Agilent Technologies VPI Series, Инструкция по эксплуатации

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Vacuum Pump Isolation (VPI) Valve
Section 3. Service
Vacuum components must be kept free of both particulate contamination and all foreign
materials which have a significant vapor pressure. Before repairing a vacuum valve, prepare
a clean dust-free work area and use clean, degreased tools devoted to precision assembly.
NOTE
The VPI valve should be periodically tested for proper
operation.
3.1 Disassembly
Figure 6 Assembly View and Replacement Parts
These instructions refer to Figure 6. Circled items are replacement parts. Items 1 through 4
are part of the Piston Assembly (see Section 3.6 “Replacement Parts” on page 31).
1. Remove the six 10-32 x 7/8 socket head cap screws from the bonnet.
2. Remove the bonnet with the solenoid valve still attached.
3. Remove the diaphragm/piston assembly by gently prying up the diaphragm at one edge
and pulling free of the body around the full circumference. Inspect the diaphragm for
holes, tears, or accumulated contamination and the orifices and for blockage.
P1
Communication
Cable
VPI Valve
Mains Power Input
Splitter Cord
24 VDC
Power Supply