Agilent Technologies VPI Series, Инструкция по эксплуатации

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Vacuum Pump Isolation (VPI) Valve
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Contents
Warranty ............................................................................................................................................ 9
Warranty Replacement and Adjustment ...................................................................................... 9
Hazard and Safety Information .................................................................................................. 10
Contacting Agilent ...................................................................................................................... 11
Section 1. Introduction ..................................................................................................................... 13
1.1 Description ........................................................................................................................... 13
1.2 Operating Principles.............................................................................................................. 13
1.3 Operation Sequence ............................................................................................................. 14
1.4 Technical Specifications ....................................................................................................... 16
Section 2. Installation ....................................................................................................................... 17
2.1 Electrical .............................................................................................................................. 17
2.2 Installing VPI Valve to Agilent TriScroll™ Vacuum Pump..................................................... 18
2.2.1 TriScroll 300, 320, 600, and 620 .................................................................................. 18
2.2.2 Wiring ........................................................................................................................... 18
2.2.3 TriScroll 300, 600 Inverter............................................................................................ 20
2.3 Mechanical............................................................................................................................ 22
Section 3. Service ............................................................................................................................ 23
3.1 Disassembly ......................................................................................................................... 23
3.2 Repair of Sub-Assemblies .................................................................................................... 24
3.2.1 Piston/Diaphragm Sub-Assembly ................................................................................ 24
3.2.2 Nose Piece O-ring Replacement.................................................................................. 25
3.3 Reassembly .......................................................................................................................... 26
3.4 Troubleshooting .................................................................................................................... 27
3.4.1 VPI Valve Cannot Be Pumped Down to High Vacuum ................................................ 27
3.4.2 VPI Valve Leaks in Closed Position ............................................................................. 27
3.4.3 VPI Valve Closes Too Slowly....................................................................................... 28
3.4.4 VPI Valve Opens Too Slowly or Not Completely ......................................................... 28
3.4.5 VPI Valve Fails to Open ............................................................................................... 28
3.4.6 Closing Causes Large Burst of Air into System ........................................................... 28
3.4.7 Solenoid Valve is Hot ................................................................................................... 29
3.5 Factory Repair ...................................................................................................................... 30
3.6 Replacement Parts ............................................................................................................... 31