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MFC-CB™ Operation and Maintenance Manual

©2001~2007

DH Instruments, a Fluke Company

©

2001~2007

DH Instruments, a Fluke Company

All rights reserved.

Information in this document is subject to change without notice. No part of this document may be reproduced or
transmitted in any form or by any means, electronic or mechanical, for any purpose, without the express written
permission of

DH Instruments, a Fluke Company

4765 East Beautiful Lane Phoenix AZ 85044-5318 USA.

DH Instruments

strives to ensure the accuracy of its published materials; however, no warranty, expressed or

implied, is provided.

DH Instruments

disclaims any responsibility or liability for any direct or indirect damages

resulting from the use of the information in this manual or products described in it. Mention of any product does not
constitute an endorsement by

DH Instruments

of that product. This manual was originally composed in English and

subsequently translated into other languages. The fidelity of the translation cannot be guaranteed. In case of conflict
between the English version and other language versions, the English version predominates.

DH Instruments

,

DH

,

DHI

, MFC-CB, molbox, MFC-CB, molbloc and CalTool are trademarks, registered and

otherwise, of

DH Instruments, a Fluke Company.

Document No. 550123b-01
040330
Printed in the USA.

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Содержание MFC-CB

Страница 1: ...2001 2007 DH Instruments a Fluke Company MFC CB MFC Control Box Operation and Maintenance Manual...

Страница 2: ...ty expressed or implied is provided DH Instruments disclaims any responsibility or liability for any direct or indirect damages resulting from the use of the information in this manual or products des...

Страница 3: ...AIN BOARD 6 2 INSTALLATION 7 2 1 UNPACKING AND INSPECTION 7 2 1 1 REMOVING FROM PACKAGING 7 2 1 2 INSPECTING CONTENTS 7 2 2 SITE REQUIREMENTS 8 2 3 INITIAL SETUP 8 2 3 1 PREPARING FOR OPERATION 8 2 3...

Страница 4: ...3 4RS232 SELF TEST 46 3 4 6 6XBOX 47 3 4 7 7LOG 49 4 REMOTE OPERATION 51 4 1 OVERVIEW 51 4 2 INTERFACING 51 4 2 1 RS232 INTERFACE 52 4 2 1 1 COM1 52 4 2 1 2 COM2 53 4 2 2 IEEE 488 GPIB 53 4 3 COMMANDS...

Страница 5: ...IEW 85 7 APPENDIX 87 7 1 CALCULATIONS 87 7 1 1 ELECTRICAL SET POINT AND MEASUREMENT CALCULATIONS 87 7 1 2 CONVERTING BETWEEN ELECTRICAL UNITS AND FLOW OR FS UNITS 88 7 2 DEVICE CHANNEL CONNECTORS AND...

Страница 6: ...mmary 54 Table 9 Error Messages 55 Table 10 Status Byte Register 74 Table 11 Standard Event Register 76 Table 12 Troubleshooting Checklist 85 Table 13 MFC CB DEV1 and DEV2 Connector Pin Out 89 Table 1...

Страница 7: ...ing guide Use Section 6 to troubleshoot unexpected MFC CB behavior based on the symptoms of that behavior Certain words and expressions have specific meaning as they pertain to MFC CB Section 7 4 is u...

Страница 8: ...MFC CB Operation and Maintenance Manual 2001 2007 DH Instruments a Fluke Company Page vi N NO OT TE ES S...

Страница 9: ...RS232 and IEEE 488 interfaces MFC CB is intended for applications where convenient local and remote control of analog MFCs and or MFMs is desired for example in setting up an MFC calibration system us...

Страница 10: ...ainty 0 025 FS Resolution 0 4 A Maximum Load 500 compliance voltage 10 VDC Short Circuit Protection Yes indefinite 1 2 3 ANALOG INPUT SPECIFICATIONS VOLTAGE INPUT MEASURE AND SENSE Range 0 to 6 VDC Mi...

