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Energetiq EQ-99-FC, Руководство по эксплуатации и обслуживанию

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Energetiq EQ-99-FC Скачать руководство пользователя страница 24

18 

 

EQ99 Operation Manual Rev. 2

  

  

 

 

 

Optical Interface 

The lamp window accommodates a light output of 0.47 NA.  A pair of pins and a 6-32 
threaded hole are available for mounting.  An internally-threaded SM1 adapter is provided for 

connection of optical hardware.  See Figure 5 below for mechanical layout of the Lamp 
House.    

. 

 

 

Figure 5:

 Lamp House mechanical layout 

Energetiq Ex. 2060, page 24 - IPR2015-01375

Содержание EQ-99-FC

Страница 1: ...Model EQ 99 FC LDLS Laser Driven Light Source Operation and Maintenance Manual Revision 2 March 2012 Part Number DOC 5716 Energetiq Ex 2060 page 1 IPR2015 01375...

Страница 2: ...ained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to change without noti...

Страница 3: ...turbance characteristics Limits and methods of measurement IEC61000 4 2 2001 Electrostatic Discharge Immunity IEC61000 4 3 2002 Radiated Electromagnetic Field Immunity IEC61000 4 6 2003 Radio Frequenc...

Страница 4: ...Energetiq Ex 2060 page 4 IPR2015 01375 Energetiq Ex 2060 page 4 PR2015 01375...

Страница 5: ...n 11 Power Supply Controller 12 Lamp House 13 Chapter 3 16 Installation 16 Unpacking 16 Connections 16 Installation Procedure 22 Chapter 4 24 Operation 24 Starting 24 Stopping 24 Chapter 5 26 Maintena...

Страница 6: ...Energetiq Ex 2060 page 6 IPR2015 01375 Energetiq Ex 2060 page 6 PR2015 01375...

Страница 7: ...d wear protective eyewear clothing and gloves Lighted UV warning lights and signs posted on doors to lab areas may help prevent accidental exposure This unit emits ultraviolet UV radiation that is har...

Страница 8: ...nitrogen gas The EQ 99 FC source must also be cabled correctly and connected to a socket with a protective earth ground prior to operation Refer to the Installation section of this manual Chapter 3 fo...

Страница 9: ...435 982 others pending laser drive system to excite a plasma that radiates in the UV as well as the visible bands A class 4 laser is located in the Power Supply Controller enclosure Laser energy is de...

Страница 10: ...able 1 Embedded Laser Parameters No regular service is required for the EQ 99 FC Any service to the system must be performed only by factory authorized and trained technicians To avoid injury under no...

Страница 11: ...tput beam remains enclosed UV Hazard warning label indicates hazardous levels of UV light are present Manufacturer s identification label gives the manufacturer s name and address and the model serial...

Страница 12: ...is not properly installed into the Lamp House enclosure 2 The laser fiber is not properly connected to the Lamp House enclosure 3 An external interlock is open Certification Label Explanatory Label No...

Страница 13: ...suitable normally open contact or solid state switch can operate the interlock circuit The interlock circuit must be connected to enable the operation of the unit Should the interlock connection open...

Страница 14: ...m 170nm through visible and beyond Eliminates need for multiple lamps replaces D2 Tungsten Xenon Arc Simplified optical system Excellent spatial stability Repeatable measurements Superior short and lo...

Страница 15: ...with 230 m diameter 0 22NA 1m long fiber Fiber m Estimated Multiplier 230 1 00 450 2 02 600 2 26 Power ratios Figure 2 Typical Output Spectrum Physical Specifications Dimensions H x W x D Lamp House...

Страница 16: ...to ground digital common Logic Active Low Voltage 30VDC max Sink current 30mA max User Power Voltage 5VDC referenced to digital common Current 50mA maximum Environmental Requirements Operating Ambien...

Страница 17: ...by the user The following sections provide descriptions of the system components and controls and gives an overview of their functions Refer to the Installation section of this manual Chapter 3 for m...

Страница 18: ...ected to the EQ 99 FC Power Supply Controller LAMP ON UV Light is on LASER ON Laser power is ON and laser light is being delivered to the Lamp House CONTROLLER FAULT One of the following has occurred...

Страница 19: ...mp House Signal Connector mini D sub 9 pin Provides various power and control signals to from the Lamp House module No other connector or cable may be used with the EQ 99 FC other than the one supplie...

