Aerotech ANT95L Series, Руководство по оборудованию

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Chapter 1: Overview
The specifications in this manual pertain to the second generation of ANT95L stages. The ordering
options (
Table 1-1 ) and basic specifications ( Section 1.3. ) have changed. The visual differences
between second and first generation stages:
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an updated Aerotech logo
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a revised shipping clamp design
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and the introduction of additive (3D-printed) parts.
Refer to Figure 1-1 . Contact Aerotech if you need a first generation manual.
Figure 1-1: GEN2 vs GEN1 Visual Comparison
Table 1-1: Model Numbers and Ordering Options
ANT95L Single-Axis Linear Direct-Drive Nanopositioning Stage
Travel (Required)
-025 25 mm travel
-050 50 mm travel
-075 75 mm travel
-100 100 mm travel
Feedback (Required)
-E1 Incremental linear encoders, 1 Vpp amplified sine output
-E2
Incremental linear encoders, digital RS422 output, 5 nm electrical
resolution
-E4
Incremental linear encoders, 1 Vpp amplified sine output, high-
performance
Mounting Plate (Optional)
-MP Mounting plate
Performance Grade (Required)
-PL1 Base Performance
-PL2 High-accuracy performance
Integration (Required)
-TAS
Test as system: Testing, integration, and documentation of a group of
components as a complete system that will be used together.
-TAC
Test as components: Testing and integration of individual items as discrete
components that ship together.
ANT95L Hardware Manual Chapter 1: Overview
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