Vacuum Products Division
Manual 699910005, Hot Ion Source Replacement
Page 22
12.
Loosen the four filament coupler screws.
13.
Loosen the collimator screws.
14.
Loosen two M1.6 socket head screws securing the ion source high voltage connection.
15.
On a clean work surface, remove the two M4 support screws. See Figure 3-7.
Figure 3-7. M4 support screws
16.
Gently remove the ion support assembly from the spectrometer header.
NOTE
Ensure that no damage is done to the spectrometer wire during
disassembly.
17.
Position the new ion support assembly into the spectrometer header and align.
18.
Secure the spectrometer header using two M4 support screws
M4
Support
Screws
Collimator
screw