MKS 653B, Руководство пользователя

Страница: 31 / 41

Appendix A: Product Specifications General Specifications
23
Appendix A: Product Specifications
General Specifications
CE Compliance
Electromagnetic Compatibility
2
Machinery
EMC Directive 89/336/EEC
Machinery Directive 89/392/EEC
Compatible Controllers MKS Type 651, 1651, 652 (Revision B or later)
Speed (open to close) 1.7 seconds
Resolution 1/12,000
Valve body operating temperature
Standard:
Optional:
0° to 100° C
0° to 150° C
3
Valve motor ambient operating temperature -20° to +40° C
Differential pressure across valve 1 atm. (15 psig) maximum
External leakage at shaft seal 1 x 10
-7
scc/sec He for 1 min. with 1 ATM P
Materials exposed to process 316L sst, Viton
®
Shaft/Flapper seal
4 Viton
Due to continuing research and development activities, these product specifications are subject to change without notice.
2
An overall metal braided shielded cable, properly grounded at both ends, is required during use.
3
Consistent with shaft seal and flapper seal O-ring material.
4
Where Viton is used, other materials are available; consult factory for additional information.