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Table of Contents

ANT95L Series Single-Axis Linear Direct-Drive Nanopositioning Stage

Table of Contents

List of Figures

List of Tables

Safety Procedures and Warnings

EU Declaration of Incorporation

Chapter 1: Overview

1.1. Environmental Specifications

1.2. Accuracy and Temperature Effects

1.3. Basic Specifications

1.4. Vacuum Operation

Chapter 2: Installation

2.1. Unpacking and Handling the Stage

2.2. Dimensions

2.3. Securing the Stage to the Mounting Surface

2.4. Attaching the Payload to the Stage

Chapter 3: Electrical Installation

3.1. Motor and Feedback Connectors

3.2. Motor and Feedback Wiring

3.3. Motor and Feedback Specifications

3.4. Limits, Marker, and Machine Direction

3.5. Motor and Feedback Phasing

Chapter 4: Maintenance

4.1. Service and Inspection Schedule

4.2. Cleaning and Lubrication

4.3. Troubleshooting

Appendix A: Warranty and Field Service

Appendix B: Revision History

Index

ANT95L Hardware Manual

Table of Contents

www.aerotech.com

Содержание ANT95L Series

Страница 1: ...Revision 2 00 ANT95L Series Single Axis Linear Direct Drive Nanopositioning Stage HARDWARE MANUAL...

Страница 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Страница 3: ...ng the Stage 15 2 2 Dimensions 16 2 3 Securing the Stage to the Mounting Surface 20 2 4 Attaching the Payload to the Stage 22 Chapter 3 Electrical Installation 25 3 1 Motor and Feedback Connectors 26...

Страница 4: ...ng Plate Dimensions 18 Figure 2 8 ANT95L 100 Dimensions 19 Figure 2 9 ANT95L 100 Mounting Plate Dimensions 19 Figure 2 10 Mounting Hole Pattern 21 Figure 2 11 Load Orientations 23 Figure 2 12 Cantilev...

Страница 5: ...20 Table 2 3 Payload to Stage Surface Hardware 22 Table 3 1 25 Pin Motor and Feedback Connector Pinout 27 Table 3 2 25 Pin Mating Connector Part Numbers 27 Table 3 3 Hall Effect Sensor Specifications...

Страница 6: ...This page intentionally left blank List of Tables ANT95L Hardware Manual 6 www aerotech com...

Страница 7: ...tions that follow l Restrict access to the stage when it is connected to a power source l Do not connect or disconnect electrical components wires and cables while this product is connected to a power...

Страница 8: ...s while your system is connected to a power source l Do not put yourself in the travel path of machinery l Motors are capable of very high speeds and acceleration rates WARNING To decrease the risk of...

Страница 9: ...the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national...

Страница 10: ...This page intentionally left blank EU Declaration of Incorporation ANT95L Hardware Manual 10 www aerotech com...

Страница 11: ...tioning Stage Travel Required 025 25 mm travel 050 50 mm travel 075 75 mm travel 100 100 mm travel Feedback Required E1 Incremental linear encoders 1 Vpp amplified sine output E2 Incremental linear en...

Страница 12: ...our specific application Protection Rating These stages are not suited for dusty or wet environments This equates to an ingress protection rating of IP00 Use Indoor use only 1 2 Accuracy and Temperatu...

Страница 13: ...g Side 5 kg Moving Mass 0 45 kg 0 63 kg 0 74 kg 0 95 kg Stage Mass 0 96 kg 1 36 kg 1 59 kg 2 03 kg Material Anodized Aluminum Mean Time Between Failure 30 000 Hours 1 Certified with each stage 2 In po...

Страница 14: ...onment and use powder free polyethylene gloves to pre vent any contaminants from adhering to the surface of the stage 3 During installation use cleaned vented stainless steel fasteners to secure the s...

Страница 15: ...he equipment Carefully remove the stage from its protective shipping container Gently set the stage on a smooth flat and clean surface Use compressed nitrogen or clean dry oil free air to remove any d...

Страница 16: ...2 2 Dimensions Figure 2 2 ANT95L 025 Dimensions Figure 2 3 ANT95L 025 Mounting Plate Dimensions 2 2 Dimensions ANT95L Hardware Manual 16 www aerotech com...

Страница 17: ...Figure 2 4 ANT95L 050 Dimensions Figure 2 5 ANT95L 050 Mounting Plate Dimensions ANT95L Hardware Manual 2 2 Dimensions www aerotech com 17...

