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S530/S540 KTE Linear Parametric Test Library (LPTLib) User's Manual

Section 3: LPTLib command reference

S530-900-01 Rev. E / September 2017

3-23

Matrix errors are generated under the following conditions:

•

I-V connections are included in the connection list, except as noted above.

•

High-voltage pins or 2657A source-measure units (SMUs) are used in arguments in the

conpth

command (S540 systems with only an HVM1212A).

Also see

(on page 3-7)

(on page 3-17)

(on page 3-21)

(on page 3-25)

(on page 3-26)

Содержание S530

Страница 1: ...www tek com keithley S530 S540 Parametric Test System KTE Linear Parametric Test Library Manual S530 900 01 Rev E September 2017 PS530 900 01E S530 900 01E A Tektronix Company...

Страница 2: ...in whole or in part without the prior written approval of Keithley Instruments is strictly prohibited These are the original instructions in English All Keithley Instruments product names are trademar...

Страница 3: ...be connected to mains These instruments will be marked as category II or higher Unless explicitly allowed in the specifications operating manual and instrument labels do not connect any instrument to...

Страница 4: ...ty The CAUTION heading with the symbol in the user documentation explains hazards that could result in moderate or minor injury or damage the instrument Always read the associated information very car...

Страница 5: ...strument and terminal IDs 2 9 Optimizing test sequences 2 9 Specify the default system speed mode 2 10 Fixed range versus autorange measurements 2 10 Fix range trigger instruments 2 10 Use combination...

Страница 6: ...3 24 delcon 3 25 devclr 3 26 devint 3 26 disable 3 28 enable 3 28 forceX 3 29 getlpterr 3 30 getstatus 3 31 imeast 3 32 insbind 3 32 intgX 3 34 kibdefclr 3 36 kibdefint 3 37 kibrcv 3 38 kibsnd 3 39 ki...

Страница 7: ...CHAN 4 2 5 SYS_MEM_ALLOC_ERR 4 2 20 LPT_PREVERR 4 2 21 LPT_FATAL 4 2 22 LPT_FATALINTEST 4 2 24 LPT_TOMANYARGS 4 2 100 MX_INVLDCNT 4 3 101 MX_NOPIN 4 3 102 MX_MULTICON 4 3 109 MX_ILLGLTSN 4 3 113 MX_NO...

Страница 8: ...Table of contents S530 S540 KTE Linear Parametric Test Library LPTLib User s Manual 656 TAPI_CHANLIMIT 4 6 657 TAPI_BUFOFLOW 4 6...

Страница 9: ...scribes how the document is organized and what information is presented in each section Section 2 Linear Parametric Test Library on page 2 1 Describes how the Linear Parametric Test Library LPTLib is...

Страница 10: ...ace to a parametric tester This manual documents the Linear Parametric Test Library LPTLib Measuring The most important part of a parametric tester is its ability to make measurements There are three...

Страница 11: ...y than integrated measurements This is especially true when making autoranged measurements When an instrument makes autoranged measurements all of the measurements it makes when determining the best r...

Страница 12: ...rt ranging successively upranges or downranges until the correct range is found For instruments with many ranges a large change in signal causes the instrument to scan through many ranges before findi...

Страница 13: ...errange condition When this happens the instrument returns a special value to indicate the error instead of the actual measurement Range limits When an instrument is on a range lower than its complian...

Страница 14: ...gX commands to populate a measurement scan table Each call to one of these commands adds an entry to the table You can then use the sweepX command to step a source through a range of source values At...

Страница 15: ...m does not monitor any measurements made by you Instead it requests a fresh reading from the triggering instrument which it then compares to the threshold value This means that while evaluating trigge...

Страница 16: ...oltmeter would not support the function to measure frequency The following tables provide information about which LPTLib commands are supported by the driver for each type instrument The following com...

Страница 17: ...scp_selftest scp_close The following commands are supported by system drivers setmode The following commands are supported by digital multimeter DMM drivers avgi avgv avgX clrtrg devclr getstatus int...

Страница 18: ...terminals that must be connected to your circuit before the instrument can be used in a test sequence For example a simple voltmeter has two terminals A high terminal and a low terminal The terminals...

