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Specifications are subject to change without notice.

All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.

All other trademarks and trade names are the property of their respective companies.

A G R E A T E R M E A S U R E O F C O N F I D E N C E

Keithley Instruments, Inc.

Corporate Headquarters

• 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) • www.keithley.com

12/04

Specifications are subject to change without notice.

All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.

All other trademarks and trade names are the property of their respective companies.

A G R E A T E R M E A S U R E O F C O N F I D E N C E

Keithley Instruments, Inc.

Corporate Headquarters

• 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY (534-8453) • www.keithley.com

12/04

Содержание SourceMeter 2611

Страница 1: ...www keithley com Series 2600 System SourceMeter User s Manual 2600S 900 01 Rev A May 2006 A G R E A T E R M E A S U R E O F C O N F I D E N C E...

Страница 2: ...n without Keithley s express written consent or misuse of any product or part This warranty also does not apply to fuses software non recharge able batteries damage from battery leakage or problems ar...

Страница 4: ...ld incorporate immediately into the manual Addenda are numbered sequentially When a new Revision is created all Addenda associ ated with the previous Revision of the manual are incorporated into the n...

Страница 5: ...C Standard IEC 60664 Most measurement control and data I O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over voltage...

Страница 6: ...ing the combined effect of normal and common mode voltages Use standard safety precautions to avoid personal contact with these voltages The symbol indicates a connection terminal to the equipment fra...

Страница 7: ...2 Remote Operation How do I use the remote interface 2 2 How do I use Test Script Builder 2 4 How do I use TSB to make measurements 2 9 How do I use other programs 2 12 Using LabVIEW 2 12 Using Visual...

Страница 8: ...erformance B 2 Setting speed B 2 Disabling auto zero to increase speed B 2 How do I use the Digital I O port B 3 Digital I O port terminals B 3 Controlling the Digital I O port B 3 How do I trigger ot...

Страница 9: ...lay format 1 17 2 Remote Operation Figure 2 1 GPIB cable 2 2 Figure 2 2 RS 232 cable 2 2 Figure 2 3 Test Script Builder initial startup screen 2 6 Figure 2 4 Instrument console control icons 2 7 Figur...

Страница 10: ...3 6 LabVIEW source step example 3 15 Figure 3 7 GUI after loading the non function script GPIB 3 18 Figure 3 8 GUI after running the non function script GPIB 3 19 Figure 3 9 GUI after loading and runn...

Страница 11: ...d 2612 source measure capabilities 1 8 3 Test Script Processor Interaction 4 Controlling Multiple SourceMeters TSP Link Table 4 1 Assigning a node number to an instrument from the front panel 4 3 Tabl...

Страница 12: ...6 2600 900 01 Rev A May 2006 List of Tables Series 2600 System SourceMeters User s Manual This page left blank intentionally...

Страница 13: ...2611 and 2612 1 8 How do I power up the instrument 1 8 Connect to line power 1 9 Turn on power 1 9 Set line frequency 1 9 How do I make measurements 1 10 Connect the DUT 1 10 Select source and set sou...

Страница 14: ...ws that the surface may be hot Avoid personal contact to prevent burns The WARNING heading used in this manual explains dangers that might result in personal injury or death Always read the associated...

Страница 15: ...T O E D I T E N T E R SYSTEM SourceMeter POWER AUTO CURSOR SYSTEM SourceMeter POWER AUTO CHANNEL A CHANNEL B RANGE RANGE CURSOR RANGE EXIT ENTER TRIG MENU SPEED DIGITS REL FILTER SRC LIMIT MEAS MODE 0...

Страница 16: ...Source measure setup Models 2602 2612 only SRC Channel B Selects the source function V or A and places cursor in the source field MEAS Channel B Cycles through measure functions V A or W LIMIT Channel...

Страница 17: ...les or disables source or measure auto range 4 Output control and LED status indicator OUTPUT ON OFFTurns source output on or off LED indicator Lights up when output is on 5 Rotary Knob and CURSOR key...

Страница 18: ...ITH FRONT PANEL MENU LINE RATING 100 240VAC 50 60Hz 240VA MAX DIGITAL I O RS 232 TSP Link LINE FUSE SLOWBLOW 3 15A 250V CAT I S S LO LO HI HI G G G G CHANNEL A UL C US LISTED SourceMeter 4ZA4 CAT I S...

Страница 19: ...ructions to prevent overheating 5 Chassis ground Ground screw for connections to chassis ground 6 Low noise chassis ground Ground jack for connecting Output HI or LO to chassis 7 RS 232 Female DB 9 co...

