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Table of Contents

ECO165SL Series Mechanical Bearing, Ball-Screw Stage

Table of Contents

List of Figures

List of Tables

EU Declaration of Incorporation

Safety Procedures and Warnings

Installation and Operation

Electrical Warnings

Motor-Related Warnings

Pinch Points

Handling and Storage

Chapter 1: Overview

1.1. Environmental Specifications

1.2. Accuracy and Temperature Effects

1.3. Basic Specifications

1.4. Vacuum Operation

Chapter 2: Installation

2.1. Dimensions

2.2. Securing the Stage to the Mounting Surface

2.3. Attaching the Payload to the Stage

Chapter 3: Electrical Installation

3.1. Motor and Feedback Connectors

3.2. Motor and Feedback Wiring

3.3. Motor and Feedback Specifications

3.4. Limits, Marker, and Machine Direction

3.5. Motor and Feedback Phasing

Chapter 4: Maintenance

4.1. Service and Inspection Schedule

4.2. Cleaning and Lubrication

4.3. Motor Mounting

4.4. Belt Adjustment

4.5. Troubleshooting

Appendix A: Warranty and Field Service

Appendix B: Revision History

Index

ECO165SL Hardware Manual

Table of Contents

www.aerotech.com

Содержание ECO165SL Series

Страница 1: ...Revision 2 01 ECO165SL Series Mechanical Bearing Ball Screw Stage HARDWARE MANUAL...

Страница 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Страница 3: ...pter 2 Installation 21 2 1 Dimensions 21 2 2 Securing the Stage to the Mounting Surface 24 2 3 Attaching the Payload to the Stage 25 Chapter 3 Electrical Installation 28 3 1 Motor and Feedback Connect...

Страница 4: ...35 Figure 3 3 Machine Direction 40 Figure 3 4 Hall Phasing Diagram 41 Figure 3 5 Encoder Phasing Reference Diagram Standard Square Wave 42 Figure 3 6 Encoder Phasing Reference Diagram Analog Sine Wav...

Страница 5: ...ting Connector Part Numbers for the Brushless Motor Feedback Connector 31 Table 3 7 Stepper Motor Feedback Connector Pinout M9 and M10 32 Table 3 8 Mating Connector Part Numbers for the Stepper Motor...

Страница 6: ...the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national...

Страница 7: ...rer l The protection provided by the equipment could be impaired l The life expectancy of the product could be decreased Safety notes and symbols are placed throughout this manual to warn you of the p...

Страница 8: ...nts and operating conditions that are approved in this manual l Never install or operate equipment that appears to be damaged l On stages with BMS motors the motor over temperature sensor must be moni...

Страница 9: ...connect or disconnect stage motor interconnections while connected to a live electrical power source l Before you set up or do maintenance disconnect electrical power l It is the responsibility of th...

Страница 10: ...xceed 70 C in some applications l Do not touch the stage motor frame while it is in operation l Wait until the stage motor has cooled before you touch it Figure 1 Motor Location DANGER Risk of Explosi...

Страница 11: ...l Hazard l System travel can cause crush shear or pinch injuries l Only trained operators should operate this equipment l Do not put yourself in the travel path of machinery l Restrict access to all m...

Страница 12: ...abel and record the information for later reference Unpacking and Handling It is the responsibility of the customer to safely and carefully lift and move the stage IMPORTANT All electronic equipment a...

Страница 13: ...later reference Lifting Features The lifting kit includes four eyebolts and four standoffs Thread the eyebolts onto the standoffs and thread the standoffs into the stage base Remove the lifting hardwa...

Страница 14: ...This page intentionally left blank Handling and Storage ECO165SL Hardware Manual 14 www aerotech com...

Страница 15: ...r and Brake M5 BM130 Brushless Servomotor and 2500 Line TTL Encoder M6 BM130 Brushless Servomotor 2500 Line TTL Encoder and Brake M7 BM130 Brushless Servomotor and 1000 Line 1 Vpp Encoder M8 BM130 Bru...

Страница 16: ...rformance Plots Accessories ordered as a separate line item ALIGN NPA Non precision XY assembly ALIGN NPAZ Non precision XZ or YZ assembly ALIGN PA10 XY assembly 10 arc sec orthogonality alignment to...

