Vacuum Joint Pipe
(Attached)
Vacuum Hose
Pipe on the main body side (FDU)
(10) Connect piping of the main body side (FDU)
and the vacuum pump with attached vacuum
joint pipe and vacuum hose.
*When fixing the vacuum pipe, put a small amount of
silicone compound on the joint part for sealing of vacuum.
Application of the compound will ease the work
of piping, and improve the sealing performance too.
(11) Plug the power plug of the vacuum pump in
the socket outlet for the vacuum pump.
(12) Switch on the vacuum pump.
* For further information about proper handlings
of the vacuum pump, refer to the user’s manual
of the pump.
Drain Hose
Socket outlet for
Vacuum Pump
Power Plug of
Vacuum Pump
(6) Follow the procedure in (4) to mount the stopper plate
of the front part of the pump and tighten the wing bolts
to fix the pump.
(7) Follow the procedures in reverse order [(3) to (2)].
Insert the pump plate into the stoppers.
Put the stopper on the plate, and
tighten the wing bolts to fix the pump base,
、
(8) Close the vacuum pump inspection door.
Vacuum Pump Switch
Reset Button
for Overcurrent
Drain Hose
Fixing Plate
Right Face of Main Body
Drain Cock
- 18 -
Pump Fixing
Wing Bolt
Stopper Plate of
Front Part of Pump
Approx. 30 cm
(9) Open the inspection door on the right side of the
equipment.
