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Vacuum Products Division
Manual 699910005, Hot Ion Source Replacement
Page 10
Refer to Figure 2-4 for reference.
Figure 2-4. Ion support assembly
Collimator
screw
Coupler screws (5X,
for the four green
wires and the one
brown wire in this
photo)
M4 support
screws
Extractor and
chamber wires
Ion
chamber
Extractor
plate
Filaments
(2X)