Страница 19: ...E parameter in the SYSTEM SPEED MODE section of the system KIHOME IC icconfig_ QMO ini file You can also set the speed mode for a specific module by adding the setmode command KI_SYSTEM_SPEED_MODE mod...

Страница 20: ...efault system speed By default the S530 S540 is configured to FAST mode S530 systems upgraded from an older Keithley Test Environment KTE version may not have a SYSTEM SPEED MODE section in their icco...

Страница 21: ...ge differential greater than the MAX_HV value never gets forced Attempting to force a differential voltage beyond the MAX_HV value will result in an LPT error Call the devint command to restore the de...

Страница 22: ...r and the error text explains the cause of the error The first part of the header is the date and time the error occurred Next is the letter E followed by the error number In the example the error num...

Страница 23: ...yntax of command usage Additional details about the command and its placement and relationship to other commands in a test sequence as applicable Examples showing a typical use of the command in a tes...

Страница 24: ...Relative humidity Percent temp Temperature Degree Celsius t Time Seconds v Voltage Volts Brackets are used to enclose optional arguments of a command Period strings indicate additional arguments or co...

Страница 25: ...nstrument on a specific range c i v setauto on page 3 74 Re enable autorange mode Source commands Command Description forceX on page 3 29 limitX on page 3 41 Limit an instrument to a set voltage or cu...

Страница 26: ...current pgu_delay on page 3 48 Set the trigger delay time pgu_fall on page 3 49 Set the fall time of the pulse pgu_halt on page 3 49 Set the fall time of the pulse pgu_height on page 3 50 Set the peak...

Страница 27: ...sX on page 3 84 Measure each point of associated sweep i t v sweepX on page 3 88 Sweep a specified range of current or voltage trigXg trigXl on page 3 91 Trigger if a measurement is greater than a spe...

Страница 28: ...ption devclr on page 3 26 Set all sources to a zero state devint on page 3 26 Reset all instruments and clear the system getlpterr on page 3 30 Get last LPTLib error since devint command getstatus on...

Страница 29: ...connections When used with the I V matrix the addcon command connects every item in the argument list and there is no real distinction between the exist_connect parameter and the rest of the connectio...

Страница 30: ...ge int asweepi int instr_id unsigned int num_points double delay_time double force_array int asweepv int instr_id unsigned int num_points double delay_time double force_array instr_id The instrument i...

Страница 31: ...the same test sequence the smeasX sintgX or savgX arrays are loaded sequentially This appends the measurements from the second asweepX command to the previous results If the arrays are not dimensione...

Страница 32: ...ctor current array forcev SMU2 5 0 Force vce bias asweepi SMU1 10 10 0E 3 ifrc SweepIB 10 points 10 ms apart This example gathers data to construct a graph showing the gain of a bipolar device over a...

Страница 33: ...t Details The avgX command is used primarily to get measurements when The device under test DUT being tested acts in an unstable manner Electrical interference is higher than can be tolerated if the m...

Страница 34: ...ge for 2 0 pF avgc CMTR1 ciss 10 2 0E 3 Measure capacitance ten times with 2 ms between each return average of results to ciss This example shows a test sequence used to measure the capacitance betwee...

Страница 35: ...The device name of the timer to use 0 no timer data timerdata The array used to receive the time points at which the readings were made if timerID 0 the timer is not read and this array is not update...

Страница 36: ...with 100 us delay between readings using TIMER2 with time data labeled timer This example shows how the bmeasX command is used with a timer Each measurement is associated with a timestamp This timest...

Страница 37: ...the time of trigger or breakdown all sources are shut down to prevent damage to the device under test Typically this termination point is the test current required for a given breakdown voltage Once...

Страница 38: ...SMU1 100e 6 Define the I limit for the device rangei SMU1 100e 6 Select a fixed range measurement trigil SMU1 10e 6 Set the trigger point to 10 uA bsweepv SMU1 10 0 50 0 40 10 0e 3 bvdss Sweep from 10...

Страница 39: ...series of one or more connection type commands automatically calls a clrcon command Because this command is automatically called it is not normally used by a programmer If any sources are actively gen...

Страница 40: ...pX command configures SMU2 to source a voltage that sweeps from 0 V through 14 V in 14 steps The results of the first sweepv command are stored in an array called res1 Because of the clrscn command th...

