INITIAL OPERATION 4-9
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er supplies into Standby in that order by pressing the white Enable/
Standby button on each.
• Put the gas
fl
ow into Standby by pressing the white Enable/Standby
button on the auto controller.
4.3.2.2 Constant Voltage Mode
The operating condition selected for this demonstration is with a 2.5
A, 150 V discharge, which is Constant Voltage Mode operation. The
following conditions are based on a vacuum pump speed of 1600 liters
per second. Operating parameters for other pump speeds and gases can
be found in the Ion Source Manual.
Note that the vacuum facility pump speed or other processes that take
place while the ion source is running may limit the operating range of the
ion source.
• Press the white Enable/Standby button on the Auto Controller.
• Select Gas 4 using the white Gas Channel Select button on the
Auto Controller and then turn the Gas Adjust knob to 10 sccm. Gas
should be allowed to
fl
ow through the hollow cathode for 15 minutes
at 10 sccm before proceeding to the next step
• Select Gas 1 using the white Gas Channel Select button on the Auto
Controller and then turn the Gas Adjust knob to 10 sccm.
• Select Gas 4 using the white Gas Channel Select button on the Auto
Controller and then turn the Gas Adjust knob to 100 sccm.
• Turn the knob on the Keeper Power Supply until 1.5 amps is indi-
cated in the Keeper Amps display.
• Turn the knob on the Emission Power Supply until 2.7 amps is in-
dicated in the emission Amps display. Note that the emission cur-
rent in amps is usually set equal to or up to 10% greater than the
discharge current.
• Use the white Select button on the Discharge Power Supply to se-
lect Amps. Turn the knob on the Discharge Power Supply until the
discharge current is set to maximum as indicated on the Discharge
Amps display.
