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Instruction manual

PDS-H115

Iwaki

Photoresist Dispensing Pump

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( )Country codes

IWAKI CO.,LTD.

6-6 Kanda-Sudacho 2-chome Chiyoda-ku Tokyo 101-8558 Japan

TEL:(81)3 3254 2935 FAX:3 3252 8892

T822 '13/01

Australia IWAKI Pumps Australia Pty. Ltd.

TEL : (61)2 9899 2411 FAX : 2 9899 2421

Italy

IWAKI Italia S.R.L.

TEL : (39)0444 371115 FAX : 0444 335350

Austria

IWAKI EUROPE GmbH

TEL : (49)2154 9254 0 FAX : 2154 9254 48

Korea

IWAKI Korea Co.,Ltd.

TEL : (82)2 2630 4800 FAX : 2 2630 4801

Belgium IWAKI Belgium n.v.

TEL : (32)1367 0200

FAX : 1367 2030

Malaysia IWAKIm Sdn. Bhd.

TEL : (60)3 7803 8807 FAX : 3 7803 4800

China

IWAKI Pumps (Shanghai) Co., Ltd.

TEL : (86)21 6272 7502 FAX : 21 6272 6929

Norway

IWAKI Norge AS

TEL : (47)23 38 49 00 FAX : 23 38 49 01

China

IWAKI Pumps (Guandong) Co., Ltd.

TEL : (86)750 3866228 FAX : 750 3866278

Singapore IWAKI Singapore Pte. Ltd.

TEL : (65)6316 2028 FAX : 6316 3221

China

GFTZ IWAKI Engineering & Trading (Guangzhou)

TEL : (86)20 8435 0603 FAX : 20 8435 9181

Spain

IWAKI Iberica Pumps, S.A.

TEL : (34)943 630030 FAX : 943 628799

China

GFTZ IWAKI Engineering & Trading (Beijing)

TEL : (86)10 6442 7713 FAX : 10 6442 7712

Sweden

IWAKI Sverige AB

TEL : (46)8 511 72900 FAX : 8 511 72922

Denmark IWAKI Nordic A/S

TEL : (45)48 24 2345 FAX : 48 24 2346

Switzerland IWAKI (Schweiz) AG

TEL : (41)26 674 9300 FAX : 26 674 9302

Finland

IWAKI Suomi Oy

TEL : (358)9 2745810 FAX : 9 2742715

Taiwan

IWAKI Pumps Taiwan Co., Ltd.

TEL : (886)2 8227 6900 FAX : 2 8227 6818

France

IWAKI France S.A.

TEL : (33)1 69 63 33 70 FAX : 1 64 49 92 73

Taiwan

IWAKI Pumps Taiwan (Hsin-chu) Co., Ltd.

TEL : (886)3 573 5797 FAX : (886)3 573 5798

Germany IWAKI EUROPE GmbH

TEL : (49)2154 9254 0 FAX : 2154 9254 48

Thailand IWAKI (Thailand) Co.,Ltd.

TEL : (66)2 322 2471 FAX : 2 322 2477

Holland IWAKI EUROPE NL Branch

TEL : (31)547 293 160 FAX : 547 292 332

U.K.

IWAKI Pumps (UK) LTD.

TEL : (44)1743 231363 FAX : 1743 366507

Hong Kong IWAKI Pumps Co., Ltd.

TEL : (852)2 607 1168 FAX : 2 607 1000

U.S.A.

IWAKI AMERICA Inc.

TEL : (1)508 429 1440 FAX : 508 429 1386

Indonesia IWAKI Singapore (Indonesia Branch)

TEL : (62)21 690 6606 FAX : 21 690 6612

Vietnam IWAKI pumps Vietnam Co.,Ltd.

TEL : (84)613 933456 FAX : 613 933399

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Содержание PDS-H115

Страница 1: ...6228 FAX 7503866278 Singapore IWAKI Singapore Pte Ltd TEL 65 63162028 FAX 63163221 China GFTZIWAKIEngineering Trading Guangzhou TEL 86 2084350603 FAX 2084359181 Spain IWAKI Iberica Pumps S A TEL 34 94...

Страница 2: ...me sensor line connector one each 2 1473562 4 pressure sensor line connector one each 1473562 6 motor line connector one each 3 1473562 8 encoder line connector one each 5 1473571 3 gender changer for...

Страница 3: ...llation Piping Wiring 14 Installation 14 Piping 14 Wiring 15 Line connectors 16 Applicable motor drivers 17 Operation 18 Pump setting 18 Pulse input Motor rotation 18 Number of pulses Flow volume 18 N...

Страница 4: ...tenance 23 Troubleshooting 23 Inspection 24 Daily inspection 24 Specification Outer dimension 25 Specification 25 Pump 25 Stepping motor 26 Encoder 26 Home sensor 26 Pressure sensor 26 Outer dimension...