Страница 17: ...mation regarding your specific application Protection Rating These stages have an ingress protection rating of IP10 Use Indoor use only 1 2 Accuracy and Temperature Effects Aerotech products are desig...

Страница 18: ...eration 4 Function of motor amplifier payload and maximum axial load Load Capacity 5 Horizontal 45 kg Vertical Axial 25 kg Side 45 kg Moving Mass with tabletop 2 8 kg Stage Mass with no motor 5 4 kg 5...

Страница 19: ...tal 45 kg Vertical Axial 25 kg Side 45 kg Moving Mass with tabletop 2 8 kg Stage Mass with no motor 7 8 kg 8 7 kg 9 7 kg 10 6 kg Material Anodized Aluminum Mean Time Before Failure 20 000 Hours 1 Cert...

Страница 20: ...ean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the stage 3 During installation use cleaned vented stainless steel fasteners to secu...

Страница 21: ...th the instructions provided by this manual and any accompanying documentation Failure to follow these instructions could result in injury or damage to the equipment 2 1 Dimensions Figure 2 1 ECO165SL...

Страница 22: ...Figure 2 2 Tabletop Accessory Dimensions TT3 Option 2 1 Dimensions ECO165SL Hardware Manual 22 www aerotech com...

Страница 23: ...Figure 2 3 Z Axis Bracket Dimensions ECO165SL Hardware Manual 2 1 Dimensions www aerotech com 23...

Страница 24: ...ge is precision machined and verified for flatness prior to product assembly at the factory If machining is required to achieve the desired flatness it should be performed on the mounting surface rath...

Страница 25: ...id system performance the mounting interface should be flat within 12 m WARNING General Hazard Warning Be careful when you attach the payload to the stage table l If a screw extends through the stage...

Страница 26: ...Figure 2 4 Stage Orientations 2 3 Attaching the Payload to the Stage ECO165SL Hardware Manual 26 www aerotech com...

Страница 27: ...g equation Figure 2 6 Load Torque Equation TorqueREQ AxialLoad x LeadofScrew 2 x x Efficiency For ECO165SL series stages the ball screw efficiency is rated at 90 0 90 Refer to Section 1 3 for Load Cap...

Страница 28: ...ance requirements when they integrate the ECO165SL into a completed system Electrical installation requirements will depend on the ordered product options Installation instructions in this section are...

Страница 29: ...otection only Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized The System Integrator or qualified installer is responsible...

Страница 30: ...or ECK00657 ITT Cannon DBM9W4SA197 Table 3 3 Stepper Motor Connector Pinout M9 and M10 Pin Description Connector A1 Motor Phase A A2 Motor Phase B A3 Motor Phase A Return 1 Brake with Brake Option 2 B...

Страница 31: ...r Phase C 12 Reserved 13 Reserved Brake with Brake Option 14 COS Encoder Cosine 15 COS Encoder Cosine 16 Reserved 17 SIN Encoder Sine 18 SIN Encoder Sine 19 Reserved 20 Common ground 21 Common ground...

Страница 32: ...rved 14 COS Encoder Cosine 15 COS Encoder Cosine 16 5V Power Supply Input 17 SIN Encoder Sine 18 SIN Encoder Sine 19 Reserved 20 Common 21 Common 22 Reserved 23 Reserved 24 Reserved 25 Reserved Table...

Страница 33: ...4 Home Limit 5 Limit CCW Negative Counterclockwise Limit 6 Reserved 7 Common ground 8 Reserved 9 Reserved Table 3 10 Mating Connector Part Numbers for the Limit Connector Mating Connector Aerotech P N...

Страница 34: ...k Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 Brushless Motor and Feedback Wiring M1 through M8 Options 3 2 Motor and Feedback Wiring ECO165SL Hardware Manual...

Страница 35: ...Figure 3 2 Stepper Motor and Feedback Wiring M9 and M10 Options ECO165SL Hardware Manual 3 2 Motor and Feedback Wiring www aerotech com 35...

Страница 36: ...TTL Encoder line driver signals RS422 485 compatible Table 3 14 Limit Switch Specifications LI1 Option LI2 Option Supply Voltage 5 V 5 V Supply Current 25 mA Output Type Open Collector Output Voltage...

Страница 37: ...Thermal Resistance C W 1 35 Number of Poles 8 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 75 C rise above a 25 C ambient t...

