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LH72 initial Setup Manual
DZ51
Adapter connection (Digital gauge)
Gauge
Resolution
Adapter 1
Adapter 2
Counter
DG-B
0.5μm
DZ51
SZ70-1
LG20
LH70/71/71A/72
LY71/72
DL310B/330B
10μm
Gauge
Resolution
Adapter
Counter
DG
0.5μm
SZ05
－
T01
LG20
LH70/71/71A/72
LY71/72
Screws
Screws
Screw
Appendix 2-2
Head-amp
Connector
Connector
Screws
SZ05-T01
connector
Cable (300mm)
SZ70-1
Counter unit
Head-amp
Screws
Cable (300mm)
Counter unit
Use screws to secure it in place.
Use screws to secure it in place.
Use screws to secure it in place.
SZ70-1
Gauge
Resolution
Adapter
Counter
DE12BR/30BR
0.1μm
SZ70-1
LG20
LH70/71/71A/72
LY71/72
Gauge
Resolution
Connection cable
Counter
DK-**
0.1μm
or
0.5μm
CE29-**
**: 003/01/03/05/10
(0.3 to 10m)
LG20
LH70/71/71A/72
LY71/72
Counter unit
Screws
DK series
CE29-**
Use screws to secure it in place.
