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Service, Spares and Accessories
B722-01-880 Issue K
7.4.8
Vibration isolators
In applications where the small amount of vibration generated by the turbomolecular pump is a problem, a vibration
isolator can be fitted. The isolator consists of two special flanges separated by a flexible bellows and a rubber, anti-
vibration, outer collar. The isolator required is dependent on the pump flange size.
7.4.9
PRX purge restrictor
A modified DN10NW centring-ring is available to filter the purge gas and restrict its flow rate to the recommended
flow of 25 sccm. The restrictor is suitable for all EXT pumps fitted with a purge-port.
7.4.10
VRX vent-restrictor
Use a VRX fixed orifice vent-restrictor to restrict the flow of vent gas into the EXT pump. You can fit a vent-restrictor
to the inlet of a TAV5 vent-valve or PRX10 purge-restrictor. Refer to
for information on the selection of
the correct VRX vent-restrictor.
Product
Flange size
Item Number
Vibration isolators
DN63ISO-K
B581-15-000
Vibration isolators
DN63CF
B581-01-000
Vibration isolators
DN100ISO-K
B581-20-000
Vibration isolators
DNI00CF
B581-05-000
Purge restrictor
Flange size
Item Number
PRX10
NW10
B580-65-001
Vent-restrictor
Orifice diameter (mm)
Item Number
VRX10
0.1
B580-66-021
VRX20
0.2
B580-66-022
VRX30
0.3
B580-66-023
VRX50
0.5
B580-66-024
VRX70
0.7
B580-66-025
Содержание EXT250 Series
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