Edwards AIGX-S-DN16CF Скачать руководство пользователя страница 26

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D048-50-880 Issue E

Page 22

Edwards and the Edwards logo are trademarks of Edwards Limited.

SPARES AND ACCESSORIES

Description

Item Number

Annealed copper gasket - DN16CF

C100-01-270

Hex head nut, bolt and washer kit - DN16CF

C100-01-630

Annealed copper gasket - DN40CF

C100-05-270

Hex head nut, bolt and washer kit - DN40CF

C100-05-630

Содержание AIGX-S-DN16CF

Страница 1: ...D048 50 880 Issue E Original Instruction Manual Active Ion Gauge Description Item Number AIGX S NW25 D048 50 000 AIGX S DN16CF D048 51 000 AIGX S DN40CF D048 52 000 ...

Страница 2: ...Laboratory Use General Requirements EN61326 2 3 2013 Electrical equipment for measurement control and laboratory Class B Emissions Use EMC requirements Particular requirements Test Industrial Immunity configuration operational conditions and performance criteria for transducers with integrated or remote signal conditioning EN50581 2012 Technical Documentation for the Assessment of Electrical and E...

Страница 3: ... Fit the AIGX to the Vacuum System 7 3 3 Electrical Connections 7 3 3 1 Connect to Edwards Controller 7 3 3 2 Connect to Your Own Supply and Control Equipment 7 3 3 3 Maximum Cable Length 9 4 OPERATION 11 4 1 Enable and Disable the AIGX 11 4 2 Pressure Measurement 11 4 2 1 Calibration in Different Gases 12 4 3 Emission Current 13 4 4 Degas the AIGX 13 4 5 Over pressure Protection 13 4 6 Filament S...

Страница 4: ...l of AIGX 12 5 Separate the Electronics Housing from the Body Tube 15 6 Fuse Replacement 18 Tables Table Page 1 Pins On the AIGX Connector 9 2 Maximum Recommended Cable Length 9 3 Gas Calibration Factors for Various Gases 12 4 LED Status 13 5 Error Indication 14 6 Fault Finding Guide 17 Associated publications Publication title Publication number Vacuum pump and vacuum system safety P300 20 000 Tr...

Страница 5: ...ower supply it has a 0 to 10 V d c analogue output which is related to pressure The AIGX is compatible with Edwards Controllers Alternatively you can use an independent power supply and you can read the output signal with a voltmeter or analogue to digital converter An 8 way electrical connector socket on the AIGX Figure 1 item 1 is used to connect the AIGX to your Controller or electrical supply ...

Страница 6: ...on when the pressure measured by the gauge is below a preset pressure The pressure at which the set point operates can be adjusted using the set trip switch on the top of the gauge 1 item 3 The AIGX is fitted with a status LED Figure 1 item 4 This LED indicates the operating status of the gauge Figure 1 General View of the AIGX NW25 version 1 1 2 4 3 5 1 Electrical connector 2 Filament select swit...

Страница 7: ...t temperature Operation 0 to 40 ºC Storage 30 to 70 ºC Ambient humidity 90 RH non condensing up to 31 ºC reducing to 50 RH at 40 ºC Atmosphere Dry non conductive only pollution degree 1 Bakeout temperature 200 ºC with electronics removed Maximum operating altitude 2000 m Maximum internal pressure 10 bar absolute Pressure measurement range 5 x 10 10 to 5 x 10 2 torr 6 6 x 10 10 to 6 6 x 10 2 mbar V...

Страница 8: ... Active low Active level 1 5 V Trip level 0 6 V to 8 8 V Hysteresis 500 mV Set point output load rating 30 V d c 100 mA max Back EMF suppression diode Min surge rating 1 A Min reverse voltage rating 100 V required when you use an external d c relay connected to the set point output Identification resistance 162 k Emission current Normal 0 1 or 1 mA Degas 10 mA Grid voltage Normal 180 V Degas 500 V...

Страница 9: ...ds Limited TECHNICAL DATA D048 50 880 Issue E 2 4 Materials Exposed to Vacuum Figure 2 Dimensions mm Collector Tungsten Grid Tantalum Pt Clad Mo Filament Yttria coated iridium Body Stainless Steel Feedthrough Stainless Steel and UHV compatible glass ceramic A Dim A NW25 85 mm DN16CF 106 mm DN40CF 98 mm ...

Страница 11: ...X to a similar flange on your vacuum system Note O rings are not recommended for systems where UHV pressures are required 3 3 Electrical Connections 3 3 1 Connect to Edwards Controller Connect the AIGX to the Controller using a cable which is terminated in suitable connectors Suitable cables are available from Edwards Refer to Section 7 3 Note Your Controller must have a version of software that i...

