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SM-385853-A

INSTRUCTION MANUAL
SMALL SIZE

FLOW SENSOR

RAPIFLOW

FSM2 Series

●

Please read this instruction manual carefully
before using this product, particularly the
section describing safety.

●

Retain this instruction manual with the
product for further consultation whenever
necessary.

EDITION

・

Integrated indicator type (FSM2-N/P series)

・

Separated indicator type (FSM2-A series)

･

Integrated indicator type

（

Integrated needle valve type

）

Discontinue

Содержание Rapiflow FSM2 Series

Страница 1: ...before using this product particularly the section describing safety Retain this instruction manual with the product for further consultation whenever necessary 2nd EDITION Integrated indicator type F...

Страница 2: ...safety of device design and control etc ISO 4414 JIS B 8370 pneumatic system rules JPAS 005 policy for pneumatic cylinder use and selection High Pressure Gas Maintenance Laws Occupational Safety and S...

Страница 3: ...er to prevent the powder from entering the sensor When using the valve with liquified gases such as carbon dioxide always vaporize the gas Faults could result if the liquified gas enters this product...

Страница 4: ...data 5 1How to select flow sensor When this product is used to confirm suction etc provide an air filter upstream from suction to prevent the entry of foreign matter When this product is used to confi...

Страница 5: ...he pipes The rectifier or sensor chip could be damaged if an entry of a large amount of foreign matter cutting chips etc occurs Attach a wrench to metal sections when tightening pipes so that pressure...

Страница 6: ...needle valve is not completely free of dust generation A final clean filter should be used in circuits where dust generation could be a problem Do not turn the dial forcibly when fully closing or open...

Страница 7: ...re and during work Connect and wire bending resistant material such as robot wire material for movable sections Do not use this product at levels exceeding the power supply voltage range If voltage ex...

Страница 8: ...lems This product uses a micro sensor chip and must be installed where it will not be subject to dropping impact or vibration Handle this product as a precision component during installation and trans...

Страница 9: ...use damage depending on where the surge absorbing element is installed Main circuit ON PLC PLC output Flow sensor Surge absorbing element Later installation Circuit shutdown by disconnection or emerge...

Страница 10: ...or chip Use conditions for CE compliance This product is CE marked indicating conformity with the EMC Directives The standard for the immunity for industrial environments applied to this product is EN...

Страница 11: ...oint verification method 21 2 3 4 Key lock Key unlock function 21 2 4 Standard setting mode 22 2 4 1 How to enter to standard setting mode 22 2 4 2 Setting of switch output function 23 2 4 3 Switch ou...

Страница 12: ...arated indicator type FSM2 A series 49 4 3 3 Integrated indicator type with bracket 52 4 3 4 Separated indicator type with bracket 53 4 3 5 Integrated indicator type Integrated needle valve type 55 4...

Страница 13: ...cessive screw in and load torques to the port When piping apply a spanner on the metal section not to apply forces onto the resin section Reference value Set screw Tightening torque N m M5 1 0 to 1 5...

Страница 14: ...ight or left The tightening torque for screws should be 0 5N m Bracket separate sales Model no FSM2 LB1 Port size Push in joint 4 6 8 10 Rc1 8 Rc1 4 M5 Bracket separate sales Model no FSM2 LB2 Port si...

Страница 15: ...5853 A 14 INSTALLATION Panel mount Model no FSM2 KHS N needle valve type Model no FSM2 KHS Push in joint type Port size Rc1 8 Rc1 4 M5type Note It is not possible to use it for A15 of port size Discon...

Страница 16: ...og output Blue Power supply Analog voltage output R approx 1k Analog current output R approx 100 Pin No Line color Content 1 Brown Power supply voltage output 12 to 24 V current output 24 V 2 Black CH...

Страница 17: ...ite CH2 Input 2 3 4 5 1 CH2 function selected switch output CH2 function selected external input Analog voltage output R approx 1k Analog current output R approx 100 Pin No Line color Content 1 Brown...

