DIAGNOSTICS 7-3
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Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
Help Code
or Error
Message
Description
Possible Causes
And
Corrective Action
HLP 11
Run Failed. The discharge
was started and went out.
Press and release the STANDBY/
ENABLE button or remove the
remote enable signal to clear the
code. The unit remains in
STANDBY until STANDBY/EN-
ABLE is pressed again or the
remote enable signal is reapplied.
For initial operation at a new
operating condition, the gas
fl
ow
may be too high or too low. De-
crease or increase
fl
ow.
Open or shorted discharge (an-
ode) cable. Inspect in vacuum
discharge cable and replace if
necessary. Not all damage to the
discharge cable may be appar-
ent; in this case replacing the
cable may be the only
evidence the cable was faulty.
HLP 12
Initial Gas Failure. The
gas
fl
ow did not initialize
during the start up
sequence.
Press and release the STANDBY/
ENABLE button or remove the
remote enable signal to clear the
code. The unit remains in
STANDBY until STANDBY/EN-
ABLE is pressed again or the
remote enable signal is reapplied.
Gas bottle is empty and needs to
be replaced.
Make sure that any valves in the
system are open.
MFC is faulty or MFC cable is
faulty or disconnected. Repair or
replace MFC or cable. Make sure
MFC cable is connected.
