Edwards EXT250 Series Скачать руководство пользователя страница 22 | Manualshive

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Edwards EXT250 Series Скачать руководство пользователя страница 22

B722-01-880 Issue K

Page 16

© Edwards Limited 2007. All rights reserved.

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

Figure 6 - Typical pumping system

1. Alternative position

for vent-valve

2. Vacuum system
3. High-vacuum gauge
4. Inlet-screen
5. EXT pump

6. Backing valve
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap
10. Rotary backing pump
11. Mist filter

12. Cooling water connectors
13. EXC Controller
14. Air-cooler
15. PRX10 purge restrictor
16. Regulated purge gas supply
17. Vent-valve

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Содержание EXT250 Series

Страница 1: ...l Instruction Manual EXT70 and EXT250 Turbomolecular Pumps Description Item Number EXT70 NW40 B722 03 000 EXT70 NW50 B722 04 000 EXT70 ISO63 B722 01 000 EXT70 63CF B722 02 000 EXT250 ISO100 B736 01 00...

Страница 2: ......

Страница 3: ...3 Installation 15 3 1 Unpack and inspect 15 3 2 Typical installation 15 3 3 Connect to the vacuum system 17 3 3 1 Inlet screen 17 3 3 2 Mechanical fixing 17 3 3 3 Base mounting 18 3 3 4 Inlet connecti...

Страница 4: ...4 7 4 5 FL20K foreline trap 34 7 4 6 TAV vent valve and vent port adaptor 34 7 4 7 ACX air cooler 34 7 4 8 Vibration isolators 35 7 4 9 PRX purge restrictor 35 7 4 10 VRX vent restrictor 35 For return...

Страница 5: ...performance data 8 4 EXT250 performance data 9 5 Vent gas data 11 6 Purge gas data 12 7 Cooling water data 12 8 Checklist of items 15 9 Vent valve orifice diameter with atmospheric pressure at the inl...

Страница 6: ...This page has been intentionally left blank B722 01 880 Issue K Page iv Edwards Limited 2007 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited...

Страница 7: ...eout band Important safety information is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given...

Страница 8: ...aring is lubricated from an oil reservoir and wick mechanism 9 EXT pumps are supplied with an inlet screen 2 fitted in the bore of the inlet flange The inlet screen protects you from the sharp blades...

Страница 9: ...trademarks of Edwards Limited Introduction B722 01 880 Issue K Figure 1 Cross section view of EXT70 Turbomolecular Pump 1 Inlet flange 2 Inlet screen 3 Magnetic bearing 4 Safety bearing 5 Envelope 6 S...

Страница 10: ...e Edwards logo are trademarks of Edwards Limited Introduction Figure 2 Cross section view of EXT250 Turbomolecular Pump 1 Inlet flange 2 Inlet screen 3 Magnetic bearing 4 Safety bearing 5 Envelope 6 S...

Страница 11: ...e may be reduced We therefore recommend that you either limit the rate of pressure rise in accordance with Figure 3 or only open the vent valve after the EXT pump speed has fallen to 50 of full rotati...

Страница 12: ...B722 01 880 Issue K Page 6 Edwards Limited 2007 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 13: ...m3 h 1 EXT250 DN100CF DN100ISO K Recommended backing pump A larger backing pump may be required for maximum throughput E2M0 7 EXT70 DN40NW DN50NW E2M1 5 EXT70 DN63CF DN63ISO K E2M5 EXT250 DN100CF DN1...

Страница 14: ...e rotational speed drops below nominal Water cooling at 15 oC 9 x 10 1 mbar 9 x 101 Pa 9 x 10 1 mbar 9 x 101 Pa 9 x 10 1 mbar 9 x 101 Pa 9 x 10 1 mbar 9 x 101 Pa Air cooling at 35 o C 9 x 10 2 mbar 9...

Страница 15: ...x 101 Pa 3 x 10 1 mbar 3 x 101 Pa Air cooling at 35 oC 3 x 10 2 mbar 3 x 100 Pa 3 x 10 2 mbar 3 x 100 Pa Nominal rotational speed 60000 r min 1 60000 r min 1 Standby rotational speed 42000 r min 1 420...

Страница 16: ...use the pumps to pump oxygen and water vapour subject to the following conditions If you wish to pump a gas not in the list above contact your supplier for advice If you do not contact your supplier...

Страница 17: ...t pumping time To reduce pump down times vent the pump with dry clean gases Figure 3 Maximum allowed rate of pressure rise during venting system pressure Pa mbar with the backing pump isolated against...

