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Agilent Technologies VPI Series, Инструкция по эксплуатации

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Vacuum Pump Isolation (VPI) Valve 

Copyright 2012

Agilent, Inc.

Vacuum Pump

Isolation (VPI) Valve

Dust-Off is a registered trademark of Falcon Safety Products, Inc.
Krytox is a registered trademarks of DuPont.
TriScroll is a trademark of Agilent, Inc.
Viton is a registered trademark of DuPont Dow Elastomers.
Apiezon L is a registered trademark of M & I Materials.

Содержание VPI Series

Страница 1: ...INSTRUCTION MANUAL Vacuum Products Division Vacuum Pump Isolation VPI Valve Manual No 699912117 Revision F December 2012 ...

Страница 2: ...lation VPI Valve Dust Off is a registered trademark of Falcon Safety Products Inc Krytox is a registered trademarks of DuPont TriScroll is a trademark of Agilent Inc Viton is a registered trademark of DuPont Dow Elastomers Apiezon L is a registered trademark of M I Materials ...

Страница 3: ...18 2 2 2 Wiring 18 2 2 3 TriScroll 300 600 Inverter 20 2 3 Mechanical 22 Section 3 Service 23 3 1 Disassembly 23 3 2 Repair of Sub Assemblies 24 3 2 1 Piston Diaphragm Sub Assembly 24 3 2 2 Nose Piece O ring Replacement 25 3 3 Reassembly 26 3 4 Troubleshooting 27 3 4 1 VPI Valve Cannot Be Pumped Down to High Vacuum 27 3 4 2 VPI Valve Leaks in Closed Position 27 3 4 3 VPI Valve Closes Too Slowly 28...

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Страница 5: ...e 14 2 Single Phase Motor Electrical Connections 19 3 Three Phase Motor Electrical Connections 19 4 VPI Application in TriScroll 300 600 Inverter Pumps 20 5 Installation Diagram 22 6 Assembly View and Replacement Parts 23 7 Assembly View and Replacement Parts 26 ...

Страница 6: ...Vacuum Pump Isolation VPI Valve 6 ...

Страница 7: ...Vacuum Pump Isolation VPI Valve 7 Tables 1 Technical Specifications 16 2 Operating Voltages 17 3 VPI Valve Installation Data 18 4 Replacement Parts Kits 31 ...

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Страница 9: ...epresentatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller or...

Страница 10: ...perated and maintained by trained personnel Every operator or service person must read and thoroughly understand operation maintenance manuals and any additional information provided by Agilent Inc All warning and cautions should be read carefully and strictly observed Consult local state and national agencies regarding specific requirements and regulations Address any safety operation and or main...

Страница 11: ...ngs clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal Do not use alcohol methanol or other solvents on O rings To do so causes deterioration and reduces their ability to hold a vacuum If applicable apply a small amount of Apiezon L grease and wipe the O rings shiny dry Contacting Agilent In the United States you can contact Agilent Cust...

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Страница 13: ... used allowing the valve to replace elbows tees and crosses of the same size Even when the mechanical pump is equipped with an integral anti suckback valve a VPI valve should be used because the pump s integral valve will not vent it 1 2 Operating Principles The VPI valve s solenoid valve is connected in parallel with the mechanical pump s electrical supply either at its source or at the pump s sw...

Страница 14: ...Vacuum Pump Isolation VPI Valve 14 1 3 Operation Sequence Figure 1 Operating Sequence ...

Страница 15: ...and through a second small orifice in its side into the mechanical pump s inlet port This vents the mechanical pump to atmospheric pressure gradually When the pump is fully vented the pressure above the piston inside the piston and in the mechanical pump are the same atmospheric The pressure below the piston in the vacuum system is still lower and the piston remains down closed maintaining the vac...

Страница 16: ...conds Closing burst 1 x 10 2 Torr liter Power 7 0 Watts for AC applications 5 8 Watts for TriScroll inverter pump applications Materials Body and flanges Extruded aluminum 6061 T6 Piston Machined aluminum 2024 Seals O ring and diaphragm Viton Guide pin 304 stainless steel Temperature range valve 0 to 100 C Temperature range solenoid 0 to 50 C Venting time NW40 10 s ι of vented volume NW25 50 s ι o...

Страница 17: ...stalled is compatible with the actual operating voltage and frequency that will be used to control the VPI Valve Verify that the valve is properly grounded prior to applying electrical power NOTE The VPI Valve can be damaged if it is energized with a voltage that is outside of it s specified range Table 2 Operating Voltages NW25 VPI Valve Part Number NW40 VPI Valve Part Number Solenoid Operating V...

Страница 18: ...le 3 Remove the pump motor cover and connect the VPI Valve solenoid wire leads to the pump motor as shown in the diagram Replace the pump motor cover and verify that the valve is properly grounded prior to applying electrical power Table 3 VPI Valve Installation Data TriScroll Vacuum Pump Operating Voltage NW25 VPI Valve Part Number NW40 VPI Valve Part Number Solenoid Operating Voltage Range Wirin...

