Hamamatsu Photonics EX-mini L12530, Руководство пользователя

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12
5-4 Sample chamber
①
Excimer lamp
Excimer lamp main body. The lamp is still very hot shortly after
operation. Before beginning work and touching the lamp, always
wear gloves and make sure the lamp has been cooled down.
②
Ozone outlet
Vent for exhausting ozone generated in the sample chamber. Do
not block this ozone outlet when used in an atmosphere where
ozone is generated.
(Note)
③
Ozone outlet cover
When introducing external gas into the sample chamber, use this
cover to close the ozone outlet.
④
Vent cover
When introducing external gas into the sample chamber, use this
cover to close the air vents.
⑤
Gas inlet port
This port is for introducing external gas into the sample chamber.
⑥
Air vents
Do not block these air vents when used in an atmosphere where
ozone is generated.
(Note)
NOTE: When introducing external gas into the sample chamber, close the ozone outlet and air
vents with the covers. Even in that case, always connect a local exhaust ventilation system or an
ozone decomposition unit E12685 (sold separately) to the duct connection port of this unit.
①
②
⑤
⑥
④
③
When introducing gas into
the sample chamber, use
these covers to close the
ozone outlet and air vents.