Aerotech PRO22SL, Руководство по оборудованию

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1.3. Basic Specifications
Resolution is dependent on screw pitch, encoder resolution, and controller interpolation.
Table 1-3: PRO225SL/SLE Series Specifications (-0100 to -0300)
-0100 -0150 -0200 -0250 -0300
Travel 100 mm 150 mm 200 mm 250 mm 300 mm
Accuracy
(1)
SL
Standard ±6 µm ±7 µm ±8 µm ±9 µm ±9.5 µm
Calibrated ±1 µm ±1 µm ±1 µm ±1.5 µm ±1.5 µm
SLE
Standard ±4 µm ±6 µm ±8 µm ±9 µm ±10 µm
Calibrated ±1 µm
Resolution
(Minimum
Incremental
Motion)
SL
0.1 µm
(2)
, 1.0 µm
(3)
SLE
0.05 µm (-E1/-E3 encoder), 0.2 µm (-E2 encoder), 1.0 µm (-E4
encoder)
Bidirectional
Repeatability
(1)
SL ±1 µm
SLE ±0.5 µm
Horizontal Straightness
(1)
±2 µm ±2.5 µm ±2.5 µm ±3 µm ±3.5 µm
Vertical Straightness
(1)
±2 µm ±2.5 µm ±2.5 µm ±3 µm ±3.5 µm
Pitch
29 µrad
(6 arc·sec)
29 µrad
(6 arc·sec)
39 µrad
(8 arc·sec)
49 µrad
(10.1
arc·sec)
50 µrad
(10.3
arc·sec)
Roll
29 µrad
(6 arc·sec)
29 µrad
(6 arc·sec)
39 µrad
(8 arc·sec)
49 µrad
(10.1
arc·sec)
50 µrad
(10.3
arc·sec)
Yaw
29 µrad
(6 arc·sec)
29 µrad
(6 arc·sec)
39 µrad
(8 arc·sec)
49 µrad
(10.1
arc·sec)
50 µrad
(10.3
arc·sec)
Maximum Speed
(4)
220 mm/s
Maximum Acceleration
(4)
Function of motor, amplifier, payload, and maximum axial load
Load Capacity
(5)
Horizontal 100 kg
Vertical (Axial) 60 kg
Side 100 kg
Moving Mass
(with tabletop) SL 7.3 kg
SLE 7.5 kg
Stage Mass
(no motor)
SL 19.8 kg 21.0 kg 22.2 kg 23.3 kg 24.5 kg
SLE 20.5 kg 21.7 kg 22.9 kg 24.1 kg 25.3 kg
Material Anodized Aluminum
Mean Time Before Failure (MTBF) 20,000 Hours
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is
payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is
used.
1.3. Basic Specifications PRO225SL/SLE Hardware Manual
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