Страница 20: ...v 2 Figure 4 Lamp House Assembly SMA Output Connector Laser Input SMA type Laser ON Indicator Purge Gas Port Signal Connector to Controller Lamp mounting flange Optical fiber output cable Energetiq Ex...

Страница 21: ...and attenuate the light output in the 220 280nm band In addition atmospheric oxygen and water vapor will attenuate the output below 200nm There is no return fitting for the purge nitrogen The purge f...

Страница 22: ...15Fiber 1 115um Output Fiber 1m long EQ 99FC 115Fiber 2 115um Output Fiber 2m long EQ 99FC 230Fiber 1 230um Output Fiber 1m long EQ 99FC 230Fiber 2 230um Output Fiber 2m long EQ 99FC 450Fiber 1 450um...

Страница 23: ...ed for best performance With no purge ozone will form from atmospheric oxygen and attenuate the light output in the 220 280nm band In addition atmospheric oxygen and water vapor will attenuate the out...

Страница 24: ...0 47 NA A pair of pins and a 6 32 threaded hole are available for mounting An internally threaded SM1 adapter is provided for connection of optical hardware See Figure 5 below for mechanical layout o...

Страница 25: ...EQ99 Operation Manual Rev 2 19 Figure 6 Power Supply Controller mechanical layout Energetiq Ex 2060 page 25 IPR2015 01375...

Страница 26: ...ematics for both configurations Description Pin Details Commands Inputs LAMP OPERATE 12 OPERATE REQUEST apply 5V referenced to digital common to initiate ignition EXTERNAL INTERLOCK 13 EXTERNAL INTERL...

Страница 27: ...ns 11 12 13 Pin 5 100 0 1uF Pins 1 2 3 4 Inputs Outputs Isolated 5VDC supply 5V Power 5V Return Contact or Load solid state switch Outputs Inputs Isolated 5VDC supply 5V Power 5V Return Contact or Loa...

Страница 28: ...osition inside the bulb to shift slightly This will result in slight misalignment and a resulting drop in output power 3 Setup the Lamp House unit with appropriate ultraviolet safety measures and lase...

Страница 29: ...Control Module place it on a clean rigid surface Install the supplied 15 pin cable from the Power Supply Controller to the EQ 99 RC 10 Connect 12VDC input power source to the Power Supply Controller T...

Страница 30: ...3 Within several seconds the LASER ON LED will light Laser light is now present in the Lamp House 4 In approximately 20 150 seconds the igniter will be turned on automatically and the plasma will igni...

Страница 31: ...To minimize wear on the ignition components it is best to avoid frequently starting and stopping the lamp It is recommended to run the lamp continuously if long off periods are not required Energetiq...

Страница 32: ...ave Laser Fiber SMA connected whenever possible If the SMA fiber must be disconnected always use a metal cap on both ends Store caps open side down when possible Blow out caps with CDA Clean Dry Air p...

Страница 33: ...and Isopropyl Alcohol Yes No Yes No Yes No Start Inspect Fiber end Is fiber end contaminated Install Laser SMA Connector Clean Fiber end with Clean Dry Air Inspect Fiber end Is fiber end contaminated...

Страница 34: ...Operation Manual Rev 2 Fiber Inspection Tools Figure 9 Thorlabs FS 200 Handheld Fiber Inspection Scope Figure 10 Westover FVD 2400 Benchtop USB PC Operated Fiber Viewer Energetiq Ex 2060 page 34 IPR20...

Страница 35: ...s Fiber Cleaning Tools 1 Clean Dry Air 2 Dust Off or similar clean compressed air 3 Cletop www cletop com 4 Lint Free Wipe with Isopropyl Alcohol Cletop Type A SMA cleaner with Blue tape 14100700 1410...

Страница 36: ...uished after ignition Controller Fault Asserted pin 4 on remote Laser Overtemp 66C Controller PCB Overtemp 82C Laser Current Regulation Error External Interlock Open Laser Temperature Regulation Error...

Страница 37: ...nd laser fiber are properly connected at the Lamp House unit To reset or clear a Fault condition the actuate the Operate switch from the ON position to the OFF position If a fault was generated while...

Страница 38: ...the high UV power density generated by the EQ 99 FC Replace the output fiber with a new one to determine if the original performance is restored All fibers will degrade over time although fibers supp...

Страница 39: ...Energetiq Ex 2060 page 39 IPR2015 01375 Energetiq Ex 2060 page 39 PR2015 01375...

Страница 40: ...ained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to change without noti...

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