Страница 11: ...1 2 5 1 FRONT PANEL The front panel assembly provides a 2 x 20 vacuum fluorescent display a membrane keypad for local user interface and a SOFT ON OFF key 1 Display 2 Multi Function Keypad 3 Remote C...

Страница 12: ...nications interfaces and the power connection module 1 Electrical power connector IEC60320 2 Power ON OFF switch 3 Connector for 12V DRIVERS 4 Connector for MFC Switchbox control 5 DEVICE1 electrical...

Страница 13: ...ard under power supply and micro board 4 Display 5 Power supply Figure 3 MFC CB Internal View 1 2 6 1 DISPLAY 2 x 20 vacuum fluorescent alpha numeric display mounted to front panel 1 2 6 2 POWER SUPPL...

Страница 14: ...torola 68302 micro controller EPROM EEPROM 128k x 16 bit NVRAM 8 Mbit flash memory RS232 and IEEE 488 2 communications keypad and display control An I O port controls other ports and devices within MF...

Страница 15: ...lastic bag 2 1 2 INSPECTING CONTENTS Check that all items are present and have no visible damage An MFC CB is delivered complete with Table 1 MFC CB Delivery List DESCRIPTION PART MFC CB Mass Flow Con...

Страница 16: ...le using one of the kits provided with the MFC CB see Section 7 2 for information on cable pin out or an optional preassembled cable if you have one Connect the MFC CB to MFC MFM cable to the DEV1 or...

Страница 17: ...el See Section 3 4 2 and Table 4 for information on the security level system As part of the MFC CB startup set your desired security level and a password MFC CB is delivered with the security level s...

Страница 18: ...MFC CB Operation and Maintenance Manual 2001 2007 DH Instruments a Fluke Company Page 10 N NO OT TE ES S...

Страница 19: ...Numerical value and sign of the set point see Section 3 2 8 3 a Indicates whether a user adjustment is being applied to the set point see Section 3 3 5 a if an adjustment is being applied blank if no...

Страница 20: ...ay to dim if no key is pressed for 10 minutes Pressing a key restores full power to the display The screen saver activation time can be changed or screen saving can be completely suppressed see Sectio...

Страница 21: ...ng the and keys allows reverse and forward cursor movement when editing data entry These keys are also used to scroll through choices When in the MAIN run screen they are used by the JOG function to i...

Страница 22: ...y D1 or D2 indicate which channel is currently active The active channel is the channel that is affected by all channel specific settings and adjustments Channel specific MFC CB settings include K see...

Страница 23: ...e channel between DEV1 and DEV2 Select MFC profile which sets V or mA operation and the electrical signal to flow unit relationship Turn ON and OFF MFC CB s optional 12 V drivers Display the set point...

Страница 24: ...channel so that set points and measurement values are automatically adjusted by the K factor This feature can be useful when using an MFC calibrated with one gas to control or measure a different gas...

Страница 25: ...electrical mode and range in which to operate as well as the flow unit and the flow unit range are specified by the active MFC profile for each device channel see Section 3 3 1 The units of measure av...

Страница 26: ...Volts V even for an MFC whose set point and flow measurement are in current mA For MFC CB to display the valve test point the MFC being used must support valve test point measurement and be properly...

Страница 27: ...channel Requires that DEV1 and DEV2 be set to the same unit of measure This function can be useful to view the difference between two flow rates RATIO see Section 3 2 4 4 Displays the ratio of the ina...

Страница 28: ...OPERATION To activate the DEV1 2 DISPLAY press DISPLAY and select 1DEV1 2 Selecting 1DEV1 2 returns to the MAIN run screen with the DEV1 2 DISPLAY active With the DEV1 2 DISPLAY active the MAIN run s...

Страница 29: ...1 Standard MAIN run screen top line for the active device channel 2 Indication of sum calculation the active device channel is to the right 3 Sum of DEV1 and DEV2 measurements While in the SUM DISPLA...

Страница 30: ...e DIF DISPLAY changing the unit of measure causes the display to revert back to the CLEAN DISPLAY This can happen by making a unit change using UNIT or by selecting a new MFC profile using MFC To swit...

