77
July 2010 50PJ350 Plasma
Z
Z
-
-
SUS Board Component Identification
SUS Board Component Identification
P101
Z-SUS
Output
FETs
P2
VS from Y-SUS.
Error Com to
the Y-SUS
M5V from SMPS to the Y-SUS gen16V.
M5V and 16V are routed through the Control board.
Logic Signals generated on the Control board.
Z-SUS
Waveform
Test Point
J36
P3 To Z-SUB
No IPMs
FS1
VS
6.3A/250V
Z-Bias
VR201
Z-Bias TPs
Z-SUS
Waveform
Development
FETs
P/N EBR63040301
P102
No IPMs
No IPMs
P12
from
Control