Edwards AIGX-S-DN16CF, Инструкция по эксплуатации

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D048-50-880 Issue E
Page 12 © Edwards Limited 2013. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
OPERATION
Figure 4 - Pressure Output Signal of AIGX
4.2.1 Calibration in Different Gases
The equation given in Section 4.2 is for air or nitrogen only. For other gases, the indicated pressure has to be
multiplied by a gas calibration factor (GCF).
The following table lists the gas calibration factor for most commonly used gases.
Table 3 - Gas Calibration Factors for Various Gases
Gas GCF
Helium 5.7
Argon 0.75
Neon 3.3
Krypton 0.5
Xenon 0.35
Hydrogen 2.4
Oxygen 1
Carbon Monoxide 1.15
Carbon Dioxide 0.7
0
1
2
3
4
5
6
7
8
1E-10 1E-9 1E-8 1E-7 1E-6 1E-5 1E-4 1E-3 1E-2 1E-1 1E+0 1E+1
Indicated Pressure
G
a
uge
out
put
(v
ol
ts
)
mbar torr Pascal