Страница 41: ...oltage or current levels may be used repeatedly within a command if each is separated by a clrtrg command Example double forcur 11 revcur 11 Defines arrays conpin SMU1 1 0 conpin GND 2 0 trigil SMU1 5...

Страница 42: ...graph that shows the forward and reverse conduction characteristics of a diode The clrtrg command allows multiple triggers to be programmed twice in the same test sequence Each result is returned to...

Страница 43: ...pin or terminal may be used in more than one conpin command call If there are no connection rules violated the pin or terminal is connected to the additional items and everything to which it is alrea...

Страница 44: ...ectn 0 path Pathway number to use for the connections connect1 A pin number or an instrument terminal ID connect2 A pin number or an instrument terminal ID connectn A pin number or an instrument termi...

Страница 45: ...generated under the following conditions I V connections are included in the connection list except as noted above High voltage pins or 2657A source measure units SMUs are used in arguments in the co...

Страница 46: ...pin GND 2 0 forcev SMU1 60 0 Generate 60 V from SMU1 delay 20 Pause for 20 ms measi SMU1 ir4 Measure current return result to ir4 This example measures the leakage current of a variable capacitance di...

Страница 47: ...alling the devclr command If GND is included in the list all ground connections are removed Source measure unit SMU lows are hard wired to ground A programmer can run a series of tests in a single tes...

Страница 48: ...3 36 devint This command resets all active instruments in the system to their default states Usage int devint void Details Resets all active instruments in the system to their default states It clear...

Страница 49: ...10 V 20 V 20 V lorangei 1e 6 A 1e 8 A 1e 8 A lorangev 0 21 V 0 20 V 0 20 V Default measurement NPLC 0 01 0 01 0 01 Maximum NPLC 10 25 25 Minimum NPLC 0 01 0 001 0 001 CMTR settings after a devint comm...

Страница 50: ...s also stopped Sending disable TIMERn stops the timer and resets the time value to zero 0 Also see enable on page 3 28 enable This command provides correlation of real time to measurements of voltage...

Страница 51: ...s generate positive voltage or current from the high terminal of the source relative to the low terminal Negative values generate negative voltage or current from the high terminal of the source relat...

Страница 52: ...SMU1 40 0 Apply 40 0 V measi SMU1 ir12 Measure leakage return results to ir12 The reverse bias leakage of a diode is measured after applying 40 0 V to the junction Also see None getlpterr This command...

Страница 53: ...tput value KI_VPVALUE Voltage value V output value KI_IPRANGE The presently programmed range Current range full scale range value or 0 0 for autorange KI_VPRANGE Voltage range full scale range value o...

Страница 54: ...settings options off FAST_RANGE Faster range changes FAST_POLARITY Polarity changes without going to zero DIRECT_IRANGE SMU changes range directly default FAST_ALL All settle fast modes enabled KI_CA...

Страница 55: ...as a higher voltage than that normally available from CMTR2 This command works differently than it does on the S400 and S600 test systems Linear Parametric Test Library LPTLib code imported from these...

Страница 56: ...ied period of time The integration is automatically corrected for 50 Hz or 60 Hz power mains The default integration time is one AC line cycle 1 PLC This default time can be overridden with the KI_INT...

Страница 57: ...0 limiti SMU1 2 0E 8 Limits to 20 0 nA rangei SMU1 2 0E 8 Select range for 20 0 nA forcev SMU1 25 0 Apply 25 V to the gate intgi SMU1 idss Measure gate leakage return results to idss This example mea...

Страница 58: ...if the tester is calling the devclr command internally any external GPIB device is cleared with the given string Each call to the kibdefclr and kibdefint commands copies parameters into a data struct...

Страница 59: ...ester is calling the devint command internally any external GPIB device is initialized with the rest of the known instruments Each call to the kibdefclr and kibdefint commands copies parameters into a...

Страница 60: ...l receive buffer size this is the maximum number of bytes that can be read from the device rcv_len The number of bytes that are read from the device on the GPIB interface this variable is returned by...

Страница 61: ...instrument device does not support secondary addressing this parameter must be 1 timeout The GPIB timeout for the transfer in 100 ms units for example timeout 40 4 0 s send_len The number of bytes to...

