Edwards EXT250 Series, Инструкция по эксплуатации, Страница: 7 / 42

© Edwards Limited 2007. All rights reserved. Page 1
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Introduction
B722-01-880 Issue K
1 Introduction
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards EXT70 and EXT250
Turbomolecular Pumps. You must use the pumps as specified in this manual. Read this manual before you install and
operate the pump.
The EXT Turbomolecular Pumps are designed for use with an Edwards EXC Controller. Read this manual and the
instruction manual supplied with your EXC Controller before you attempt to install or operate the equipment. The
EXC Controller instructions contain details of how to set up a pumping system and how to control accessories such as
an air-cooler, vent-valve and bakeout band.
Important safety information is highlighted as WARNING and CAUTION instructions; you must obey these instructions.
The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process
In accordance with the recommendations of EN61010, the following warning symbols may appear on the pump or its
accessories:
The units used throughout this manual conform to the SI international system of units of measurement. Where
nitrogen purge flow rates are specified, the abbreviation ‘sccm’ is used to mean ‘standard cm
3
min
-1
’: this is a flow
of 1 cm
3
min
-1
at an ambient temperature of 0 °C and at an ambient pressure of 1013 mbar (1.013 x 10
5
Pa).
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning - refer to accompanying documentation.
Warning - risk of electric shock.
Warning - hot surfaces.
Protective earth (ground).