2.4. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the
mounting surface with a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning
solvent to completely dry. Gently place the stage on the mounting surface.
Use a representative payload during start-up to prevent accidental damage to the stage and the
payload. Proceed with the electrical installation and test the motion control system in accordance
with the system documentation. Document all results for future reference. For information on
electrical installation refer to
Chapter 3: Electrical Installation
and the documentation delivered with
the stage.
IMPORTANT
: If your ANT95L was purchased with Aerotech controls, it could have been
tuned with a representative payload based on the information provided at the time of order. If
you start the ANT95L without a payload, the servo gains provided by Aerotech with the
shipment may not be appropriate and servo instability can occur. Refer to the controller help
file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum
performance.
IMPORTANT
: For valid system performance, the mounting interface should be flat within 5
µm.
WARNING
: Be careful when you attach the payload to the stage table.
l
If a screw extends through the stage table, it can affect travel and damage the stage.
l
Refer to the dimensions in
for maximum allowable thread engagement.
Applied loads should be symmetrically distributed whenever possible. The payload should be
centered on the stage table and the entire stage should be centered on the support structure.
Tightening torque values for the mounting hardware are dependent on the properties of the surface
to which the stage is being mounted. Values provided in
are typical values and may not be
accurate for your mounting surface. Refer to
for mounting locations and dimensions.
Table 2-3:
Payload to Stage Surface Hardware
Mounting Hardware
Typical Screw Torque
M4 SHCS
2.0 N·m [18 lb·in]
IMPORTANT
: If possible, use 3-point mounting when you attach the payload to the
stage.
If cantilevered loads are applied, refer to
to find the loading condition. Refer to
to find the maximum allowable load.
2.4. Attaching the Payload to the Stage
ANT95L Hardware Manual
22
www.aerotech.com
Содержание ANT95L Series
Страница 1: ...Revision 2 00 ANT95L Series Single Axis Linear Direct Drive Nanopositioning Stage HARDWARE MANUAL...
Страница 6: ...This page intentionally left blank List of Tables ANT95L Hardware Manual 6 www aerotech com...
Страница 10: ...This page intentionally left blank EU Declaration of Incorporation ANT95L Hardware Manual 10 www aerotech com...
Страница 34: ...This page intentionally left blank 3 5 Motor and Feedback Phasing ANT95L Hardware Manual 34 www aerotech com...
Страница 42: ...This page intentionally left blank Appendix B Revision History ANT95L Hardware Manual 42 www aerotech com...