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This product has been manufactured under a quality management system certified to ISO 9001:2008

Declaration of Conformity

We, Edwards

Limited,

Crawley Business Quarter,
Manor Royal,

Crawley,
West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised

to assemble the technical file, that the product(s)

Turbomolecular Pump Controllers
EXC300 D396-14-000

EXC300M D396-15-000
EXC120 D396-16-000

EXC120E D396-17-000

to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)

EN61010-1: 2010

Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements

and fulfils all the relevant provisions of

2014/35/EU Low

Voltage

Directive

2014/30/EU

Electromagnetic Compatibility (EMC) Directive

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

16.07.2015, Eastbourne

Larry Marini, Senior Technical Manager

Date and Place

P200-03-100 Issue

Содержание EXC120

Страница 1: ...sue J Original Instruction Manual EXC Turbomolecular Pump Controllers Description Item Number EXC120 Controller D396 16 000 EXC120E Controller D396 17 000 EXC300 Controller D396 14 000 EXC300M Controller D396 15 000 ...

Страница 2: ...6 15 000 EXC120 D396 16 000 EXC120E D396 17 000 to which this declaration relates is in conformity with the following standard s or other normative document s EN61010 1 2010 Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use General Requirements and fulfils all the relevant provisions of 2014 35 EU Low Voltage Directive 2014 30 EU Electromagnetic Compatibility ...

Страница 3: ... 定的限量要求 O Indicates that the hazardous substance contained in all of the homogeneous materials for this part is below the limit requirement in GB T 26572 X 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB T26572 标准规定的限量要求 X Indicates that the hazardous substance contained in at least one of the homogeneous materials used for this part is above the limit requirement of GB T26572 NOTE These products are EU RoHS c...

Страница 4: ...This page intentionally blank ...

Страница 5: ... Electrical connections 12 2 Technical data 17 2 1 Operating and storage conditions 17 2 2 Mechanical data 17 2 3 Electrical data 17 2 4 Electrical connectors 19 2 5 Factory settings 19 3 Installation 23 3 1 Unpack and Inspect 23 3 2 Fit the Controller 23 3 3 Introduction to Controller electrical connections 24 3 4 Connect the electrical supply 27 3 5 Connect additional earth ground bonding if req...

Страница 6: ... 4 10 Electrical supply failure 36 5 Maintenance 37 5 1 Safety 37 5 2 Replace a fuse 37 5 2 1 Introduction 37 5 2 2 Replace the electrical supply fuse 37 5 2 3 Replace the bakeout band fuse EXC120 300 300M only 37 5 3 Fault finding 38 5 4 Clean the Controller 38 6 Storage and disposal 39 6 1 Storage 39 6 2 Disposal 39 7 Spares and accessories 41 7 1 Introduction 41 7 2 Spares 41 7 3 Accessories 41...

Страница 7: ...11 Operation of the backing pump through a contactor 29 12 Top cover of the Controller 31 13 Hours counter EXC300 only 35 14 EXC120 120E 300 Controller to EXT pump connections 45 15 EXC300M Controller to EXT pump connections 46 16 Active Gauge connector 46 Tables Table Page 1 Operating and storage conditions 17 2 Mechanical data 17 3 Logic interface electrical data 17 4 Fuse ratings 17 5 Controlle...

Страница 9: ... operate the Controller Important safety information is highlighted as WARNING and CAUTION instructions you must obey these instructions The use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment and process The following IEC warning labels appear on the pump The units used throu...

Страница 10: ...sufficient power to the electromagnetic bearings of the EXT250M pump until the rotational speed of the pump is low enough for the pump rotor to drop onto the safety bearings The Controllers have a number of safety features which limit the power supplied to the EXT pump in the event of sustained high pressure or temperature z If the EXT pump inlet pressure rises the power supplied to the pump motor...