Страница 62: ...oes not support secondary addressing this parameter must be 1 timeout The GPIB polling timeout in 100 ms units for example timeout 40 4 0 s serial_poll_byte The variable name for the serial poll byte...

Страница 63: ...erial poll status byte is returned The kibsplw command does the following 1 Waits with timeout for general SRQ assertion on the GPIB 2 Calls the kibspl command Also see kibspl on page 3 40 limitX This...

Страница 64: ...imitv SMU1 150 0 Limit voltage at 150 V forcei SMU1 ibceo Force current through the DUT measv SMU1 vbceo Measure breakdown voltage return results to vbceo This example measures the breakdown voltage o...

Страница 65: ...on a range lower than the one specified by the lorangeX command the range is changed The S530 S540 automatically provides any settling delay for the range change that may be necessary due to this pote...

Страница 66: ...10 0 conpin SMU2 11 0 conpin 12 GND 0 lorangei SMU1 2 0E 6 Select 2 uA as minimum range during autoranging smeasi SMU1 idatvg Set up sweep measurement of IDS sweepv SMU2 0 0 2 5 24 0 002 Sweep gate fr...

Страница 67: ...e measurements can be made in sequence The rangeX command directly affects the operation of the measX command Using the rangeX command prevents the instrument addressed from automatically changing ran...

Страница 68: ...if46 vf47 if46 50e 3 conpin 3 GND 0 conpin SMU1 2 0 forcei SMU1 if46 Forward bias the diode set SMU current limit to 50 mA measv SMU1 vf47 Measure forward bias return result to vf47 In this example t...

Страница 69: ...MU at the time the pulse terminates this reading is buffered internally imeas The variable used to receive the current drawn from the SMU this measurement is made simultaneously with the voltage so th...

Страница 70: ...u_current_limit PGU2 1e 3 Sets the current limit of PGU2 to 1 mA Also see pgu_load on page 3 51 pgu_delay This command sets the amount of time to wait after a trigger signal or command is received bef...

Страница 71: ...cates an error The fall time must be greater than 10 ns and less than 33 ms Example pgu_fall PGU2 50e 9 Sets the pulse fall time of PGU2 to 50 ns Also see pgu_range on page 3 53 pgu_rise on page 3 53...

Страница 72: ...20 V Example pgu_height PGU2 2 Sets the height of the pulse on PGU2 to 2 V Also see None pgu_init This command initializes communication with the pulse card and sets the pulse generator to a specific...

Страница 73: ...ter than 1 and less than 10 M Example pgu_load PGU1 100 Sets the output impedance of PGU2 to 100 Also see None pgu_mode This command sets the pulse mode of the pulse generator Usage istat int pgu_mode...

Страница 74: ...of the pulse in volts input a positive or negative number Details This command returns a 0 if executed without error a negative number indicates an error The amplitude and offset combined must be gre...

Страница 75: ...mple pgu_range PGU2 20 Sets the voltage range of the PGU2 to 20 V Also see pgu_fall on page 3 49 pgu_period on page 3 52 pgu_rise on page 3 53 pgu_width on page 3 57 pgu_rise This command sets the ris...

Страница 76: ...mand should not be used in any new code that you develop pgu_trig This command triggers the first pulse generator unit and outputs the waveforms this command is for compatibility with previous version...

Страница 77: ...is command triggers a burst of pulses that have been previously defined Unlike the pgu_trig command this command takes a unit number and a number of pulses as arguments so that you can trigger a strea...

Страница 78: ...rns a 0 if executed without error a negative number indicates an error To trigger multiple pulse generator units you can sum the unit numbers designated to the pulse generators as listed in the follow...

Страница 79: ...a predetermined length of time Usage int pulsei int instr_id double forceval double time int pulsev int instr_id double forceval double time instr_id The instrument identification code this may be SMU...

Страница 80: ...the residual voltage or current decays All measurements made using the pulseX and measX commands are processed after the pulse has completed Whenever the pulseX command is run either a default or a p...

Страница 81: ...searchv SMU2 0 0 3 0 7 2 0E 5 res2 Increase voltage until trigger point occurs Return results to res2 This example measures the threshold voltage shift of an FET by calling two searchv commands 1 The...