Страница 20: ...01 and 2602 are listed in Table 1 1 Table 1 1 Models 2601 and 2602 source measure capabilities Function Capabilities Source DC voltage Source DC current 1 V to 40 4V 1pA to 3 03A Measure DC voltage Me...

Страница 21: ...o electric shock Step 2 Turn on power Turn on the instrument by pressing the front panel power switch to the on I position Assuming no errors occur the Series 2600 will power up as follows After a few...

Страница 22: ...t powered if a hardware or software fault occurs Step 1 Connect the DUT Connect a 10k resistor to the SourceMeter Channel A HI and LO terminals as shown in Figure 1 3 Connect the resistor to the suppl...

Страница 23: ...ess AUTO RANGE and note the AUTO annunciator turns on The instrument will automatically select the best range based on the measured value You can also use manual ranging by pressing the up or down RAN...

Страница 24: ...refer to Section 14 of the Series 2600 Reference manual 3 Press the MEAS key several times to display measured voltage resis tance and power Typical values for the 10k resistor are 10 0000V 10 0000k a...

Страница 25: ...anel Operation 1 13 Return to In this section 2600S 900 01 Rev A May 2006 Figure 1 4 Interlock circuit To output stage 10kW Rear panel Chassis ground Coil resistance 145W 10 220V supply 220V supply IN...

Страница 26: ...line displays the measure function V A W or W Bottom line displays the source function V or A and level Source Measure and Compliance Limit display for SMU A Top line displays the measure function V A...

Страница 27: ...3 Step 2 Set up source and measure functions Using the procedure described in How do I make measurements earlier in this section set up source and measure functions Source function volts Source range...

Страница 28: ...ayed if a buffer is empty 2 Note the buffer display data Refer to Figure 1 6 The reading is on the top display at the left The buffer location number is on the right For example location 000001 indica...

Страница 29: ...V 00000000 001s Use Rotary Knob Use Rotary Knob Use Rotary Knob Buffer Location Number Timestamp seconds Reading Source Value 1 00000 mA 0000002 SrcA1 10 0000 V 00000000 002s 1 00000 mA 0000003 SrcA1...

Страница 30: ...1 18 Front Panel Operation Series 2600 System SourceMeters User s Manual 2600S 900 01 Rev A May 2006 Return to In this section This page left blank intentionally...

Страница 31: ...Test Script Builder 2 4 Open and close an instrument resource 2 7 Save and clear console window 2 8 Select command and language reference views 2 8 How do I use TSB to make measurements 2 9 Reset inst...

Страница 32: ...d IEEE 488 cable such as the Keithley Instruments Model 7007 to connect the Series 2600 IEEE 488 connector to the GPIB connector on the computer Refer to Figure 2 1 RS 232 Use a shielded 9 pin RS 232...

Страница 33: ...unicate 1 Press MENU to open up the Main Menu 2 Select COMMUNICATION then press ENTER 3 Select INTERFACE_CFG then press ENTER 4 Choose GPIB then press ENTER 5 Set the GPIB address 0 to 30 and press EN...

Страница 34: ...s Project Opens closes and builds projects Run Runs scripts Window Selects which window to display Help Provides access to online help files Project Navigator pane The window pane on the left side is...

Страница 35: ...comment in a script it will also appear in the Tasks tab where additional information can be added Command Help Provides online help to the Instrument Command Library ICL Language Help Provides onlin...

Страница 36: ...em SourceMeters User s Manual 2600S 900 01 Rev A May 2006 Return to In this Section Figure 2 3 Test Script Builder i SourceMeter Script Interaction Pane Script Development Pane Menu Bar Navigator Pane...

Страница 37: ...ure 2 4 2 Choose the desired instrument from the dialog box Refer to Figure 2 5 drop down menu to select a communications resource GPIB At the factory the GPIB address for the SourceMeter is set to 26...

Страница 38: ...ce dialog box Step 3 Save and clear console window You can save and clear the console window as follows Save console Click on the Menu arrow Figure 2 3 choose Save Console then choose the folder and f...

Страница 39: ...nd measure current on Channel A using a 10k resistor as the DUT The complete command sequence as it would appear in the console win dow is shown in Figure 2 6 along with instrument responses Figure 2...

Страница 40: ...t guarantee the outputs are not powered if a hardware or software fault occurs Step 1 Reset instrument A good practice is to reset the instrument to its default settings before the start of a test To...