Страница 11: ...started z The Controller delays the Start operation until the Interlocks are closed refer to Section 1 7 3 therefore the EXT pump will not necessarily start to operate when you select Start If you select Start and the Interlocks are not closed the LED on the button will flash This button is also used to reset the Controller after Fail or Axial Emergency condition see Section 4 9 Standby Use this l...

Страница 12: ...rks of Edwards Limited Introduction Figure 1 EXC120 Controller front panel 1 Speed indicator 2 Heater bakeout band switch 3 Standby button 4 Start Stop button 5 Electrical supply LED 6 Fail LED 7 Not used 8 Pump rotating LED amber 9 Pump speed 25 LED amber 10 Pump speed 50 LED green 11 Pump speed 75 LED green ...

Страница 13: ...0 Issue J Figure 2 EXC300 300M Controller front panel 1 Speed indicator 2 Heater bakeout band switch 3 Standby button 4 Start Stop button 5 Electrical supply LED 6 Fail LED 7 Emergency LED EXC300M only 8 Pump rotating LED amber 9 Pump speed 25 LED amber 10 Pump speed 50 LED green 11 Pump speed 75 LED green 12 Hours counter EXC300 only ...

Страница 14: ...LEDs are on the pump speed is below 50 of its full rotational speed and the Controller may trip into Fail condition depending on how you have configured the Controller see Section 1 9 2 z When the pump is at Standby rotational speed the top LED is off Emergency This LED is only available on the EXC300M Controller When the LED is on this indicates an Axial Emergency condition refer to Section 1 9 3...

Страница 15: ...to its associated control equipment and then connect the set point output of the control equipment to the logic interface 1 6 Backing pump control EXC120 300 300M only The EXC120 EXC300 and EXC300M Controllers can be used to control the operation of a backing pump through a backing pump relay The operation of this relay depends on how you have configured the Controller to operate the vent valve re...

Страница 16: ...functions as the buttons of the same name on the Controller front panel on EXC120 EXC300 and EXC300M Controllers The other two inputs are Interlocks and the Controller will only operate the EXT pump if both Interlocks are closed and if no Fail condition is present Start Stop Use the Start Stop input to Start and Stop the EXT pump Note that on the EXC120 EXC300 and EXC300M Controllers the signal is...

Страница 17: ...puts The Controller provides Normal and Fail status output signals TMP Normal and TMP Fail through volt free contacts on the logic interface connector The EXC300M Controller also provides an Axial Emergency condition signal also on a volt free contact These signals can be used to control devices in the pumping system or provide remote status output signals The signals operate as described below 1 ...

Страница 18: ... the electrical supply to the vent valve z then opens the backing pump relay 1 8 1 Vent on Stop Note If the SYS Interlock opens a Fail condition will occur and the Controller will switch off the vent valve electrical supply see Sections 1 9 1 and 3 13 Vent on Stop selected When you switch on the Controller the vent valve electrical supply remains off until Start is selected Provided that the SYS I...

Страница 19: ...t valve in other Fail conditions depends on how you have configured the Controller refer to Sections 1 8 and 3 13 2 If you enable the Internal Timer see Sections 1 9 2 and 3 13 2 the Controller will trip into Fail condition only after the preset time has elapsed 1 9 2 Internal Timer Note The Internal Timer starts when the Controller starts the EXT pump not when Start is selected either by the fron...

Страница 20: ...or more than 2 seconds z The displacement of the rotor repeatedly exceeds set limits due to oscillation When the Controller trips into Axial Emergency condition the electrical supply to the pump motor is switched off the Emergency LED on the front panel goes on and the Axial Emergency status output signal on the logic interface opens The EXT250M pump electromagnetic bearings remain active although...

Страница 21: ...uction D396 14 880 Issue J Figure 3 Rear panel of the EXC120 Controller 1 Electrical supply isolator 2 Earth ground stud 3 Bakeout band connector 4 EXT pump connector 5 Logic interface connector 6 Active gauge connector 7 Backing pump connector 8 Bakeout band fuse 9 Electrical supply fuse 10 Electrical supply connector ...