Страница 82: ...range The value is returned when this occurs The rangeX command can also reference a source because a source measure unit SMU can be either of the following Simultaneously a voltage source voltmeter...

Страница 83: ...imiti SMU1 1 0E 3 Limit current to 1 0 mA rangei SMU1 2 0E 3 Select range for 2 mA forcev SMU1 35 0 Force 35 V measi SMU1 icer2 Measure leakage return results to icer2 This example specifies connectio...

Страница 84: ...in reverse bias mode with the high side of SMU1 connected to the cathode This type of diode has high capacitance and low leakage current Because of this a 20 ms delay is added After the delay current...

Страница 85: ...Details This command eliminates the need to calculate the forced array in the application When this command is used with one of the sweep routines you can determine the exact forced value for each poi...

Страница 86: ...n the scan table The savgX command sets up the new scan table entry to make an averaging measurement The measurement results are stored in the array specified by the result parameter Each time a measu...

Страница 87: ...voltage that sweeps from 0 through 50 V Capacitance is measured 26 times during the sweep The results are stored in an array called res1 Equation 9 Example of savgX command Also see clrscn on page 3...

Страница 88: ...is greater than or equal to this parameter input upper_bound The measured peak is ignored if the ratio of measured frequencies versus returned peaks is less than or equal to this parameter input freq...

Страница 89: ...s example sets up a spectrum analyzer to scan a 20 MHz to 850 MHz signal in 1 MHz steps and return five detected peak frequencies that are within the specified values of the lower_bound and upper_boun...

Страница 90: ...n code of the scope card freq_result The measured frequency in Hertz Hz amp_result The measured amplitude in decibels dB Details The scope card must be initialized before using this command This comma...

Страница 91: ...y in Hertz Hz amp_result The measured amplitude in decibels dB Details The scope card must be initialized before using this command This command returns a 0 if executed without error a negative number...

Страница 92: ...he start stop and step scan resolution frequencies of a scan Usage int scp_setup int instr_id double min_freq double max_freq double res_bandwidth instr_id The instrument identification code min_freq...

Страница 93: ...ication code of the sourcing instrument SMUn CMTRn PSRCn min_val The lower limit of the source range max_val The upper limit of the source range iterate_no The number of separate current or voltage le...

Страница 94: ...aximum values At the end of each iteration the program determines whether to increase or decrease the source voltage The determination is dependent on the evaluation of the trigger point Figure 3 Mini...

Страница 95: ...4 0 trigig SMU2 l 0E 6 Set trigger point for 1 uA forcev SMU3 ssbiasv Apply a substrate bias voltage ssbiasv forcev SMU2 vds1 Apply a drain voltage of vds1 searchv SMU1 0 6 1 7 8 1 0E 3 vgs1 Set for 8...

Страница 96: ...urn setauto SMU1 Enable autorange mode lorangei SMU1 2 0E 6 Select 2 uA as minimum range during autoranging delay 200 Delay after range change smeasi SMU1 idatvg Setup sweep measurement of IDS sweepv...

Страница 97: ...GND 3 0 setmode SMU1 KI_INTGPLC 0 025 forcev SMU2 5 0 sintgv SMU1 vb smeasi SMU2 ic sweepi SMU1 0 0 1 0e 6 9 0 0 The setmode command in this example specifies the period 0 025 AC line cycles over whic...

Страница 98: ...SMUs only value Where value 300 to 3000 Sets the maximum voltage for all 2657A SMUs in the S540 system The default value is 3000 V Calling the devint command resets this value to the MAX_HV value def...

Страница 99: ...M Sets a SMU to use ranges equivalent to a DMM Provides a lower resolution fast measurement Used for high current applications KI_ELECTROMETER Sets a SMU to use ranges equivalent to an electrometer Pr...

Страница 100: ...Y_FACTOR 26xx value When the KI_MEAS_DELAY modifier is set to KI_DELAY_AUTO specifying this modifier multiplies the delay values that are stored in the 26xx SMU by the specified value KI_SENSE 26xx 0...

Страница 101: ...asurements Used for low voltage applications KI_ELECTROMETER Sets a SMU to use ranges equivalent to an electrometer Provides high input impedance but has slower measurement time Used for high resistan...

