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INSTALLATION 3-7

INSTALLATION                                                                                                    3-7

_______________________________________________________________________

Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com

Fig. 3-1. Front view of controller for End-Hall ion source.

Содержание eHC 3005A

Страница 1: ...9350 Internet www ionsources com Copyright 2007 by Kaufman Robinson Inc All rights reserved No part of this publication may be reproduced without written permission December 2007 VERSION 3 AUTOMATED C...

Страница 2: ...ns Between Controller Components 3 3 3 5 Connect Controller to Ion Source 3 6 4 INITIAL OPERATION 4 1 4 1 Gas 4 1 4 2 Power On 4 1 4 3 Operating Mode 4 1 4 3 1 Auto Gas Mode 4 1 4 3 1 1 Program Select...

Страница 3: ...0 6 4 3 Communication overview 6 10 6 4 4 Commands queries and responses 6 10 6 4 4 1 VRB Verbose Command 6 11 6 4 4 2 COM Enable RS 232 Command or Status Query 6 12 6 4 4 3 IDN Unit Identification Qu...

Страница 4: ...Input Power Requirements 3 2 3 3 Pin descriptions for the rear panel BD 15 female MFC output connectors 3 5 6 1 Remote program selection using pins 16 and 34 on the DB 37 6 2 6 2 Pin descriptions for...

Страница 5: ...s CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com 1 SAFETY Caution High Voltage Only technically qualified personnel should install maintain and troubleshoot the equipment descr...

Страница 6: ...ht and dimensions of each controller are outlined in the following table This section gives a general overview of the Auto Controller package with more detailed information in the later sections of th...

Страница 7: ...rear panel Four relay contacts are also available on the rear panel if additional positive shut off valves are desired for the gas feed system Three of the gas channels are available for use with the...

Страница 8: ...and the Keeper and Discharge power supplies The Discharge Pow er Supply provides voltage and current to the anode of the End Hall ion source This power supply communicates to the Auto Controller throu...

Страница 9: ...MFC on pin 8 2 Mass flow read back from MFC 0 5 volt signal from the MFC referenced to pin 10 3 No contact 4 Valve off Connected to common when MFC setpoint is set to zero or when unit is in the stand...

Страница 10: ...5 _______________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 I...

Страница 11: ...Analog Remote Short Red Wire Short Black Wire RS 232 Remote Interlock 2 6 GENERAL DESCRIPTION AND SPECIFICATIONS _______________________________________________________________________ Copyright 2010...

Страница 12: ...the completeness of order If any damage has occurred contact Kaufman Robinson Inc in addition to the shipping company to report the damage see Section 8 Retain packaging materials for any future ship...

Страница 13: ...V 1 50 60 Hz 208 230 V 1 50 60 Hz 0 75 A 0 35 A Keeper Power Supply 115 V 1 50 60 Hz 208 230 V 1 50 60 Hz 14 A 7 5 A Emission Power Supply 115 V 1 50 60 Hz 208 230 V 1 50 60 Hz 14 A 7 5 A Discharge Po...

Страница 14: ...connectors located on the rear panel of the Discharge Power Supply and tighten the screw above the appropriate connector Insert the end of the operating cable BLACK wire into one of the negative conn...

Страница 15: ...The RS 485 connectors are not device specific so they can be plugged into any of the RS 485 connectors Attach the other ends of the three RS 485 cables to the connectors labeled RS 485 located on the...

Страница 16: ...ctor or the female DB 9 connector These remote interfaces require knowledge of the ion source operation which is given in the next two sections of this manual The detailed descriptions for remote cont...

Страница 17: ...n source manual The ion source installation procedures cover installation of the ion source vacuum cables gas tubing inside the vacuum chamber as well as electrical and gas feedthroughs in the wall of...

Страница 18: ..._______________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com...

Страница 19: ...Analog Remote Short Red Wire Short Black Wire RS 232 Remote Interlock 3 8 INSTALLATION _______________________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 13...

Страница 20: ...ther process gases please contact Kaufman Robinson Inc The bottle regulator and mass flow controller s should be in stalled and gas lines evacuated as described in Section 2 4 3 of the Ion Source manu...

Страница 21: ...without change Otherwise the parameters will be ramped to the newly selected program 4 3 1 2 Gas Setpoints There are four gas channels Pressing and releasing the Gas Channel Select button will increme...