Страница 18: ...Figure 2 6 ANT95L 075 Dimensions Figure 2 7 ANT95L 075 Mounting Plate Dimensions 2 2 Dimensions ANT95L Hardware Manual 18 www aerotech com...

Страница 19: ...Figure 2 8 ANT95L 100 Dimensions Figure 2 9 ANT95L 100 Mounting Plate Dimensions ANT95L Hardware Manual 2 2 Dimensions www aerotech com 19...

Страница 20: ...performed on the mounting surface rather than the stage Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the system Table 2 1 Stage...

Страница 21: ...Figure 2 10 Mounting Hole Pattern ANT95L Hardware Manual 2 3 Securing the Stage to the Mounting Surface www aerotech com 21...

Страница 22: ...e flat rigid and comparable to the stage in quality to maintain optimum performance IMPORTANT For valid system performance the mounting interface should be flat within 5 m WARNING Be careful when you...

Страница 23: ...Figure 2 11 Load Orientations Figure 2 12 Cantilevered Load Capabilities ANT95L Hardware Manual 2 4 Attaching the Payload to the Stage www aerotech com 23...

Страница 24: ...This page intentionally left blank 2 4 Attaching the Payload to the Stage ANT95L Hardware Manual 24 www aerotech com...

Страница 25: ...ts when they integrate the ANT95L into a completed system Electrical installation requirements will depend on the ordered product options Installation instructions in this section are for Aerotech sta...

Страница 26: ...ound protection only Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized The System Integrator or qualified installer is respo...

Страница 27: ...13 Motor Phase C 14 COS Encoder Cosine 15 SIN Encoder Sine 16 MRK Encoder Marker 17 5V Power Supply Input 18 Reserved 19 CW LMT The limit signal that shows the maximum permitted machine travel in pos...

Страница 28: ...or and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 ANT95L Motor and Feedback Wiring 3 2 Motor and Feedback Wiring ANT95L Hardware Manual 28 www aerot...

Страница 29: ...k into 120 Load differential signals SIN SIN COS COS are 5 V pk pk relative to ground Digital Output Incremental Encoder RS422 485 compatible Table 3 6 Limit Switch Specifications Specification Supply...

Страница 30: ...Maximum Bus Voltage VDC 80 80 80 80 Magnetic Pole Pitch mm in 16 00 0 63 16 00 0 63 16 00 0 63 16 00 0 63 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient...

Страница 31: ...by the stage wiring refer to Section 3 2 Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while...

Страница 32: ...otor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 3 Hall Phasing Diagram 3 5 Motor and Feedback Phasing ANT95L Hardware Manual 32 www aerotech...

Страница 33: ...igure 3 4 Encoder Phasing Reference Diagram Standard Square Wave Figure 3 5 Encoder Phasing Reference Diagram Analog Sine Wave ANT95L Hardware Manual 3 5 Motor and Feedback Phasing www aerotech com 33...

Страница 34: ...This page intentionally left blank 3 5 Motor and Feedback Phasing ANT95L Hardware Manual 34 www aerotech com...

Страница 35: ...or the performance and life expectancy of the stage will be reduced 4 1 Service and Inspection Schedule Inspect the ANT95L at least once per month The need for a longer or shorter inspection interval...

Страница 36: ...ge blow away small particles and dust with clean dry compressed air 3 Take the opportunity during the lubrication procedure to inspect the motion guides or bearings for any damage or signs of wear 4 I...

Страница 37: ...nt free cloth with a side to side motion l Use a swab soaked in Isopropyl Alcohol to remove stubborn debris 4 Apply a thin continuous film of lubricant to the exposed v channels of the cross rollers o...

Страница 38: ...compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to C...

Страница 39: ...zation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerot...

Страница 40: ...l rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site...

Страница 41: ...ision 1 03 l Added Declaration of Incorporation l Added Environmental Specifications section l Added safety information and warnings l Added note about current requirements of motor and ground wires 1...

Страница 42: ...This page intentionally left blank Appendix B Revision History ANT95L Hardware Manual 42 www aerotech com...

Страница 43: ...ecifications 29 Humidity 12 I Inspection Schedule 35 isopropyl alcohol 36 L label 15 Limit Switch Specifications 29 lubricant vacuum 14 Lubrication 37 M mounting surface cleaning 20 22 securing stage...

Страница 44: ...leshooting 38 U Unpacking and Handling the Stage 15 V vacuum guidelines 14 vacuum lubricant Braycote 602EF 14 Vacuum Operation 14 Vibration 12 W Warnings 7 Warranty and Field Service 39 Index ANT95L H...

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