Страница 18: ...voltage output 12 to 24 V current output 24 V 2 Black Analog output Voltage output 1 to 5 V Load impedance 50 k and over Current output 4 to 20 A Load impedance 300 or less 3 White N C model identifi...

Страница 19: ...maximum value When selecting a mode Sets the mode When setting each data Increases the value etc Down key When flow rate is displayed Displays the CH2 data During peak hold operation Displays the max...

Страница 20: ...tion selection Only bi directional type flow direction can be switched Bi direction CH2 function selection Sets the CH2 function Selects Switch output External input of auto reference or External inpu...

Страница 21: ...while holding the peak Display unit selection Instantaneous flow rate display unit mL min L min Integrated display unit mL L Instantaneous flow rate display Press once Press once setting Integrated d...

Страница 22: ...oreover when other operations are done Loc is displayed while locking the key CH1 data display Instantaneous flow rate display Being held down To Instantaneous flow rate display Separate CH2 data disp...

Страница 23: ...ss once 0 point adjustment Press once To Instantaneous flow rate display To switch output setting display Press once determination To forcible output setting display Press once determination To 0 poin...

Страница 24: ...FF data setting set point set point Count up Count down Press onse Press once determination CH2 operation mode change Set same as CH1 CH2 ON OFF data setting Set same as CH1 Press once determination P...

Страница 25: ...On when higher than set integration The switch turns ON at the set integrated flow 7 Integrated output 2 Off when higher than set integration The switch turns OFF at the set integrated flow 8 Integrat...

Страница 26: ...by the operation processing value from an actual flowing quantity value Forcible output setting display To Instantaneous flow rate display Press once 0 point adjustment setting display To Instantaneo...

Страница 27: ...splayed color setting display Press once determination Press once Hysteresis fixed value selection To hysteresis fixed value Press once determination Press once Unit selection To flow rate unit settin...

Страница 28: ...erse The arrow changes according to flow direction When reverse flow is indicated L min Analog output F S flow rate 0 F S flow rate 5 20 3 12 1 4 V mA L min Analog output 0 F S flow rate 5 20 3 12 1 4...

Страница 29: ...egrated reset Auto reference To instantaneous flow rate display Press once determination To setting of CH2 switch output Press once determination Press once determination Setting of CH2 function Refer...

Страница 30: ...urned on keep approx 40msec 2 points input The set point takes the flow rate when external input is turned on keep approx 40msec The big and small relations between latest two points are compared uppe...

Страница 31: ...than centre value of two input points Set point 2 point input 2 Flow rate small side ON OFF when higher than centre value of two input points Set point 2 point inside Range inside ON ON when flow rate...

Страница 32: ...time setting display Setting of response time Symbol Response time SP 1 50msec SP 2 80msec SP 3 120msec SP 4 200msec SP 5 400msec SP 6 800msec SP 7 1500msec To Instantaneous flow rate display Press o...

Страница 33: ...ress once determination Press or key to select sub display Press key to set Press or key to select display color Press key to set Display color setting display Setting of display color To Instantaneou...

Страница 34: ...ondition Note NOR display is calculation value When the factory is shipped the adjustment inspection is done with ANR Hysteresis fixed value setting Hysteresis fixed value selection To Instantaneous f...

Страница 35: ...isplay Reset is not executed Reset is executed Setting at shipping out of factory Item Setting at shipping out of factory Switch out put OFF Zero adjustment value Zero Integrating flow rate value Zero...

Страница 36: ...rate display Press once Flow rate unit flow direction 0 point adjustment value Model number Full scale flow rate Working fluid Ai Air N2 Ar Argon C2 Carbon dioxide Switch output N NPN Output P PNP Out...

Страница 37: ...r Switch output indi cator is blinking Switch output over current protection circuit is activated Check whether load current exceeds the rating cor rectly connect the controller and turn power ON agai...

