MKS 653B, Руководство пользователя

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Cleaning the Valve Chapter Four: Maintenance
22
Cleaning the Valve
Caution
Prior to performing any removal and cleaning of the 653 valve,
please refer to, and strictly follow, all applicable company safety
procedures. If allowed by your company safety procedures, the valve
may be cleaned after removal from the system. Any cleaning
material used must be compatible with 316 sst plus nickel, the
selected elastomer, as well as any process material/by-products which
may be deposited on the valve.
The process wetted parts - shaft, flapper, and valve body - are 316L stainless steel. They may be
cleaned using appropriate chemicals to remove process contamination. The other parts should be
cleaned in non-reactive solvents. Do not dip the motor or switches in cleaning fluid. Inspect all
parts for damage - nicks, dents, wear, distortion and corrosion. If any parts appear to be
damaged, contact MKS for repair or replacement. Polish wetted surfaces to remove stains,
paying particular attention to O-ring sealing surfaces.