Страница 22: ...Edwards and the Edwards logo are trademarks of Edwards Limited Introduction Figure 4 Rear panel of the EXC120E Controller 1 Electrical supply connector 2 EXT pump connector 3 Logic interface connector 4 Active gauge connector 5 Earth ground stud 6 Electrical supply fuse ...

Страница 23: ...6 14 880 Issue J Figure 5 Rear panel of the EXC300 300M Controller 1 Electrical supply isolator 2 Bakeout band connector 3 Earth ground stud 4 EXT pump connector 5 Active gauge connector 6 Logic interface connector 7 Cooling fan 8 Bakeout band fuse 9 Backing pump connector 10 Electrical supply connector 11 Electrical supply fuse ...

Страница 25: ...nectors See Table 6 Table 3 Logic interface electrical data Relay contact rating resistive load 1 A at 25 V d c Remote control signals Control voltage low close 0 8 V d c Control voltage high open 4 to 24 V d c Maximum input current at 24 V 80 μA Maximum output current at 0 V d c 160 μA Air cooler electrical supply See Table 6 Vent valve electrical supply See Table 6 Analogue EXT pump speed output...

Страница 26: ...motor electrical supply Maximum continuous output power 110 W 110 W 290 W 290 W Maximum output voltage 90 V peak to peak 90 V peak to peak 90 V peak to peak 90 V peak to peak Switching frequency 32 kHz 32 kHz 32 kHz 32 kHz Nominal commutation frequency 600 Hz to 1 5 kHz 600 Hz to 1 5 kHz 600 Hz to 1 5 kHz 600 Hz to 1 5 kHz Maximum commutation frequency 1 07 x nominal 1 07 x nominal 1 07 x nominal ...

Страница 27: ...inductive load 0 8 pf lagging 15 A Bakeout band connector Socket type CEE IEC 320 Maximum power 150 W Active gauge connector Signals on the connector pins See Figure 16 and Table 11 Socket type FCC68 8 way Manufacturer Western Electric Maximum power 3 W Logic interface connector Socket type EXC120 120E 300M MVSTBR 2 5 17 st5 08 Socket type EXC300 MVSTBR 2 5 18 st5 08 Manufacturer Phoenix Combicon ...

Страница 28: ...rved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 6 EXC120 EXC300 and EXC300M Controller dimensions mm 1 Front panel 2 View from top 3 Clearance for cables 4 Clearance for ventilation 5 Panel cut out A EXC120 B EXC300 EXC300M ...

Страница 29: ...Page 21 Edwards and the Edwards logo are trademarks of Edwards Limited Technical data D396 14 880 Issue J Figure 7 EXC120E Controller dimensions mm 1 Front panel 2 Clearance for ventilation 3 View from top 4 Clearance for cables 5 Panel cut out ...

Страница 31: ...the front panel at the top You can operate the EXC120E Controller in a horizontal position or in a vertical position with the side vents at the top When you fit a Controller in a rack or a cabinet you must allow 15 mm clearance at the sides of the Controller for air circulation and you must allow 75 mm clearance at the back of the Controller for the cables Do not obstruct the cooling fan on the EX...

Страница 32: ...Vent valve electrical supply 24 V Supply 1 2 Vent valve electrical supply 0 V This supply line is raised to 24 V to de energise the valve coil and vent the system 2 3 Air cooler electrical supply 24 V Supply 3 4 Air cooler electrical supply 0 V 4 5 TMP Normal closed when pump speed reaches the Normal speed setpoint N A Status outputs 5 6 TMP Fail open when fail condition exists N A 6 7 Axial Emerg...

