MKS 653B, Руководство пользователя

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How This Manual is Organized Chapter One: General Information
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How This Manual is Organized
This manual is designed to provide information and instructions in the proper installation,
operation, and maintenance of the MKS Type 653 valve.
Before installing your valve in a system and/or operating it, carefully read and familiarize
yourself with all precautionary notes in the Safety Messages and Procedures section at the
beginning of this manual. In addition, observe and obey all WARNING and CAUTION
notes provided throughout the manual.
Chapter One, General Information, (this chapter) introduces the product.
Chapter Two, Installation, explains the environmental requirements and describes how to mount
the valve in your system.
Chapter Three, Operation, describes how to use the valve and explains all its features.
Chapter Four, Maintenance provides instructions on how to clean the valve.
Appendix A, Product Specifications, lists the specifications of the valve.
Appendices B through E, contain the Flange Specifications.
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration
and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of MKS
instruments, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return an instrument to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning
All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials. The Type 653 valve,
in particular, must be purged of all contaminants.