Edwards EXC120, Инструкция по эксплуатации

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Contents
D396-14-880 Issue J
Illustrations
Figure Page
1 EXC120 Controller front panel ......................................................................................... 4
2 EXC300/300M Controller front panel ................................................................................. 5
3 Rear panel of the EXC120 Controller ................................................................................13
4 Rear panel of the EXC120E Controller ...............................................................................14
5 Rear panel of the EXC300/300M Controller .........................................................................15
6 EXC120, EXC300 and EXC300M Controller dimensions (mm) .....................................................20
7 EXC120E Controller dimensions (mm) ...............................................................................21
8 Schematic diagram of EXC120 & EXC120E Controller electrical connections .................................25
9 Schematic diagram of EXC300 & EXC300M Controller electrical connections .................................26
10 Direct operation of the backing pump ...............................................................................29
11 Operation of the backing pump through a contactor .............................................................29
12 Top cover of the Controller ...........................................................................................31
13 Hours counter (EXC300 only) ..........................................................................................35
14 EXC120/120E/300 Controller to EXT pump connections ..........................................................45
15 EXC300M Controller to EXT pump connections .....................................................................46
16 Active Gauge connector ...............................................................................................46
Tables
Table Page
1 Operating and storage conditions ....................................................................................17
2 Mechanical data .........................................................................................................17
3 Logic interface electrical data .......................................................................................17
4 Fuse ratings ..............................................................................................................17
5 Controllers electrical and other technical data ....................................................................18
6 Electrical connectors data ............................................................................................19
7 Factory settings .........................................................................................................19
8 Checklist of items .......................................................................................................23
9 Logic interface pins ....................................................................................................24
10 Selection of vent-valve control options .............................................................................32
11 Active Gauge connector pins ..........................................................................................46
Associated publications
Publication title Publication number
EXT Pump Accessories B580-66-880
EXT70 and EXT250 Turbomolecular pumps B722-01-880
EXT351 and EXT501 Turbomolecular Pumps B727-20-880
EXT250M Turbomolecular Pump B735-01-880