6-16 REMOTE/AUTOMATED CONTROL
_______________________________________________________________________
Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
Parameter/Response:
0 = Auto Gas.
1 = Manual Gas.
2 = Gas Only.
Example: MDE:0<cr><lf> - Put unit in ‘Auto Gas’
If COM is active and unit is ‘Enabled’, the response of the
unit is: “Unit must be in STANDBY”.
If the COM is not ‘Enabled’, the command is ignored both in
‘Terse’ and ‘Verbose’.
Example: MDE?<cr><lf> - Returns present mode.
If the unit is in ‘Verbose’, the response is “Auto Gas”,
“Manual Gas”, or “Gas Only”.
If the unit is in ‘Terse’, the response is “0”, “1”, or “2”.
6.4.4.8 BEAM - Beam Good Query
The BEAM query Indicates if a stable operating point has been achieved.
Command: BEAM?
Response is “1” if beam good, “0” if beam not good. This response
is for both ‘Terse’ and ‘Verbose’ mode.
Criteria for Beam Good:
Discharge Current within ± 1.28 A.
Discharge Voltage within ± 12.8 V.
Gas Flow at least 50% of setpoint.
Emission current at least 75% of setpoint.