13
In
stal
lat
ion
Installation
This section describes the installation of the pump, piping and wiring.
Read through this section before work.
Points to be observed
Observe the following points when installing the pump:
• Be sure to turn off power to stop the pump and related devices before service is per-
formed.
• Be careful for the power not to be turned on while service is performed.
• If you notice any abnormal or dangerous conditions, suspend operation immediately and
inspect/solve problems.
• Do not install the pump in a flammable atmosphere.
Observe the following points during wiring work:
•
Electrical work should be performed by a qualified electrician. Always observe applica-
ble codes or regulations.
•
Do not perform wiring work while the power is on. Otherwise, an electrical shock or
short circuit may result. Be sure to turn off power before wiring work.
•
Be careful for the power not to be turned on during work.
Before installation
A driver in a user's PLC and other related devices are necessary for operation. Purchase
these devices including a motor driver separately as needed.
The following diagram is a gen-
eral system example. Configure your system in accordance with an actual service condition.
Before installation
User's PLC
Silicon wafer
Chemical liquid
Motor
driver
Nozzle
Solenoid
valve
Controller
Pump
Air-operated
valve
Filter
Trap
tank
Содержание PDS-H115
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