Страница 38: ...hermal Resistance C W 1 04 Number of Poles 8 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 All performance and electrical specifications 1...

Страница 39: ...6 lb Table 3 19 Rotary Encoder Specifications for ECO165SL Stages Encoder Option Fundamental Signal Period Digital Resolution M1 M2 M5 M6 2500 line TTL signal 2 m 0 5 m M3 M4 M7 M8 1000 line 1Vpp Amp...

Страница 40: ...the stage wiring refer to Section 3 2 Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while ma...

Страница 41: ...tor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 4 Hall Phasing Diagram ECO165SL Hardware Manual 3 5 Motor and Feedback Phasing www aerotech c...

Страница 42: ...gure 3 5 Encoder Phasing Reference Diagram Standard Square Wave Figure 3 6 Encoder Phasing Reference Diagram Analog Sine Wave 3 5 Motor and Feedback Phasing ECO165SL Hardware Manual 42 www aerotech co...

Страница 43: ...longer or shorter inspection interval will depend on the application and conditions such as the duty cycle speed and environment Monthly inspections should include but not be limited to l Visually ins...

Страница 44: ...n applications that have multiple stages bolted together to form multi axis systems the orthogonality may be lost if the stage tables of the support stages are loosened Precision aligned stages should...

Страница 45: ...age has an optional brake the stage cannot be moved by hand l If the stage has a brake restore power to the stage drive it to the desired position then remove power l Redo Steps 3 and 4 for any areas...

Страница 46: ...Figure 4 1 Hardcover Screw Removal 4 2 Cleaning and Lubrication ECO165SL Hardware Manual 46 www aerotech com...

Страница 47: ...Figure 4 2 Hardcover Removal ECO165SL Hardware Manual 4 2 Cleaning and Lubrication www aerotech com 47...

Страница 48: ...le 4 1 Hardware Requirements Motor Screw Size Shaft Coupling Screw Size Coupling Screw Bit Size Coupling Screw Torque M4 M2 5 2 mm Hex 7 in lbs IMPORTANT Use Loctite 242 or Loctite 248 on the motor an...

Страница 49: ...ng hardware 5 Attach the Shaft Coupling to the Motor shaft refer to Figure 4 4 Refer to Table 4 1 for the correct hardware and torque requirements Figure 4 4 Attach the Coupling Adapter to the Motor S...

Страница 50: ...4 6 Tighten the Shaft Coupling to the Drive Screw 8 Rotate the drive screw by hand to ensure that the drive screw rotates freely IMPORTANT You must reapply Loctite to the mounting hardware if the Mot...

Страница 51: ...re 4 7 3 Check that the pulleys are tight on their respective shafts Figure 4 8 a Each pulley is held in position with two set screws b Ensure that the set screws are tight and centered over the shaft...

Страница 52: ...r Removal IMPORTANT If the stage has been calibrated PL2 option note the orientation of the two pulleys with regard to each other or recalibration might be required 4 4 Belt Adjustment ECO165SL Hardwa...

Страница 53: ...Figure 4 8 Foldback Motor Part Callouts Figure 4 9 Lubricate the Pulley Flanges ECO165SL Hardware Manual 4 4 Belt Adjustment www aerotech com 53...

Страница 54: ...compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Ch...

Страница 55: ...ation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerote...

Страница 56: ...rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site N...

Страница 57: ...ion Description 2 01 Safety section updated 2 00 New Section Section 4 3 Motor Mounting 1 02 Dimensions updated Section 2 1 1 01 Product updates 1 00 New Manual ECO165SL Hardware Manual Appendix B Rev...

Страница 58: ...This page intentionally left blank Appendix B Revision History ECO165SL Hardware Manual 58 www aerotech com...

Страница 59: ...C 6 E Electrical Installation 28 Electrical Warnings 9 EN 60204 1 2010 6 EN ISO 12100 2010 6 Encoder Specifications 36 EU 2015 863 6 eyebolts 13 F foldback 51 G grease 20 H Hall Effect Sensors Specifi...

Страница 60: ...or Specifications 36 stabilizing stage 13 stage distortion 24 stabilizing 13 standoffs 13 Storage 12 Symptom 54 T Table of Contents 3 Temperature Effects 17 thermal expansion coefficient 17 Thermistor...

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