Страница 41: ...window with the following command print reading Note that the reading response will appear in the console window refer to Figure 2 6 Alternatively you can take and print readings by including the appr...

Страница 42: ...abVIEW The source measure example using LabVIEW is shown in Figure 2 7 The test steps are 1 Reset instrument 2 Select source voltage function 3 Set source output voltage 4 Turn on output 5 Take curren...

Страница 43: ...Series 2600 System SourceMeters User s Manual Remote Operation 2 13 Return to In this Section 2600S 900 01 Rev A May 2006 Figure 2 7 LabVIEW source measure example block diagram...

Страница 44: ...ser interface The GUI graphical user interface shown in Figure 2 8 was created to demonstrate how to control a Keithley Instruments Series 2600 SourceMeter using Visual Basic 6 0 Source code for this...

Страница 45: ...rce autorange 6 Set source level to 5V 7 Set current compliance to 100mA 8 Set current measurement range to 100mA 9 Set integration time to 1PLC 10 Turn on SMU A output 11 Measure the current and put...

Страница 46: ...tatus Call send Addr smua source func smua OUTPUT_DCVOLTS intStatus Call send Addr smua source autorangev smua AUTORANGE_ON intStatus Call send Addr smua source levelv 5 intStatus Call send Addr smua...

Страница 47: ...send the same commands to the Series 2600 using NI VISA The VISA resource is for an instrument at address 26 connected to GPIB interface 1 Once again a Keithley Instruments GPIB card was used for thi...

Страница 48: ...2 18 Remote Operation Series 2600 System SourceMeters User s Manual 2600S 900 01 Rev A May 2006 Return to In this Section This page left blank intentionally...

Страница 49: ...ry scripts 3 2 User scripts 3 2 How do I run a script from the front panel 3 2 How do I interact with scripts using Test Script Builder 3 3 Running a factory script 3 4 Modifying a factory script 3 6...

Страница 50: ...created by a user using the Test Script Builder or an external program The user script is loaded in the Series 2600 and stored in volatile or non volatile memory If stored in non volatile memory the s...

Страница 51: ...ripts using Test Script Builder Reference Refer to Using the Test Script Builder in Section 2 of the Series 2600 Reference Manual for details on the Test Script Builder The following function for fact...

Страница 52: ...three current measurements in the reading buffer smua nvbuffer1 Also stored in the buffer are the voltage source settings and timestamps for the measurements The timestamps in seconds are referenced...

Страница 53: ...ve output is returned in the following order reading1 timestamp1 sourcevalue1 reading2 timestamp2 sourcevalue2 reading3 timestamp3 sourcevalue3 Calling a function without parameters When the command t...

Страница 54: ...the KIGeneral factory script into the Test Script Builder modify code for the SourceVMeasureI function load the script in the Series 2600 as a user script under a different name and then configure the...

Страница 55: ...Importing a factory script project from the Series 2600 A Click File to display the drop down file menu and click Import to open the Import wizard B In the Import Select box click Existing Project Fr...

Страница 56: ...r the main tsp script file The test code for all of the functions of the KIGeneral factory script are in this tab Use the scroll buttons on the right side of the tab to view more code Editing example...

Страница 57: ...s follows Click to save the main tsp script file Step 3 Storing the script in non volatile memory of the Series 2600 Reference Refer to User scripts in Section 2 of the Series 2600 Reference Manual fo...

Страница 58: ...on tabs for that script will appear in the Run box 3 Presently the Name of the script is KIGeneral You should change the name so the script is not confused with the factory script of the same name tha...

Страница 59: ...ation example Script Attributes tab shown 5 Click the Script Attributes tab to display the load and store options and select the LoadOnly run action and Non volatile storage as shown in 7 6 Click the...

Страница 60: ...tion The following command will add the test name PulseVMeasI to the menu It will also configure the test to run the KIGeneralUser script and call the PulseVMeasureI function display loadmenu add Puls...

Страница 61: ...r script script delete KIGeneralUser Deleting a user test After deleting a script you should also delete the test from the USER TESTS menu since it no longer exists The following command deletes the P...

Страница 62: ...ps measures the current at each step and stores the result in a table Once all steps are completed the stored table current values are printed The Series 2600 command sequence localnode prompts 0 Disa...

Страница 63: ...Series 2600 System SourceMeters User s Manual Test Script Processor Interaction 3 15 Return to In this section 2600S 900 01 Rev A May 2006 Figure 3 6 LabVIEW source step example...

