, and compatible with the intended
use of the valve. Assemble and tighten fittings according to manufacturer's directions.
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate the valve at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust,
dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate the
process.
KEEP AWAY FROM VALVE OPENING
Keep fingers, other body parts, and other materials away from the valve opening when the valve
is in operation.
Содержание 653B
Страница 3: ...117082 P1 Rev D 1 98 MKS Type 653B Exhaust Throttle Valve ...
Страница 8: ...List of Figures and Tables vi ...
Страница 26: ...Interface Connector Chapter Two Installation 18 This page intentionally left blank ...
Страница 32: ...General Specifications Appendix A Product Specifications 24 This page intentionally left blank ...
Страница 34: ...General Specifications Appendix B ASA Series Flange Specifications 26 This page intentionally left blank ...
Страница 36: ...General Specifications Appendix C ISO NW Series Flange Specifications 28 This page intentionally left blank ...
Страница 38: ...General Specifications Appendix D CF Series Flange Specifications 30 This page intentionally left blank ...
Страница 40: ...General Specifications Appendix E JIS Series Flange Specifications 32 This page intentionally left blank ...