Aerotech ANT95L Series, Руководство по оборудованию

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1.3. Basic Specifications
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT95L Series Specifications
ANT95L-025 ANT95L-050 ANT95L-075 ANT95L-100
Travel 25 mm 50 mm 75 mm 100 mm
Accuracy
(1)
-PL1 ± 2.5 µm ± 2.5 µm ± 4.0 µm ± 5.0 µm
-PL2 (-E1, -E2) ± 250 nm ± 250 nm ± 275 nm ± 275 nm
-PL2 (-E4) ± 175 nm ± 175 nm ± 200 nm ± 200 nm
Bidirectional Repeatability
(1)
± 75 nm
Resolution (Minimum
Incremental Motion)
-E1 1 nm
-E4 0.5 nm
Straightness
(1)
± 1.0 µm ± 1.0 µm ± 2.0 µm ± 2.5 µm
Flatness
(1)
± 1.0 µm ± 1.0 µm ± 2.0 µm ± 2.5 µm
Pitch 10 arc sec
Roll 10 arc sec
Yaw 5 arc sec
Maximum Speed
-E1, -E4 500 mm/s
-E2 145 mm/s
Maximum Acceleration (No Load) 5 g 4 g 3 g 3 g
In-Position Stability
(2)
-E1 <1 nm
-E4 <0.5 nm
Load Capacity
(3)
Horizontal 5 kg 7 kg 7 kg 7 kg
Side 5 kg
Moving Mass 0.45 kg 0.63 kg 0.74 kg 0.95 kg
Stage Mass 0.96 kg 1.36 kg 1.59 kg 2.03 kg
Material Anodized Aluminum
Mean Time Between Failure 30,000 Hours
1. Certified with each stage.
2. In-position stability is reported as 3-sigma value (requires a 1 Vpp encoder).
3. Payload specifications assume that the payload is centered on-axis.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system
depend upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
5. -PL2 performance requires the use of an Aerotech controller.
6. To ensure the achievement and repeatability of specifications over an extended period of time, environmental
temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information.
ANT95L Hardware Manual 1.3. Basic Specifications
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