Страница 5: ...n suggesting the use of Caution Prohibited actions or specific Requirement Indicates mishandling could lead to personal injury or prop erty damage CAUTION Caution marks Prohibited marks Requirement ma...

Страница 6: ...in failure or injury Use this product in specified conditions only Do not modify the pump Alterations to the pump carries a high degree of risk It is not the manufac turer s responsibility for any fai...

Страница 7: ...osphere Flushing before operation Flush the inside of the pump and piping with pure water or the liquid to be delivered before the start of operation Static electricity When low electric conductivity...

Страница 8: ...not waterproof Do not operate the pump while wet with solu tion or water Failure or injury may result Immediately dry off the pump if it gets wet Do not close discharge line during operation Solution...

Страница 9: ...ed into the pump head and then delivered to a discharge line as the bellows reciprocates Principle of operation The bellows expands and contracts as the ball screw reciprocates to create volumetric ch...

Страница 10: ...10 Introduction Suction process IN...

Страница 11: ...sensor Monitors internal pressure Base Always anchor it with bolts Outlet Inlet Speed controller joint Used for air purge Motor line connector Used for connecting a motor driver Nameplate Shows a mod...

Страница 12: ...g information PDS H 1 15 01 a b c d e a Series name b Product classification H High viscosity type c Product category 1 Pump d Bellows size 15 15 type bellows e Special version No code Standard 01 Cus...

Страница 13: ...g wiring work Electrical work should be performed by a qualified electrician Always observe applica ble codes or regulations Do not perform wiring work while the power is on Otherwise an electrical sh...

Страница 14: ...ical liquid level Mounting direction Always mount the pump with the outlet upward and the check valves upright Otherwise performance may be reduced Anchoring Fix the pump with four M4 mounting screws...

Страница 15: ...llowing the motor shaft to be rotated by hand Motor driver CN2 terminal assignment Automatic Current Cutback Release Signal 12 2 4 6 7 8 9 Wiring Diagram Photocoupler ON Automatic Current Cutback Rele...

Страница 16: ...ack GND common 3 green Analogue output 4 N A 6 pin motor line connector Pin number Terminal assignment 1 blue Motor lead 2 red Motor lead 3 orange Motor lead 4 green Motor lead 5 black Motor lead 6 N...

Страница 17: ...ilt in I O RS485 BOX Accessories In out cable connector Motor lead connector PHOENIX CONTACT MC1 5 3 STF 3 5 power line connector CSD5807N P 24VDC Pulse train input 2 pulse PCB Driver cable set LCS01C...

Страница 18: ...pulse At factory default setting the motor driven cylinder sensor dog is at the origin where a home sensor output turns ON Be sure the cylinder returns to the origin before operation See the next pag...

Страница 19: ...ntract beyond the origin for the offset interval 400 pulses below the origin Do not ex ceed the limit The motor may step out if the waiting time is too short Step out means the motor rotates out of a...

Страница 20: ...scharge time Or the pump may break Discharge flow rate see page 25 Discharge time 12 0ml max disch capacity per shot see page 25 or less When a discharge flow rate a discharge time 12 0ml When the sam...

Страница 21: ...ish suction process per set flow rate T2 between the end of the suction process and the start of the next discharge process The programmed behaviour starts at an input of pulse signal Pump setting Dis...

Страница 22: ...r cartridge before operation Air in a filter or a pipeline reduces a flow rate NOTE See manufacturer s manual for degassing Open a suction and a discharge line fully NOTE Do not close a valve on a suc...

Страница 23: ...f wiring between the motor and mo tor driver is correct See page 15 Correct wiring and resume opera tion Power voltage is too low If a rated power voltage is applied to the motor driver See page 17 Ob...

Страница 24: ...essure sensor fail ure Use a tester to check the voltage between GND and signal output terminals The result should be 1V when pump is stopped Above 1V when pump is running Replace as necessary No enco...

Страница 25: ...00 pulse ml Ambient temperature 15 40 C Ambient humidity 30 60 RH Allowable liquid temperature 15 30 C Weight 3 kg 1 The maximum suction flow rate is 2ml sec however suction pressure may fall sharply...

Страница 26: ...ly voltage 5 VDC 0 5 Consumption current 60 mA or below Detection Incremental Number of output pulses 500 Output phase 2 phase A and B Output type Line driver Home sensor Items Spec Manufacturer OMRON...

Страница 27: ...27 Specification Specification Outer dimension Outer dimension PDS H115 43 138 273 300 5 5 40 58 6 245 1000 21 273 65 187 5 230 2 5 9 5 AMP 3 4 1 2 1 2 AMP 3 7 8 1 2 3 4 6 5 AMP AMP 4 3 2 1 6 5 IN OUT...

Страница 28: ...6228 FAX 7503866278 Singapore IWAKI Singapore Pte Ltd TEL 65 63162028 FAX 63163221 China GFTZIWAKIEngineering Trading Guangzhou TEL 86 2084350603 FAX 2084359181 Spain IWAKI Iberica Pumps S A TEL 34 94...

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