Compensation
Result
Example
If
the
measured
capacitance
values
are
227.6
pF
,
185.2
pF
and
156.58
pF
,
when
the
set
values
of
the
micrometer
are
40
m,
50
m,
and
60
m.
Each
theoretical
capacitance
values
and
equivalent
electrode
distance
errors
are
listed
in
T
able
3-11 .
T
able
3-11.
Compensation
Result
Example
t
set
[m]
C
m
[pF]
C
t
[pF]
1t
e
[m]
40
227.60
252.48
4.4
50
185.20
202.11
4.6
60
156.58
168.51
4.6
So
,
the
average
of
equivalent
electrode
distance
error
is
obtained
as
follows:
1t
a
=
4: 6
+
4: 6
+
4: 4
3
'
4: 5
[m]
In
this
case
,
the
equivalent
electrode
distance
is
as
follows:
t
eq
=
t
set
+
4: 5
[m]
Use
the
equivalent
electrode
distance
(t
eq
)
to
accurately
calculate
accurately
the
dielectric
constant
r
.
Eective
Area
of
Electrode
This
error
is
included
in
capacitance
values
measured
C
s1
and
C
s2
.
It
is
caused
by
the
stray
capacitance
at
electrode's
edge
even
though
a
guard
electrode
is
used.
T
o
reduce
the
error
,
divide
capacitance
value
C
s1
and
C
s2
by
eective
area
constants
a
and
b
as
shown
in
following
equation.
r
=
1
1
0
1
0
C
s
1
C
s
2
2
b
a
2
t
eq
t
a
Where
,
t
eq
is
the
equivalent
electrode
distance
.
F
or
more
information,
refer
to
\Eective
Area
of
Electrode
"
in
\Error
F
actor
using
Contacting
Electrode
Method"
and
\Gap
Error".
3-64
Operation
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