Edwards EXT250 Series, Инструкция по эксплуатации, Страница: 4 / 42

B722-01-880 Issue K
Page ii © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
6 Storage and Disposal ........................................................................... 29
6.1 Storage ...................................................................................................................29
6.2 Disposal ................................................................................................................... 29
7 Service, Spares and Accessories .............................................................. 31
7.1 Introduction .............................................................................................................31
7.2 Service .................................................................................................................... 31
7.3 Spares ..................................................................................................................... 31
7.3.1 ISX inlet-screen ......................................................................................................... 31
7.3.2 WCX water-cooler ......................................................................................................31
7.3.3 Inlet-flange seals ........................................................................................................32
7.4 Accessories ...............................................................................................................32
7.4.1 Installation ...............................................................................................................32
7.4.2 EXC Controller ...........................................................................................................32
7.4.3 Pump-to-controller cable ..............................................................................................32
7.4.4 BX bakeout band ........................................................................................................34
7.4.5 FL20K foreline trap .....................................................................................................34
7.4.6 TAV vent valve and vent-port adaptor ..............................................................................34
7.4.7 ACX air-cooler ........................................................................................................... 34
7.4.8 Vibration isolators ...................................................................................................... 35
7.4.9 PRX purge restrictor ....................................................................................................35
7.4.10 VRX vent-restrictor ..................................................................................................... 35
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure Page
1 Cross-section view of EXT70 Turbomolecular Pump ................................................................ 3
2 Cross-section view of EXT250 Turbomolecular Pump .............................................................. 4
3 Maximum allowed rate of pressure rise during venting: system pressure .....................................11
4 EXT70 Turbomolecular Pump dimensions (mm) ....................................................................13
5 EXT250 Turbomolecular Pump dimensions (mm) ..................................................................14
6 Typical pumping system ...............................................................................................16
7 Correct installation of the inlet-screen .............................................................................17
8 Installation of optional accessories (and spares) ..................................................................33