Страница 12: ...agram of Recommended Electrical Connections Connect a switch between pins 7 and 2 to enable and disable the gauge Connect a switch between pin 6 and 2 to enable and disable the degas function A AIGX connector socket B Cable electrical plug C Degas enable switch D Gauge enable switch E Back EMF suppression diode optional F D C relay optional G View of AIGX connector ...

Страница 13: ... the d c relay is switched off 3 3 3 Maximum Cable Length The maximum cable length is dependent on the conductor cross section and the supply voltage used The following maximum cable lengths are recommended The common mode signal voltage that is the voltage between signal common and supply common could be as much as 2 5 V with long cables due to the voltage drop in the supply cable You should ensu...

Страница 15: ...er pressures After this time the output signal will indicate pressure If an error occurs then the output signal will indicate the error 4 2 Pressure Measurement If you are using an AIGX with a Controller the pressure measurement is shown on the Controller display Otherwise convert the output signal to pressure using the following equation P 10 V 10 torr P 10 V 9 875 mbar P 10 V 7 875 Pa where V is...

Страница 16: ... For other gases the indicated pressure has to be multiplied by a gas calibration factor GCF The following table lists the gas calibration factor for most commonly used gases Table 3 Gas Calibration Factors for Various Gases Gas GCF Helium 5 7 Argon 0 75 Neon 3 3 Krypton 0 5 Xenon 0 35 Hydrogen 2 4 Oxygen 1 Carbon Monoxide 1 15 Carbon Dioxide 0 7 0 1 2 3 4 5 6 7 8 1E 10 1E 9 1E 8 1E 7 1E 6 1E 5 1E...

Страница 17: ... to remove absorbed gases and some contamination Degas the AIGX when the pressure is below 1 x 10 5 torr 1 3 x 10 5 mbar The degas is inhibited when the pressure is above 1 x 10 4 torr 1 3 x 10 4 mbar The gauge will automatically return to the normal operation mode after 3 minutes If you are using the AIGX with a Controller refer to the Controller instruction manual for details of how to degas the...

Страница 18: ...te when the gauge is operating correctly Adjust the set point trip level to 8 8 V The set point output will then be ON when the AIGX is operating normally The set point output will be OFF if the gauge is disabled or if an error condition is detected 4 9 Error Indication If an error occurs during operation of the AIGX then the output signal and the LED will indicate the error Refer to Section 5 1 f...

Страница 19: ...age 15 Edwards and the Edwards logo are trademarks of Edwards Limited OPERATION D048 50 880 Issue E Figure 5 Separate the Electronics Housing from the Body Tube 1 2 4 3 4 1 Electronics housing 2 Fixing screws 3 Body tube assembly 4 Locating lugs ...

Страница 21: ... the two M3 screws to the sides of the AIGX 5 3 Replace the Internal Fuse If you suspect that the internal fuse has blown you should check that the voltage and polarity of the electrical supply are correct before replacing the fuse To replace the fuse refer to Figure 6 and use the following procedure WARNING Disconnect the electrical supply cable before you start any maintenance High voltages are ...

Страница 22: ...example a small pair of pliers 5 The replacement fuse is supplied mounted in a fuseholder Remove the new fuse from its fuseholder and discard the new fuseholder 6 Push the new fuse into the fuseholder on the PCB 7 Refit the gauge lid ensuring that the pin is fitted in the shrouded earth socket next to the main connector Refit the four M3 5 screws 8 Apply power to the gauge and check that the LED i...

Страница 23: ...all the AIGX as described in Section 3 6 2 Disposal Disposal of the AIGX in accordance with all local and national safety and environmental requirements Alternatively you may be able to recycle the AIGX and or cables contact Edwards or your supplier for advice also see below The AIGX and associated cables are within the scope of the European Directive on Waste Electrical and Electronic Equipment 2...

Страница 25: ...wards company or distributor When ordering provide the following information Model and Item Number of equipment Serial number Item Spares Refer to the Parts manual 7 2 Spares The following is a list of accessories that can be purchased by contacting Edwards 7 3 Accessories Cables suitable for use with the AIGX are as follows These cables are supplied with 8 way male electrical connectors on both e...

Страница 26: ...he Edwards logo are trademarks of Edwards Limited SPARES AND ACCESSORIES Description Item Number Annealed copper gasket DN16CF C100 01 270 Hex head nut bolt and washer kit DN16CF C100 01 630 Annealed copper gasket DN40CF C100 05 270 Hex head nut bolt and washer kit DN40CF C100 05 630 ...

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