EQ99 Operation Manual Rev. 2
15
External features (refer to Figure
4
):
SMA Output Connector
Provides broadband optical output using a standard SMA connector. Energetiq recommends
the use of an Energetiq-supplied fiber for the broadband output. These fibers are able to
withstand the very high power density of deep UV radiation that is generated by the
EQ-99-FC, thus giving best longevity and performance.
Nitrogen Purge Inlet
This is the inlet fitting for nitrogen purge gas. Purge gas is optional but is recommended for
best performance. With no purge, ozone will form from atmospheric oxygen and attenuate
the light output in the 220 – 280nm band. In addition, atmospheric oxygen and water vapor
will attenuate the output below 200nm.
There is no return fitting for the purge nitrogen. The purge flow normally escapes within the
Lamp House enclosure, and then to atmosphere.
Laser Input
This is the inlet connector for the armored fiber from the Power Supply Controller. It
contains a set of interlock pins that disable the laser when the SMA connector is not properly
in place.
Laser On Indicator
This LED is illuminated when the laser is ON.
J4 Signal Connector (mini D sub – 9-pin)
Provides various power and control signals to/from the Power Supply Controller. No other
connector or cable may be used with the EQ-99-FC other than the one supplied.
Energetiq Ex. 2060, page 21 - IPR2015-01375