Страница 19: ...r to utilize the TriScroll motor s internal thermal switch to actuate the VPI Valve Table 3 VPI Valve Installation Data Continued TriScroll Vacuum Pump Operating Voltage NW25 VPI Valve Part Number NW40 VPI Valve Part Number Solenoid Operating Voltage Range Wiring Diagram Location Violet Black TS300 L2 Line VPI Valve L1 Line L2 4 L1 3 Black TS300 L2 Line VPI Valve L1 Line L2 4 L1 3 Violet Blue TS60...

Страница 20: ...ply and a splitter cord The VPI valve is controlled by an output signal from the inverter that is tied to motor operation Figure 4 VPI Application in TriScroll 300 600 Inverter Pumps NOTE The VPI valve kit provided must be connected to I O P1 before starting the pump and operating the VPI valve To prevent damage to the valve it must be installed only as specified below P1 Communication Cable VPI V...

Страница 21: ...verter to the mains power using the splitter cord 2 Connect the communication cable DB9 connector into the inverter I O port P1 3 Connect the 24 VDC power supply output cord to the communications cable labeled 24 V 4 Connect the VPI solenoid cord to the communications cable connector labeled VPI ...

Страница 22: ...is difficult to deform it in any normal piping arrangement used in vacuum systems It is possible however that tremendous forces could result from thermal expansion or from a long run of pipe cantilevered from a fixed valve Where this possibility exists provide stress relief for the valve by installing a short bellows and support the attached piping other than with the valve Valves are shipped with...

Страница 23: ...cement Parts These instructions refer to Figure 6 Circled items are replacement parts Items 1 through 4 are part of the Piston Assembly see Section 3 6 Replacement Parts on page 31 1 Remove the six 10 32 x 7 8 socket head cap screws from the bonnet 2 Remove the bonnet with the solenoid valve still attached 3 Remove the diaphragm piston assembly by gently prying up the diaphragm at one edge and pul...

Страница 24: ...in is normal and does not constitute abnormal wear of the bushing If there is any doubt about the condition of the bushings they should be replaced Remove by inserting a number 10 machine screw and pulling There are two in long bushings used in tandem After removal of the old bushings inspect the bore in the sleeve for debris and burrs Clean as necessary Press two new bushings into the bore one at...

Страница 25: ...lve that has been closed for more than two hours is subject to a breakaway friction exceeding the modest return spring force NOTE The return spring has intentionally been designed to be soft so as to minimize the opening remote pressure burst thereby necessitating a boundary layer lubrication at the nose piece O ring to control the breakaway friction between the valve seat and the O ring To replac...

Страница 26: ...ide off of the guide pin place the body down over the piston flat surface to the diaphragm Now invert the body with the bonnet held close and align the bolt holes Insert six 10 32 x 7 8 in socket head cap screws and tighten to 27 in lb torque 2 Before returning the valve to service it should be leak tested NOTE Power will need to be supplied to the solenoid in order to check the integrity of the b...

Страница 27: ... the solenoid bonnet connection disassemble clean and reassemble c A leak signal at the solenoid intake indicates a defective solenoid valve Disassembly of the solenoid valve is not recommended Install a new solenoid valve see Table 4 on page 31 for part numbers 2 VPI Valve is dirty and contaminated with a material that is outgassing or blocking the orifices Correct by thoroughly cleaning the valv...

Страница 28: ...tion of the chamber over the piston Check to make sure that electrical power has been restored to the solenoid valve If the solenoid valve is energized leak check If a leak is found in the solenoid replace the solenoid 2 Foreline between the mechanical pump and VPI valve has a major leak preventing the evacuation of the chamber over the piston Isolate and correct the leak 3 Excess friction between...

Страница 29: ...temperature rise inherent in the solenoid valve Higher temperature rated coils are available on a special request basis if the ambient cannot be controlled to the 50 C temperature limit Replace the solenoid valve with a new one see Table 3 on page 18 if the unit is too hot and verify that the ambient air temperature is within limits NOTE It is permissible to remotely place the solenoid valve up to...

Страница 30: ...f any part must be accompanied by both of these completed forms or the shipment will not be accepted 2 Use the RMA number on all packing slips boxes and be prepared to answer the following questions a What is the problem b What are the symptoms and how are they observed c What is the application d Is it an emergency repair e Is it a warranty repair When was the valve shipped to you f Who in your o...

Страница 31: ...so available separately VPI Rebuild Kit NW40 VPI40PSTNKIT VPI40RBLDKIT Includes Piston Assembly NW40 Piston Bearing 2 Sleeve Diaphragm Spring Krytox Grease O ring Kit also available separately O ring Kit NW25 and NW40 VPISEALSKIT Includes Viton O ring 2 142 Viton O ring 2 137 Viton O ring 2 151 Solenoid Valves Includes 90 132 VAC 50 60 Hz VPISOL1205060 120 146 VAC 50 60 Hz VPISOL1335060 180 264 VA...

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Страница 33: ...he core product e g inlet screens vent valves x Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue x If ordering an Advance Exchange product please use the packaging from the Advance Exchange to return the defective product x Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for lo...

Страница 34: ... or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic hazardous materials Include product name che...

Страница 35: ...Other Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale x Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrie...

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Страница 37: ......

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