Страница 31: ...o a DISPLAY other than RATIO press DISPLAY and make a new DISPLAY choice 3 2 4 5 5UNIT PURPOSE To display the measurement of the active device channel in two different units of measure See Section 3 2...

Страница 32: ...available for example there is no flow unit because the current MFC profile is a factory default profile the display defaults to the CLEAN DISPLAY To go to a DISPLAY other than UNIT press DISPLAY and...

Страница 33: ...MFC CB DEVICE 1 or DEVICE 2 to be directed to one of five continuously powered Switchbox channels see Section 3 4 6 OPERATION To switch the MFC CB active channel press DEV1 2 from any run screen If an...

Страница 34: ...NTER to return to the run screen with the selected MFC profile active MFC CB cannot operate with a different type of electrical signal on its two device channels Selecting an MFC profile whose electri...

Страница 35: ...l be 1momentary or 2toggle 3 2 8 SET MFC PURPOSE To enter a set point value for MFC CB to output on the active device channel DEV1 or DEV2 PRINCIPLE MFC CB outputs and reads electrical signals on its...

Страница 36: ...e an out of range condition due to the application of a K factor or adjustment value see Sections 3 2 1 3 3 5 and 7 1 1 If the active MFC profile is not a controller an error message appears when a se...

Страница 37: ...lue is adjusted up or down by the value specified in SETUP 2jog see Section 3 3 2 Use SET MFC to enter a completely new set point see Section 3 2 8 See Section 3 3 2 for information on setting the jog...

Страница 38: ...e are 1 to 99 MFC profiles 1 and 2 are factory default profiles that cannot be edited 1 is 0 to 5 V 2 is 4 to 20 mA These profiles do not specify a flow unit or range and therefore do not allow operat...

Страница 39: ...device measures and controls flow Once the device type has been selected editing is complete and a prompt to edit the next profile number is presented Enter another profile number to edit if desired...

Страница 40: ...LUTION function press SETUP 3res The display is Press the or key to set the desired level of resolution Maximum is 1 00 FS Minimum is 0 01 FS The FS value is the full scale specified by the active MFC...

Страница 41: ...capability to mathematically adjust the set point output and the value measured back by MFC CB This is accomplished by setting an adder and or a multiplier There are separate adders and multipliers f...

Страница 42: ...t the values as desired Press ENTER to return to the run screen with the edited adder and multiplier values applied An indicator appears on the MAIN run screen whenever an adder and or multiplier is a...

Страница 43: ...lectrical signal calibration coefficients and calibration date remote see Section 3 4 5 Set up modify MFC CB RS232 COM1 COM2 and IEEE 488 interfaces Test RS232 ports xbox see Section 3 4 6 Activate an...

Страница 44: ...ine as if power had been turned OFF and back ON See Sections 3 4 1 through 3 4 5 for detailed information on the specific reset choices RESET functions change user settings that affect set point and r...

Страница 45: ...see Section 3 2 2 3 4 1 3 3MFC PURPOSE OPERATION Use special caution with this reset as it will delete up to 97 custom MFC profile entries which will have to be reentered if deleted inadvertently To a...

Страница 46: ...tions and to edit the password required for changing user levels PRINCIPLE MFC CB s front panel user interface provides the means to access all MFC CB user defined data settings and functions includin...

Страница 47: ...eters High High security protects all operating parameters It is intended to minimize operator choices e g to operate in a single inalterable configuration MFC CB is delivered with the security level...

Страница 48: ...P 4flowU SETUP 5adj SPECIAL 1reset SPECIAL 1reset 1sets SPECIAL 1reset 2units SPECIAL 1reset 3MFC SPECIAL 1reset 4cal SPECIAL 1reset 5all SPECIAL 1reset 5cal view SPECIAL 3prefs SPECIAL 3prefs 1ScrSvr...

Страница 49: ...ser level menu This is the factory default with a security level of 2low Once a password has been entered the user level cannot be changed without reentering the password If there is an active passwor...