Страница 102: ...100 kHz is default KI_CVU_LENGTH KI_CVU_CABLE_CORR_LV KI_CVU_CABLE_CORR_HV KI_CVU_CABLE_CORR_LV_HV Specifies the type of cables used in the system so that cable length corrections can be automated KI...

Страница 103: ...tput It also activates the voltmeter function of the instrument Additionally the setimtr command operates as a voltage source with 0 0 V output it also activates the current meter function of the inst...

Страница 104: ...p During each scan a measurement is made for every entry in the scan table The measurements are made in the same order in which the entries were made in the scan table The sintgX command sets up the n...

Страница 105: ...nA sintgi SMU1 idss Measure current with SMU1 return results to idss sweepv SMU1 0 0 25 0 15 Perform 16 measurements 1 0E 3 steps from 0 through 25 V each step 1 ms in duration This example collects...

Страница 106: ...table During any of the sweep commands a measurement scan is done for every force point in the sweep During each scan a measurement is made for every entry in the scan table The measurements are made...

Страница 107: ...rray sweepv SMU1 0 0 0 3 12 25 0E 3 Make 13 measurements as the voltage ranges from 0 to 0 3V This example determines the measurement data needed to create a graph showing the negative resistance char...

Страница 108: ...the reading is steady delay The delay between points to wait in seconds Details This command is used when the device stability is uncertain It continually reads the instrument until the resulting mea...

Страница 109: ...ement and the previous measurement are within 0 1 If the measurements are within 0 1 the result of the last measurement is stored and the program continues If the measurements are not within 0 1 the p...

Страница 110: ...d with the smeasX sintgX savgX or rtfary command The sweepX command causes a sourcing instrument to generate a series of ascending or descending voltages or current changes called steps During this so...

Страница 111: ...sX sintgX or savgX commands adds commands to the active measure list The previous measures are still defined and used The clrscn command is used to eliminate the previous measures for the second sweep...

Страница 112: ...1 V smeasi SMU2 resi Perform a series of current measurements return the results to the array resi sweepv SMU2 0 0 5 0 10 2 5E 3 Generate 11 steps and 11 points each 2 5 ms duration ranging from 0 V t...

Страница 113: ...ied as the trigger point this trigger point value is reached when either of the following occurs The measured value is equal to or greater than the value argument of the trigXg command The measured va...

Страница 114: ...A in 15 iterations Return the current resulting from the last iteration as res22 This example uses the trigig and searchi commands together to generate and search for a specific current level A search...

Страница 115: ...trigil SMU1 5 0E 3 If greater than 5 mA stop ramping smeasi SMU1 res1 Measure current at each of the 19 levels return results to the res1 array sweepv SMU1 0 6 0 0 18 1 00E 3 Generate 0 6 V to 0 0 V i...

Страница 116: ...e tstsel command per program is recommended Calling a new test station within a test program cancels any previous tstsel calls To relinquish control of an individual test station so another station ca...

Страница 117: ...e went into a current overload condition and shutdown 3 0E22 Oscillation Detection Instrument was forced into a shutdown state because oscillations were detected at the instrument 4 0E22 Thermal Shutd...

Страница 118: ...e enough memory for the Keithley system software to run correctly 20 LPT_PREVERR Message Command not executed because a previous error was encountered Remarks There was an error encountered during a t...

Страница 119: ...attempt was made to connect this terminal to more than one pin at a time 109 MX_ILLGLTSN Message Illegal test station NNN Remarks An internal system software error has occurred 113 MX_NOSWITCH Message...

Страница 120: ...st Library LPTLib command used 156 CB_NOFILE Message Configuration file does not exist XXX Remarks A required configuration file is missing 157 CB_FORMAT Message Configuration file format error File X...

Страница 121: ...mismatch Remarks The application controller software version and the tester software version do not match Either the system software was not installed correctly or the application controller is being...

Страница 122: ...ill be generated by the tester Remarks The tester cannot be located on the network Make sure the tester is powered on and has started correctly This problem can also be caused by network problems 653...

Страница 123: ...names are the property of Keithley Instruments All other trademarks and trade names are the property of their respective companies Keithley Instruments Corporate Headquarters 28775 Aurora Road Clevel...

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