Страница 38: ...on caused by noise Keep FSM2 main body and cable away from the noise source Poor precision Sensor chip is broken Replace FSM2 Foreign matter sticking to sensor chip Replace FSM2 Malfunction caused by...

Страница 39: ...to 2 0 0 L m in 5 0 0 to 5 0 0 L m in 1 0 0 0 to 1 0 0 0 L m in 2 0 0 to 2 0 0 L m in 5 0 0 to 5 0 0 L m in 1 0 0 0 to 1 0 0 0 L m in 2 0 0 to 2 0 0 L m in 5 0 0 to 5 0 0 L m in 1 0 0 0 to 1 0 0 0 L...

Страница 40: ...nly air and nitrogen gas SM5 M5 stainless steel custom order product Not for carbon dioxide Flow rate display Note 1 2 Type of display 4 digit 4 digit 2 color LCD Display range 3 F 0 to 500 mL min 0 t...

Страница 41: ...ype resin aluminum body FSM2 A 1 2 3 4 5 Full scale flow rate 005 010 020 050 100 200 500 101 201 501 102 Flow rate range Note 1 3 005 500mL min 010 1L min 020 2L min 050 5L min 100 10L min 200 20 L m...

Страница 42: ...4 5 6 Full scale flow rate 005 010 020 050 100 200 500 101 201 Flow rate range Note 1 3 005 500mL min 010 1L min 020 2L min 050 5L min 100 10L min 200 20 L min 500 50 L min 101 100 L min 201 200 L mi...

Страница 43: ...e a d w ire 3 7 A W G 2 6 o r e q u iva le n t 5 c o n d u c to rs c o n n ec to r c o n n e c tio n in s u la to r O D 1 0 H o ld in g fun c tio n F lo w ra te d is p la y flo w ra te d isp la y p e...

Страница 44: ...r L C D F lo w ra te ra n ge 3 F 0 to 5 00 mL min 0 to 1 0 0 0 mL min 0 to 2 0 0 L m in 0 to 5 0 0 L m in 0 to 1 0 0 0 L m in 0 to 2 0 0 L m in 0 to 5 0 0 L m in 0 to 1 00 0 L m in 0 to 2 00 L m in D...

Страница 45: ...ceability certificate system diagram and inspection results H08 8 push in resin C2 Carbon dioxide 3 3m H10 10 push in resin P Panel mounting kit S06 Rc1 8 stainless S08 Rc1 4 stainless K With company...

Страница 46: ...nductor cable 1 m for display integrated type C53 5 conductor cable 3 m for display integrated type C41 4 conductor cable 1 m for display separate type C43 4 conductor cable 3 m for display separate t...

Страница 47: ...00 500 FSM2 N P H08 H10 Flow range 500 101 201 Model No Port size Dimension A FSM2 H04 4 push in 64 9 FSM2 H06 6 push in 67 2 Model No Port size Dimension A FSM2 H08 8 push in 70 6 FSM2 H10 10 push in...

Страница 48: ...PRODUCTS SM 385853 A FSM2 N P S06 SM5 Flow range 005 010 020 050 100 200 500 FSM2 N P S08 Flow range 500 101 201 2 3 4 penetrating Rc1 8 or M5 2 M3 depth5 2 3 4 penetrating 2 M3 depth5 55 15 Disconti...

Страница 49: ...48 PRODUCTS SM 385853 A FSM2 N P A15 Flow range 501 102 2 M3 depth5 Discontinue...

Страница 50: ...00 FSM2 A H08 H10 Flow range 500 101 201 Model No Port size Dimension A FSM2 H04 4 push in 64 9 FSM2 H06 6 push in 67 2 2 3 4 penetrating 4 or 6 push in joint 2 M3 depth5 Model No Port size Dimension...

Страница 51: ...50 PRODUCTS SM 385853 A FSM2 A S06 SM5 Flow range 005 010 020 050 100 200 500 FSM2 A S08 Flow range 500 101 201 2 3 4 penetrating Rc1 8 or M5 2 M3 depth5 2 3 4 penetrating 2 M3 depth5 Discontinue...