Страница 50: ...ach PREFS function 3 4 3 1 1SCRSVR PURPOSE To adjust the activation time of MFC CB s SCREEN SAVER function PRINCIPLE MFC CB has a SCREEN SAVER function which causes the display to dim after a front pa...

Страница 51: ...3mid or 4hi to adjust the valid key press tone frequency The SOUND tone frequency function affects only the valid key press tone 3 4 3 3 3TIME PURPOSE To view and edit the MFC CB internal time and da...

Страница 52: ...the cursor is on the first character Numerical values can be entered directly from the keypad In addition the and keys can be used to toggle through a list of available alpha numeric characters Holdi...

Страница 53: ...ee Section 3 4 5 COM2 is reserved for communicating with an external device e g a multimeter molbox second MFC CB etc All the communication ports can be set up from the MFC CB front panel MFC CB provi...

Страница 54: ...1 to 31 The default address is 10 The MFC CB sends a line feed LF and asserts the EOI line at the end of all transmitted messages It looks for a line feed and or assertion of the EOI line to terminate...

Страница 55: ...ns are defective 3 4 6 6XBOX PURPOSE To set up an optional MFC Switchbox for operation on one of the MFC CB device channels PRINCIPLE An optional MFC Switchbox is available The MFC Switchbox is connec...

Страница 56: ...on press SPECIAL 5prefs The display is Select 1DEV1 or 2DEV2 to activate an MFC Switchbox on the desired MFC CB device channel Select 3none to disable MFC Switchbox usage MFC CB supports only one MFC...

Страница 57: ...ds to a log each time a memory or identifiable hardware fault occurs OPERATION To view the event log press SPECIAL and select 7log The oldest logged event appears Pressing ENTER steps through the logg...

Страница 58: ...MFC CB Operation and Maintenance Manual 2001 2007 DH Instruments a Fluke Company Page 50 N NO OT TE ES S...

Страница 59: ...the POWER key This function will still respond and allow the user to display the set value unaltered by K or adjustment values and the valve test point while the MFC CB is in remote mode Pressing the...

Страница 60: ...a 9 pin female DB connector configured as a DCE device Data is transmitted out of MFC CB using pin 2 and is received on pin 3 This allows a standard pin to pin DB 9M to DB 9F RS232 cable to be used to...

Страница 61: ...ld at 5 Volts 5 Grn This pin is the common return for the TxD and RxD signals IBM PC XT DB 25F TO DB 9M CONNECTIONS IBM PC XT DB 9F TO MFC CB DB9M CONNECTION DB 25F DB 9M DB 9F DB 9M 2 3 3 3 3 2 2 2 7...

Страница 62: ...from being set ACAL DATE Read or set the MFC CB calibration date ACAL MEAS n Read or set the measurement calibration coefficients ACAL SENSE n Read or set the sense calibration coefficients ACAL SET n...

Страница 63: ...ror number will be returned in the form ERR n where n is an integer number that represents a specific error This allows for easy error trapping by the host computer Table 9 is a list of the possible e...

Страница 64: ...B commands they must have a space instead of an equals sign between the command and any arguments Also unlike the other MFC CB commands if you are using the IEEE 488 port the query form command is imm...

Страница 65: ...ion complete bit when all operations have completed Syntax OPC OPC Remarks This command enables the MFC CB to set the OPC bit in the standard event status register when it has completed all pending fu...

Страница 66: ...he status byte can set the MSS bit of the status byte and request service by asserting the SRQ line of the IEEE 488 interface Query Reply n 0 to 255 Example Command Reply SRE 48 OK using COM1 no reply...

Страница 67: ...feeds are discarded This will discontinue when any command is sent to the MFC CB There is no other reply from this command Prior to using this command you must ensure that the MFC CB COM2 port is corr...

Страница 68: ...ACAL MEAS2 0 01 1 0 05 1 0 0100 V 1 00000 0 0500 mA 1 00000 Errors ERR 6 ERR 10 The data given is invalid The prefix n is invalid See Also 5 2 2 1 5 2 2 3 DEV ACAL SET ACAL DATE ACAL SENSE n Purpose R...