Страница 22: ...d by selecting the gas channel and turning the knob on the front panel of the gas controller before the auto controller is enabled For the initial operation leave the gases set at the programmed setpo...

Страница 23: ...s Notice that the yellow setpoint LED below the display is on to indicate that the setpoint is being viewed Once the Auto Controller is enabled the run values will be displayed and the green run LED w...

Страница 24: ...sh to indicate that the program has not been saved The new values can be acquired by pressing and holding the acquire setpoints button until the program LED stops flashing Once the controller is enabl...

Страница 25: ...nt Adjustment Repeatedly pressing and releasing the Select Program button will cycle through the programs If more than two seconds elapses before the Select Program button is pressed and released the...

Страница 26: ...ion above 120 V 4 3 2 1 Constant Current Mode The operating condition selected for this demonstration is with a 2 5A 120 V discharge which is Constant Current Mode operation These conditions are based...

Страница 27: ...r Sup ply And wait a couple of seconds for the keeper to start the hollow cathode as indicted by the Keeper Amps display reading 1 5 amps Reduce the flow to gas channel 4 to 10 sccm Press the white En...

Страница 28: ...ating range of the ion source Press the white Enable Standby button on the Auto Controller Select Gas 4 using the white Gas Channel Select button on the Auto Controller and then turn the Gas Adjust kn...

Страница 29: ...on the Discharge Power Supply Adjust the gas flow for channel 1 using the Gas Adjust Knob on the Auto Controller until the discharge current is approximately 2 5 A Operate the ion source for at least...

Страница 30: ...r discharge voltages of 120 volts or more The discharge current is usually set to maximum while the operat ing voltage is set to the desired value on the front panel The gas flow to the ion source is...

Страница 31: ...gh enough pressure that a Paschen discharge can be established when the keeper voltage Vk of 800 volts is applied The Paschen discharge heats the hollow cathode until surfaces inside the cathode tube...

Страница 32: ...______________________________________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www...

Страница 33: ..._____________________________________ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Fig 5 1 S...

Страница 34: ...panel DB 25 connector to enable the pro gram selected from the front panel 6 2 Remote Control using the DB 37 Connector The DB 37 connector is an extended control set which gives the operator full ac...

Страница 35: ...he valve off command to the mass flow controller The gas relays are also de energized and the valve off commands are sent to the mass flow controllers when the Auto Controller is in standby This is tr...

Страница 36: ...Setpoints Using the Gas Only Mode When the Gas Only mode is selected from the front panel the Auto Con troller continuously responds to the applied gas setpoints once the Auto Controller is enabled 6...

Страница 37: ...Reference for gas channel setpoints See section 6 2 3 1 below 22 Discharge Current Setpoint 0 5 volts corresponds with 0 to the maximum level of discharge current in amps for the Discharge Power Supp...

Страница 38: ...hannel 1 MFC Referenced to pin 27 10 Channel 3 Gas Flow Output 0 5 volt corresponds with 0 to the maxi mum output in sccm for the channel 3 MFC Referenced to pin 27 20 Discharge Current Output 0 5 vol...

Страница 39: ...e or error message is cleared when the remote enable pin 36 is released from common pin 7 or 8 The Beam Good function gives a real time check of the operating parameters If the operating parameters ar...

Страница 40: ...ion current in amps for the Emission Power Supply being used Referenced to pin 7 or 8 5 Auxiliary 12 volts Referenced to pin 7 or 8 6 Emission Voltage Output 0 5 volts corresponds with 0 to the maximu...

Страница 41: ...put 0 5 volts corresponds with 0 to the maxi mum level of discharge current in amps for the Discharge Power Sup ply that is being used 21 Discharge Voltage Output 0 5 volts corresponds with 0 to the m...

Страница 42: ...select pin 18 is connected to common pin 7 or 8 37 Keeper current output 0 5 volts corresponds with 0 2 amps Referenced to common pin 7 or 8 6 3 Interlock A two pin interlock is located on the rear p...

Страница 43: ...ve a male DB 9 connector to connect to the female connector on the rear panel of the Auto Controller 6 4 2 Communication settings The baud rate is 9600 b s with 8 data bits one stop bit and no parity...

Страница 44: ...d All commands are upper case sensitive Lower case commands and que ries will be interpreted as invalid commands Any command or query that requires a response must be terminated at the minimum with a...

Страница 45: ...mand will enable disable or query the status of RS232 remote control of the auto controller depending on the parameter following it The default power up state is Disabled In order to Enable the RS232...