Страница 52: ...51 PRODUCTS SM 385853 A FSM2 A A15 Flow range 501 102 2 M3 depth5 Discontinue...

Страница 53: ...52 PRODUCTS SM 385853 A Integrated indicator type with bracket FSM2 N P H04 H06 S06 SM5 B Flow range 005 010 020 050 100 200 500 FSM2 N P H08 H10 S08 B Flow range 500 101 201 Discontinue...

Страница 54: ...53 PRODUCTS SM 385853 A FSM2 N P A15 B Flow range 501 102 Separated indicator type with bracket FSM2 A H04 H06 S06 SM5 B Flow range 005 010 020 050 100 200 500 Discontinue...

Страница 55: ...54 PRODUCTS SM 385853 A FSM2 A H08 H10 S08 B Flow range 500 101 201 FSM2 A A15 B Flow range 501 102 Discontinue...

Страница 56: ...H06 N Flow range 005 010 020 050 100 200 500 FSM2 N P H08 H10 N Flow range 500 101 201 Model No Port size Dimension A FSM2 H04 N 4 push in 89 9 FSM2 H06 N 6 push in 92 2 Model No Port size Dimension...

Страница 57: ...56 PRODUCTS SM 385853 A FSM2 N P S06 N Flow range 005 010 020 050 100 200 500 FSM2 N P S08 N Flow range 500 101 201 2 M3 depth5 2 M3 depth5 Discontinue...

Страница 58: ...DUCTS SM 385853 A Integrated indicator type Integrated needle valve type with bracket FSM2 N P H04 H06 S06 BN Flow range 005 010 020 050 100 200 500 FSM2 N P H08 H10 S08 BN Flow range 500 101 201 Disc...

Страница 59: ...58 PRODUCTS SM 385853 A Bracket FSM2 LB1 FSM2 005 010 020 050 100 200 500 101 201 FSM2 LB2 FSM2 501 102 Discontinue...

Страница 60: ...5853 A Cable option FSM2 C51 C53 Integrated indicator type FSM2 C41 C43 Separated indicator type Model No Dimension L FSM2 C51 1040 20 FSM2 C53 3040 20 Model No Dimension L FSM2 C41 1040 20 FSM2 C43 3...

Страница 61: ...ator type Integrated needle valve type Model No Dimension A Dimension B FSM2 H04 H06 S06 SM5 40 5 28 5 FSM2 H08 H10 S08 46 5 30 0 A B Model No Dimension A Dimension B FSM2 H04 H06 S06 N 40 5 28 5 FSM2...

Страница 62: ...ntegrated indicator type Single mount Sticking mount n Number of sticking installations Integrated needle valve type Single mount Sticking mount n Number of sticking installations 57 5 0 5 22 5 0 5 57...

Страница 63: ...miconductor chips C ring Stainless steel Stainless steel body Stainless steel O ring holder Stainless steel Sensor gasket Fluoro rubber O ring Fluoro rubber Sensor base Alumina No Parts name Material...

Страница 64: ...er film Spacer Aluminum alloy Case ABS resin Port filter Stainless steel Electron circuit board Rectification plate Stainless steel Module holder PPS resin Sensor chip Semiconductor chips C ring Stain...

Страница 65: ...r Fixing pin Stainless steel Orifice Brass nickeling O ring Fluoro rubber Fitting fixing pin Stainless steel O ring Fluoro rubber O ring Fluoro rubber Cartridge fitting No Parts Name Material No Parts...

Страница 66: ...0 Velocity 0 139 0 554 1 247 2 217 3 464 6 789 13 856 31 175 55 423 0 1813 0 08 0 1013 0 Velocity 0 160 0 640 1 440 2 560 4 000 7 840 15 999 35 998 63 996 0 2013 0 1 0 1013 0 Acoustic 0 179 0 716 1 6...

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