Страница 64: ...mua source func smua OUTPUT_DCVOLTS smua source autorangev smua AUTORANGE_ON smua source levelv 5 smua source limiti 0 1 smua measure rangei 0 1 smua measure nplc 1 smua source output smua OUTPUT_ON n...

Страница 65: ...Series 2600 System SourceMeters User s Manual Test Script Processor Interaction 3 17 Return to In this section 2600S 900 01 Rev A May 2006 Figure 3 7 GUI after loading the non function script GPIB...

Страница 66: ...eginning of the script MeasCurrScript is the name assigned to the script Read the file Do While Not EOF 1 Loop until the end of the script file Line Input 1 strScriptline Read a line from the script f...

Страница 67: ...ox of the GUI as shown in Figure 3 8 TSP prompts are enabled prior to running the script The following command runs the script can also use MeasCurrScript form of the command Call send Addr localnode...

Страница 68: ...g the Load Script GPIB command button The script is downloaded exactly as shown in the previous example except the open file and loadscript commands reflect the different script name as shown below Op...

Страница 69: ...t simply indicates that the MeasCurr ntimes function has been created function MeasCurr ntimes local l_i Local counter variable reset display screen display SMUA display smua measure func display MEAS...

Страница 70: ...22 Test Script Processor Interaction Series 2600 System SourceMeters User s Manual 2600S 900 01 Rev A May 2006 Return to In this section Figure 3 9 GUI after loading and running the function script GP...

Страница 71: ...take one or 100 readings simply by calling the function with a different value for ntimes for example MeasCurr 100 You can pass parameters to a function but not to a script However you must initially...

Страница 72: ...3 24 Test Script Processor Interaction Series 2600 System SourceMeters User s Manual 2600S 900 01 Rev A May 2006 Return to In this section Figure 3 10 GUI after calling the function GPIB...

Страница 73: ...2 Assign node numbers 4 2 Reset the TSP Link 4 3 4 4 How do I use the expanded system 4 4 Accessing resources of TSP Link nodes 4 4 4 4 Using the alias localnode 4 4 Running scripts in a TSP Link sys...

Страница 74: ...DIGITAL I O RS 232 TSPlink LINE FUSE SLOWBLOW 3 15A 250V CAT I S S LO LO HI HI G G G G CHANNEL A MADE IN U S A CAT I S S LO LO HI HI G G G G CHANNEL B UL C US LISTED SourceMeter 4ZA4 WARNING NO INTER...

Страница 75: ...nt command will return the node number For example if the node number is 1 the value 1 000000e00 will be returned Step 3 Reset the TSP Link Reference Refer to Initialization in Section 9 of the Series...

Страница 76: ...he instruments in the system the following command checks the state of the TSP Link print tsplink state If the reset is successful online will be the output to indicate that communication to all nodes...

Страница 77: ...SP Link system For remote programming only a script stored in the Master can be run Scripts in the Slaves cannot be accessed Refer to How do I interact with scripts using Test Script Builder in Sectio...

Страница 78: ...4 6 Controlling Multiple SourceMeters Series 2600 System SourceMeters User s Manual 2600S 900 01 Rev A May 2006 Return to In this section This page left blank intentionally...

Страница 79: ...Return to 2600S 900 01 Rev A May 2006 AppendixA Specifications In this Appendix Model 2600S Specifications page A 2...

Страница 80: ...Ranges 50 s typical 6V Range 100 s typical 40V Range 150 s typical 5 CURRENT SOURCE OUTPUT SETTLING TIME Time required to reach 0 1 of final value when changing from 10 to 90 of range after source le...

Страница 81: ...not programmed as the active host interface the SourceMeter can use the RS 232 interface to control other instrumentation EXPANSION INTERFACE The TSP Link expansion interface allows TSP enabled instr...

Страница 82: ...and is processed on a fixed range 200mV 2V Ranges 50 s typical 20V Range 100 s typical 200V Range 700 s typical CURRENT SOURCE OUTPUT SETTLING TIME Time required to reach 0 1 of final value after sour...

Страница 83: ...3 INPUT RESISTANCE ACCURACY 1 Year 23 C 5 C rdg volts 200 000 mV 1 V 10 G 0 015 225 V 2 00000 V 10 V 10 G 0 02 350 V 20 0000 V 100 V 10 G 0 015 5 mV 200 000 V 1 mV 10 G 0 015 50 mV SOURCE SPECIFICATIO...