Страница 69: ...note that the sense calibration ACAL SENSE command better determines the voltage actually set Example Command Reply ACAL SET2 0 01 1 0 05 1 0 0100 V 1 00000 0 0500 mA 1 00000 Errors ERR 6 ERR 10 The...

Страница 70: ...n coefficients Example Command Reply ADJ MEAS2 3 1 003 0 0003 1 0030 Errors ERR 6 ERR 10 The data given is invalid The prefix n is invalid See Also 3 3 5 ADJ SET DEV ADJ SET n Purpose Read or set the...

Страница 71: ...op COMn Arguments N The COM port 1 or 2 Baud The baud rate This may be 300 600 1200 2400 4800 9600 19200 28800 or 38400 Parity The data parity This may be O for odd E for even or N for none Data The d...

Страница 72: ...invalid Not in the current mode See Also 3 2 8 MFCCH DATE Purpose Read or set the internal clock date Syntax DATE DATE YYYYMMDD Arguments yyyy mm dd The year from 1980 to 2079 The month from 1 to 12...

Страница 73: ...ust be identical Example Command Reply DEV 2 2 Errors ERR 7 ERR 36 screen is invalid Units for DEV1 and DEV2 not the same See Also 3 2 4 DRVn Purpose Read or set the status of one of the external 12V...

Страница 74: ...uld set Bitfield to 70 2 4 64 70 See DRVn to control individual drivers separately Example Command Reply DRV 70 70 Errors ERR 7 The Bitfield specified is invalid See Also 3 2 7 DRVn ERR Purpose Read t...

Страница 75: ...4 3 4 KEY Purpose Simulate the press of a key on the front panel Syntax KEY keycode Arguments Keycode 0 to 9 to simulate keys 0 through 9 being pressed 10 for the decimal point key 11 for the key 12...

Страница 76: ...nnel if not given 1 to address DEV1 settings 2 to address DEV2 settings The optional MFC Switchbox channel 0 Disables the MFC Switchbox 1 to 5 Enables the MFC Switchbox selects the MFC channel to use...

Страница 77: ...FF and then ON Example Command Reply REMOTE REMOTE See Also LOCAL RESET Purpose Reset the MFC CB to the default operating parameters Syntax RESET Remarks The RESET command can be given to return certa...

Страница 78: ...the product label on the bottom of the MFC CB and is displayed in the power up introductory screen Example Command Reply SN SN TEXT CLRn Purpose Clear text from the front panel Syntax TEXT CLRn size...

Страница 79: ...a display type DISP command will return the display to normal operation Example Command Reply TEXT21 The bottom line displays on the bottom line The bottom line Errors ERR 2 ERR 10 The data given is t...

Страница 80: ...x n is invalid Not in volts mode See Also 3 2 2 DEV VOUT n Purpose Read or set the voltage set point if in voltage mode Syntax VOUTn VOUTn volts Arguments n volts Device number optional Uses the activ...

Страница 81: ...ltage sent to the MFC to compensate for line losses Example Command Reply VSENSE1 2 00037 V Errors ERR 10 ERR 43 The prefix n is invalid Not in volts mode See Also 3 2 8 7 1 1 MFCCH VOUT VVALTEST n Pu...

Страница 82: ...atus subsystem is layered under and reports to the status reporting system It follows the model of the IEEE STD 488 2 and works for the COM1 and the IEEE 488 port with slight differences The MFC CB ca...

Страница 83: ...it Bit 7 This bit is not supported by the MFC CB RQS Requested Service Bit 6 Indicates that the SRQ line of the IEEE 488 interface has been asserted by the MFC CB This bit is cleared when a serial pol...

Страница 84: ...ed since the last time this bit was read or cleared URQ User Request Bit 6 Indicates that the MFC CB was set to local operation manually from the front panel by the user pressing the ESC key Command E...