Страница 46: ...mote control state If the unit is in Verbose the response is Enabled or Disabled If the unit is in Terse the response is 1 or 0 Example COM 0 cr lf Disable RS 232 remote control Example COM 1 cr lf En...

Страница 47: ...Terse mode Command RST Example RST cr lf Note The only recoverable errors are HLP 10 Start Failure HLP 11 Run Fault HLP 12 Gas Fault 6 4 4 5 TST Self Test Query The TST command performs a unit self te...

Страница 48: ...e Parameter Response 0 Standby 1 Enabled return current state Example OUT 0 cr lf Put the unit in Standby Example OUT 1 cr lf Enable the unit Example OUT cr lf Get present state of output If the unit...

Страница 49: ...st be in STANDBY If the COM is not Enabled the command is ignored both in Terse and Verbose Example MDE cr lf Returns present mode If the unit is in Verbose the response is Auto Gas Manual Gas or Gas...

Страница 50: ...ral form of the program read write command is Command P program parameter value The parameter and value fields are optional The command can be turned into a query by substituting for the program param...

Страница 51: ...for each parameter may have decimal points and decimal places included or omitted if there are no significant digits beyond the decimal point However if the first significant digit falls after a decim...

Страница 52: ...and appear in the order shown Any value that is to remain unchanged can be omitted but the comma delimiter between parameters must be included in the input string In the second example DSI and BSV re...

Страница 53: ...et to maximum while the other is set to the desired operating value The gas flow determines the discharge parameter that has been set to maximum If the Auto Controller is in the Gas Only mode all the...

Страница 54: ...e Ion Source and Hollow Cathode to prevent damage Review the ion source and hollow cathode manuals to determine appropriate operating conditions Contact KRI for assistance in establishing operating co...

Страница 55: ...low Cathode with BV Hollow Cathode without BV Gas Only Unknown In TERSE the responses are 0 1 2 3 or 4 respectively 6 4 4 12 LRN Learn Command or Learn Query The current status of LRN can be queried a...

Страница 56: ...____ Copyright 2010 by Kaufman Robinson Inc 1306 Blue Spruce Drive Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 Internet www ionsources com Example LRN 0 cr lf Example LRN 1 cr lf Ex...

Страница 57: ...nal function of displaying help codes and error messages If it becomes necessary to display a help code or an error message the Auto Controller may switch to standby mode depend ing on the particular...

Страница 58: ...failed The discharge did not start Press and release the STANDBY ENABLE button or remove the remote enable signal to clear the code The unit remains in STANDBY until STANDBY EN ABLE is pressed again o...

Страница 59: ...ing condition the gas flow may be too high or too low De crease or increase flow Open or shorted discharge an ode cable Inspect in vacuum discharge cable and replace if necessary Not all damage to the...

Страница 60: ...ake sure there is power to the power supplies and that they are turned on Int LOC Open Interlock An open interlock prevents the Auto Controller from going to the ENABLE state and holds it in STANDBY T...

Страница 61: ...tact KRI HLP 7 RS 485 Serial Communication Lost Communication for remote RS 485 communication was detected and then lost Check connection of the RS 485 cables Make sure Auto Controller has in put powe...

Страница 62: ...no blockage of the vents on the rear panel Ambient temperature is too high Reduce ambient temperature be low 40 C Not Rdy Not Ready Keeper Pow er Supply is in STANDBY Insufficient line voltage Message...

Страница 63: ...e RS 485 cables Make sure Auto Controller has in put power and is turned on HLP 8 RS 232 Interface Serial Common Error High current flowing in the ground connection of the serial interface between the...

Страница 64: ...end Hall ion source in auto mode it will learn how to reach the operating conditions the first time a program is used The next time the feedback will home in more quickly Since this effects the starti...

Страница 65: ...roller beeps if the operating parameters have been changed without saving them or when a fault occurs Turn the Gas Adjust knob to select the desired number of beeps When finished press and release the...

Страница 66: ...under this Limited Warranty is at KRI s option to repair or replace any defective equipment or parts of the equipment without charge to the purchas er which are returned shipping prepaid to the KRI fa...

Страница 67: ...tion repairs or replacement during Warranty or repairs there after please contact Kaufman Robinson Inc 1306 Blue Spruce Dr Unit A Fort Collins CO 80524 Tel 970 495 0187 Fax 970 484 9350 www ionsources...

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