Страница 84: ...imum Logic Low Voltage 0 7V 5 0mA Absolute Maximum Sink Current flowing into Digital I O pin 11mA 5V Power Supply Pin Limited to 600mA solid state fuse protected Safety Interlock Pin Active high input...

Страница 85: ...700 1600 1450 1400 1600 1500 1400 1325 0 1 NPLC Internal 565 475 555 470 540 450 510 440 535 455 505 430 0 1 NPLC Digital I O 490 420 470 405 470 410 450 390 470 400 450 390 1 0 NPLC Internal 59 49 59...

Страница 86: ...8 NT 2000 or XP Drivers IVI VISA drivers for VB VC C LabVIEW TestPoint and LabWindows CVI READING BUFFERS Non volatile storage area s reserved for measurement data Reading buffers are arrays of measur...

Страница 87: ...Triggering a scanner B 5 Programming triggering B 5 How do I generate a service request B 6 Setting up a service request B 6 Service request programming example B 6 Polling for SRQs B 6 How do I store...

Страница 88: ...ero Auto zero can be disabled to increase speed at the expense of accuracy Setting speed Press the SPEED key then choose the setting based on your requirements Choose the FAST setting for the fastest...

Страница 89: ...a cable with a Male DB 25 connector Keithley Instruments part number CA 126 1 Figure B 1 Digital I O 1 Digital I O 1 2 Digital I O 2 3 Digital I O 3 4 Digital I O 4 5 Digital I O 5 6 Digital I O 6 7...

Страница 90: ...writebit bit data digio writeport data Read one digital I O input line Read digital I O port Write data to one digital I O output line Write data to digital I O port B 4 Frequently Asked Questions Ser...

Страница 91: ...rt is used as a trigger output and connected to the scanner mainframe trigger input while line 2 of the I O port is used as a trigger input Figure B 2 Triggering a scanner Series 2600 SourceMeter Scan...

Страница 92: ...y bit in the service request enable register At least one bit in this register must always be set but the exact bit s to be set will depend on the desired SRQ event s Service request programming examp...

Страница 93: ...ming The following example demonstrates a typical way to use a reading buffer The commands in the following steps will perform three SMU A voltage measurements store them in nvbuffer1 and then read th...

Страница 94: ...1 is the starting index for values to output rb1 n is the ending index n the number of readings in the buffer which in this case is 3 rb1 includes the measured readings rb1 timestamps includes the tim...

Страница 95: ...ured with the four channels connected in series to output up to 161 6V 40 4V per channel Additional channels can be added stacked but the LO terminal of any SMU channel in the stack must never exceed...

Страница 96: ...x 2 200 A higher than Model 2602 2 Chan B The most accurate measurement of actual current flowing through the DUT will be obtained from Model 2602 2 Chan B Hi Lo 40 4V Max Hi Lo 40 4V Max Chan B Chan...

Страница 97: ...ows 101mA up to 202V 1 515A up to 20 2V Higher current can be output by connecting channels in parallel Figure B 4 shows four channels of two Model 2602s or 2612s connected in parallel Two Model 2602s...

Страница 98: ...t an open circuit that may occur when a four point probe is misplaced or misaligned Figure B 5 shows contact check connections RC is the resistance of the mechanical contact at the DUT and RS is the s...

Страница 99: ...heck measurement is made and the test is aborted Otherwise the output is turned on and the test continues smua reset Restore defaults smua contact speed smua CONTACT_FAST Set speed to fast smua contac...

Страница 100: ...B 14 Frequently Asked Questions Series 2600 System SourceMeters User s Manual 2600S 900 01 Rev A May 2006 Return to In this Appendix This page left blank intentionally...

Страница 101: ...Display modes 1 12 DUT connections 1 10 F Factory scripts 3 2 Front panel summaries 1 2 G GPIB interface 2 2 B 2 H How do I interact with scripts using Test Script Builder 3 3 How do I parallel channe...

Страница 102: ...erface 2 2 B 2 Running a factory script 3 4 Running a user script 3 12 S Safety symbols and terms 1 2 Saving a script 3 8 Script Development pane 2 4 Service request Generating B 6 Polling for B 6 Pro...

Страница 103: ...W What is a script 3 2...

Страница 104: ......

Страница 105: ...Unstable Overload Will not read applied input Calibration only Certificate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measurement inc...

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Страница 108: ...d Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY 534 8453 www keithley com 12 04 Specifications are subject to change without notice All Keithley trademarks and trade names are the...

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