Страница 33: ...9 Backing pump 10 Backing pump relay 11 Rear panel backing pump relay connector 12 Rear panel Active gauge connector 13 Active gauge 14 Speed indicator 15 Logic interface connector 16 External SYS Interlock switch 17 External TMP Interlock switch 18 External Remote Standby switch 19 External Remote Start Stop switch 20 TMP Normal output normally open 21 TMP Fail output normally closed 22 Not used ...

Страница 34: ...ng pump 10 Backing pump relay 11 Rear panel backing pump relay connector 12 Rear panel Active gauge connector 13 Active gauge 14 Speed indicator 15 Logic interface connector 16 External SYS Interlock switch 17 External TMP Interlock switch 18 External Remote Standby switch 19 External Remote Start Stop switch 20 TMP Normal output normally open 21 TMP Fail output normally closed 22 Axial Emergency ...

Страница 35: ...igh voltage discharges or other radio frequency emissions Use good EMC electromagnetic compatibility practices and take note of the following EMC earthing grounding guidelines to reduce the susceptibility of the system to RFI z Connect the Controller the EXT pump and the vacuum chamber to a common earth ground point on the pumping system this star earth ground is typically in the electrical power ...

Страница 36: ...trical supply as appropriate 3 8 Connect the bakeout band EXC120 300 300M only If you have fitted a bakeout band to the EXT pump insert a suitably rated fuse into the bakeout band fuse holder then fit the connector on the bakeout band cable to the heater connector on the rear of the Controller see Figures 3 and 5 3 9 Connect an Active gauge Use an Edwards Active gauge cable available as an accesso...

Страница 37: ...marks of Edwards Limited Installation D396 14 880 Issue J Figure 10 Direct operation of the backing pump Figure 11 Operation of the backing pump through a contactor 1 EXC backing pump relay 2 Backing pump motor 3 EXC Controller 1 EXC backing pump relay 2 Backing pump motor 3 EXC Controller ...

Страница 38: ...tions and as shown in Table 9 and Figures 8 and 9 Note that depending on how you want to use the Controller you may have to remove the factory fitted links from the mating plug 3 11 Adjust the Normal speed setpoint Note If you set the Normal speed setpoint to be more than 70 of full rotational speed the TMP Normal relay will open when you select Standby The Controller is supplied with the Normal s...

Страница 39: ...nto Fail condition Ensure that oil which backstreams from the backing pipeline will not adversely affect your process 2 Disable the Internal Timer to provide the greatest protection against backstreaming when Fail condition occurs as supplied the Internal Timer is enabled Set DIP switch 1 to enable or disable the use of the Internal Timer when the pump rotational speed falls to below 50 of full ro...

Страница 40: ...8 1 Table 10 Selection of vent valve control options DIP switch positions Vent option s selected 2 Vent on Axial Emergency 3 Vent on Stop 4 Vent on Stop Off Off Off No optional vent selected Vent when EXT pump speed falls to below 50 of full speed after Stop is selected Off Off On Vent on Stop Off On Off Vent on Fail and Vent when EXT pump speed falls to below 50 of full speed after Stop is select...

Страница 41: ... On EXC120 EXC300 and EXC300M Controllers switch on the electrical supply isolator on the rear of the Controller see Figures 3 and 5 2 Close the vent valve if fitted 3 Start the backing pump 4 Start the EXT pump z On the EXC120 EXC300 and EXC300M Controllers press the Start button on the front panel of the Controller Figures 1 and 2 item 4 and if you have connected your equipment to the logic inte...

Страница 42: ...et pressure rises the power supplied by the Controller to the pump motor will increase to counteract the gas frictional load The pump rotational speed will remain constant until the Controller peak power level is reached beyond this power level the speed of the pump will start to reduce If the pump speed falls to below 50 of its full rotational speed the Controller may trip into Fail condition dep...