Страница 85: ...tenance and repair services for MFC CB are offered by DHI Authorized Service Providers see Table 18 MFC CB is a sophisticated measurement and control instrument with advanced on board features and fun...

Страница 86: ...d mA Return from the MFC or MFM flow sensor Valve V Direct measurement of the MFC internal valve voltage The MFC CB measures voltage and uses on board 5 and 10 V references to improve stability over t...

Страница 87: ...ference and adjust the corresponding adder and or multiplier as needed to arrive at acceptable agreement As editing adder and multiplier values alters MFC CB s calibration they should only be edited b...

Страница 88: ...ing 5 Current value of the adder always in V applied to the Sense reading While in the view screen the SET MFC key is active so that set point values can be changed see Section 3 2 8 To adjust the val...

Страница 89: ...ues of A and M can be edited After entering the edited values press ESCAPE and return to 1view to view the measure values with the edited calibration coefficients applied See Section 5 2 1 for an expl...

Страница 90: ...ew the device channel set value after sense line based corrections and the current set adder A and multiplier M press SPECIAL 4cal select the desired device channel press 3set select voltage or curren...

Страница 91: ...plied to the Valve reading While in the view screen the SET MFC key is active so that set point values can be changed To adjust the value of the valve voltage adder A and or multiplier M press ESCAPE...

Страница 92: ...er SUPPORT A FLASH loading utility and the latest MFC CB software are available for download at no charge If you do not have access to the web or have difficulty downloading or loading software contac...

Страница 93: ...or cycle MFC CB power 4 3 Front panel display is dim Screen saver option has activated Press any key to resume full screen power adjust screen saver activation time if desired 3 4 3 1 Keypad presses m...

Страница 94: ...be different from the entered set point Consider the active K factor and or adjustment factors Use K to adjust K factor and or SETUP 5adj to modify the adjustment function 3 2 1 3 3 5 Set point entry...

Страница 95: ...trical value output corresponding to zero flow mS cal Set calibration multiplier see Section 5 2 2 4 aS cal Set calibration adder see Section 5 2 2 4 K Gas conversion factor if active unit of measure...

Страница 96: ...ry made in a flow unit of measure to an electrical value MFC CB first converts the flow value into an electrical value and then follows the electrical value to output in response to a user set point e...

Страница 97: ...m mA mA M F 7 2 DEVICE CHANNEL CONNECTORS AND CABLES Use Table 13 to wire the interfacing cable required to connect an MFC CB DEV1 or DEV2 connector to an MFC or MFM Section 7 2 1 provides information...

Страница 98: ...causes the valve to close zero flow and 5 V causes full scale flow This signal is commonly referred to as MFC set point MFC set voltage MFC command or MFC control 15 MFC Set point Ground reference fo...

Страница 99: ...configuration below should work with the following MFCs Millipore Tylan model FC260 261 262 FM 360 361 362 Qualiflow AFC 260 261 202 360 361 302 Aera 2600 2610 2620 3600 3610 3620 PFD 501 Porter 201 U...

Страница 100: ...1 8 7 3 DRIVERS The MFC CB drivers option provides eight open collector drivers for operating external valves solenoids indicators etc When operating from the setup driver screen see Section 3 2 7 pre...

Страница 101: ...ding a cable to utilize the drivers port Table 17 External Drivers EXTERNAL DRIVERS PIN DESCRIPTION A D1 Driver 1 Open Collector C D2 Driver 2 Open Collector E D3 Driver 3 Open Collector G D4 Driver 4...

Страница 102: ...representing the relationship between the process gas and a surrogate gas for an MFC pr MFM M multiplier A value by which a setpoint or measurement is multiplied to change the slope of the set points...

Страница 103: ...of the possibility thereof and regardless of whether such products are used individually or as components in other products Items returned to DHI under warranty claim but determined to not have a def...

Страница 104: ...MFC CB Operation and Maintenance Manual 2001 2007 DH Instruments a Fluke Company Page 96 N NO OT TE ES S...

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