Страница 18: ...um size of particulates 1 m Maximum concentration of oil 0 1 parts per million Allowable purge gas flow when required 20 to 100 sccm 0 33 to 1 67 mbar l s 1 33 to 167 Pa l s 1 Recommended purge gas fl...

Страница 19: ...logo are trademarks of Edwards Limited Technical data B722 01 880 Issue K Figure 4 EXT70 Turbomolecular Pump dimensions mm 1 Vent valve 2 Earth ground screw 3 Backing port 4 Allowance for right angle...

Страница 20: ...wards logo are trademarks of Edwards Limited Technical data Figure 5 EXT250 Turbomolecular Pump dimensions mm 1 Purge plug in purge port 2 Vent valve 3 Earth ground screw 4 Electrical supply connector...

Страница 21: ...r Retain all packing materials for inspection Do not use the pump if it is damaged Check that your package contains the items listed in Table 8 If any of these items is missing notify your supplier in...

Страница 22: ...ypical pumping system 1 Alternative position for vent valve 2 Vacuum system 3 High vacuum gauge 4 Inlet screen 5 EXT pump 6 Backing valve 7 Vacuum gauge 8 Flexible bellows 9 Foreline trap 10 Rotary ba...

Страница 23: ...gure 7 with the Edwards logo uppermost Ensure that the dimples on the rim of the screen engage in the groove in the pump flange If necessary gently bend the tags of the screen outwards to ensure a tig...

Страница 24: ...ust point vertically downwards 20o to reduce the risk of contamination from the backing pump oil Make sure that the pump inlet and all components fitted to the pump inlet are clean and dust free If th...

Страница 25: ...you must open the vent valve only after the EXT pump speed has fallen to 50 of full rotational speed If you use the TAV5 vent valve you can only vent the EXT pump when it is at full speed if the vacu...

Страница 26: ...al applications is 25 sccm 0 42 mbar l s 1 42 Pa l s 1 This flow will protect the pump when you pump oxygen in concentrations above 20 by volume 3 6 Electrical installation Always make the electrical...

Страница 27: ...e water cooler can be used for the water supply or return connections 1 Push reinforced hose approximately 6 mm internal diameter over the ends of the riffled hose connectors on the water cooler 2 Att...

Страница 28: ...B722 01 880 Issue K Page 22 Edwards Limited 2007 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 29: ...of the speed indicator on the front panel of the EXC Controller will light Note The first time you pump down the system to vacuum you must re tighten the bolts which secure the inlet flange refer to S...

Страница 30: ...minal speed then the pump is stopped immediately or after a user defined time delay and the Fail LED on the EXC Controller lights z If pump rotational overspeed is detected by the EXC Controller the p...

Страница 31: ...o drain all fluids does not apply to the lubricant in the EXT pump oil reservoirs 5 3 Rotor life The life of the EXT pump rotor is typically 40 000 to 50 000 cycles of acceleration to full speed and t...

Страница 32: ...the correct links are made on the EXC Controller logic interface refer to the instruction manual supplied with the EXC Controller Check that any system interlocks are correctly made refer to the inst...

Страница 33: ...large a chamber Increase the conductance or reduce the volume Is the backing pressure 0 2 mbar 20 Pa If not check for backing line leaks If the throughput is high you may need a larger backing pump Is...

Страница 34: ...B722 01 880 Issue K Page 28 Edwards Limited 2007 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 35: ...desiccant 3 Store the pump in cool dry conditions until required for use When required prepare and install the pump as described in Section 3 4 Keep the pump upright at all times to prevent the drain...

Страница 36: ...B722 01 880 Issue K Page 30 Edwards Limited 2007 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 37: ...nation service exchange repair rebuild and testing to factory specifications Equipment which has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also p...

Страница 38: ...following EXC Controllers are available 7 4 3 Pump to controller cable A pump to controller cable must be used with each pump It is not supplied with the EXT Pump or the EXC Controller The following c...

Страница 39: ...al accessories and spares 1 Vibration isolator 2 Bakeout band 3 Inlet flange seal supplied 4 EXT pump 5 Solenoid vent valve 6 DN10NW adaptor 7 Manual vent valve supplied 8 Vent port 9 Water cooler 10...

Страница 40: ...alve is 24 V d c normally open and can be driven automatically from the EXC Controller The solenoid valve is fitted in place of the manual valve or alternatively can be fitted with an adaptor supplied...

Страница 41: ...ate to the recommended flow of 25 sccm The restrictor is suitable for all EXT pumps fitted with a purge port 7 4 10 VRX vent restrictor Use a VRX fixed orifice vent restrictor to restrict the flow of...

Страница 42: ...B722 01 880 Issue K Page 36 Edwards Limited 2007 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

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