Страница 43: ...Hours counter EXC300 only 4 7 Normal shutdown Use the following procedure to shut down your system This procedure assumes that you will manually operate the vent valve and the backing pump however you can configure all EXC Controllers to automatically operate the vent valve and you can configure the EXC120 EXC300 and EXC300M Controllers to automatically operate the backing pump refer to Section 3 ...

Страница 44: ...ail condition press the Start Stop button Figures 1 and 2 item 4 to select Stop then press it again or if you have connected your equipment to the logic interface open the Start Stop input on the logic interface for a minimum time of 300 ms and then close the input 4 10 Electrical supply failure If the electrical supply to the Controller fails when the EXT pump is rotating z The backing pump shuts...

Страница 45: ...oller 5 2 2 Replace the electrical supply fuse The electrical supply fuse is an integral part of the electrical supply socket on the rear of the Controller see Figures 3 to 5 1 Remove the electrical supply plug 2 Remove the fuse holder remove and discard the failed fuse 3 Insert a new fuse of the correct rating refer to Table 4 and refit the fuse holder 5 2 3 Replace the bakeout band fuse EXC120 3...

Страница 46: ...ppropriate sections of this manual to determine the cause of the Fail If necessary refer to the appropriate fault finding section of the instruction manual supplied with the EXT pump 5 4 Clean the Controller If necessary use a soft dry cloth to clean the exterior of the Controller If you need to clean the interior of the Controller we recommend that you return the Controller to your supplier or yo...

Страница 47: ...until required When required for use prepare and install the Controller as described in Section 3 of this manual 6 2 Disposal Dispose of the Controller and any components safely in accordance with all local and national safety and environmental requirements Do not incinerate the Controller If the Controller is heated to very high temperatures dangerous gases may be emitted and internal components ...

Страница 49: ...ed with each pump It is not supplied with the EXT pump or the EXC Controller The following cables are available 7 3 2 BX bakeout band EXC120 300 300M only A BX bakeout band accelerates the degassing of the pump to enable it to achieve lower pressures It may also be used to protect the pump from condensation of contaminants The bakeout bands are available in 110 120 V or 220 240 V versions and may ...

Страница 50: ...able NW10 flanged port on your vacuum system 7 3 4 ACX air cooler An ACX air cooler can be fitted to the EXT pump and can be operated automatically from the EXC120 EXC300 and EXC300M Controllers However please refer to Section 3 of the instruction manual for the EXT pump to check the suitability of air cooling in a particular application Bakeout band Voltage Item Number BX70 110 V B580 52 040 BX70...

Страница 51: ...owing are examples of suitable gauges and accessories Accessory Item Number APG M NW16 Active Pirani Gauge D021 71 000 APG L NW16 Active Pirani Gauge D021 73 000 AIM S NW25 Active Inverted Magnetron Gauge D145 45 000 ATC E Active Thermocouple Gauge D351 08 000 ATC D 1 8 inch NPT Thermocouple Gauge Tube D351 12 000 ATC M 1 8 inch NPT Thermocouple Gauge Tube D351 13 000 Active Gauge Cable 0 5 m long...

Страница 53: ...nections between the Controller and the EXT pump are shown in Figures 14 and 15 The Active Gauge connector which is specific to the EXC Controller is shown in Figure 16 Figure 14 EXC120 120E 300 Controller to EXT pump connections A EXT pump B EXT connector on cable C EXT connector on cable D EXC Controller 1 DC motor 2 Speed set resistor 3 Hall effect device 1 4 Hall effect device 2 5 Hall effect ...

Страница 54: ...ctor pins Pin Signal 1 2 3 4 5 6 7 8 Power supply 24 V d c Power supply 0 V d c Not used Gauge identification signal Not used Controller enable equivalent to TMP Interlock Gauge enable equivalent to TMP Normal Not used A EXT pump B EXT connector on cable C EXT connector on cable D EXC Controller 1 DC motor 2 Speed set resistor 3 Hall effect device 1 4 Hall effect device 2 5 Hall effect device 3 6 ...

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