CKD Rapiflow FSM2 Series, Инструкция по эксплуатации

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65
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PRODUCTS
４
[SM-385853-A]
５．
Technical data
５．１
How to select low sensor
For P
1
≧ 1.89P
2
(acoustic velocity)
Q
＝
113.2×S×P
1
For P
1
＜
1.89P
2
(subsonic)
Q
＝
226.4×S× P
2
(P
1
-P
2
)
Q : Flow rate L/min
P
1
: Primary side absolute pressure MPa
P
2
: Secondary side absolute pressure MPa
S : Ef.sec. area mm
2
of Nozzle
（
pinhole
）
Example of calculation
When diameter of a nozzle is between 0.1 to 2 and P
2
is variable, the calculated flow rate values are
shown as followings.
P
1
(MPa)
Absolute
pressure
P
1
(MPa)
Gauge
pressure
P
2
(MPa)
Absolute
pressure
P
2
(MPa)
Gauge
pressure
Acoustic/
subsonic
velocity
Calculated flow rete value (L/min)
φ0.1 φ0.2 φ0.3 φ0.4 φ0.5 φ0.7 φ1 φ1.5
φ2
S
uc
ti
o
n
0.1013 0 0.0313 -0.07
Acoustic
0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 0 0.0413 -0.06 Acoustic 0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 0 0.0513 -0.05
Acoustic
0.090 0.360 0.810 1.440 2.250 4.411 9.002 20.254 36.007
0.1013 0 0.0613 -0.04
Velocity
0.088 0.352 0.792 1.408 2.200 4.312 8.800 19.801 35.202
0.1013 0 0.0713 -0.03 Velocity 0.082 0.329 0.740 1.315 2.055 4.028 8.220 18.494 32.878
0.1013 0 0.0813 -0.02
Velocity
0.072 0.287 0.645 1.147 1.792 3.512 7.166 16.125 28.666
0.1013 0 0.0913 -0.01 Velocity 0.054 0.215 0.483 0.859 1.343 2.631 5.370 12.083 21.480
B
lo
w
(L
ea
ka
ge
i
n
sp
e
c
ti
o
n)
0.1113 0.01 0.1013 0
Velocity
0.057 0.226 0.509 0.905 1.414 2.772 5.657 12.727 22.626
0.1213 0.02 0.1013 0
Velocity
0.080 0.320 0.720 1.280 2.000 3.920 8.000 17.999 31.998
0.1413 0.04 0.1013 0
Velocity
0.113 0.453 1.018 1.810 2.828 5.543 11.313 25.455 45.252
0.1613 0.06 0.1013 0
Velocity
0.139 0.554 1.247 2.217 3.464 6.789 13.856 31.175 55.423
0.1813 0.08 0.1013 0
Velocity
0.160 0.640 1.440 2.560 4.000 7.840 15.999 35.998 63.996
0.2013 0.1 0.1013 0
Acoustic
0.179 0.716 1.610 2.862 4.472 8.765 17.888 40.248 71.552
0.3013 0.2 0.1013 0
Acoustic
0.268 1.071 2.410 4.284 6.694 13.119 26.774 60.242 107.096
0.4013 0.3 0.1013 0
Acoustic
0.357 1.426 3.209 5.706 8.915 17.474 35.660 80.236 142.641
0.5013 0.4 0.1013 0
Acoustic
0.445 1.782 4.009 7.127 11.137 21.828 44.547 100.230 178.186
0.6013 0.5 0.1013 0
Acoustic
0.534 2.137 4.809 8.549 13.358 26.182 53.433 120.224 213.731
(Caution)
･ If piping has a leakage, the actual flow will be larger than the calculated value. Please consider the leakage then
selecting flow rate.
･
If there is a narrower section then adsorption nozzle diameter in the midway of piping, flow rate will be restricted, so the
value will be smaller than the calculated value.
Also, adsorption, etc., could not be done.
･
The effective sectional area is just reference. If the nozzle is elongated, the effective sectional area will be smaller than
opening area of the nozzle.
･
Response time is decided by capacity of pipe from adsorption nozzle(pinhole) to flow sensor. When detecting with high
speed, reduce capacity in pipe as placing a flow sensor near the adsorption nozzle.
This is a guide of flow range when using a flow sensor as the
adsorption/separation verification with adsorption cossle and
leakage inspection, etc. The flow rate can be calculated
according to effective sectional area of a nozzle(pinhole) and
differential pressure between inside and outside of nozzle.
P
2
: vacuum
P
1
: atmospheric
Adsorption
nozzle
P
1
: pressurization
P
2
: atmospheric
P
2
: atmospheric
P
1
: pressurization
pinhole
Discontinue