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05/25/00

Microsense

TM

II

Model 5300

Gaging System

with 5130 and 5210 Modules

User Manual

- Revision B -

Part Number 028653-R01

Information in this document is subject to change without notice. No part of this document
may be reproduced or transmitted in any form or by any means, electronic or mechanical, for
any purpose, without the express written permission of ADE Technologies (except for copies
made as working documents for use with ADE Technologies-supplied equipment).

© 2000-2002 ADE Technologies. All rights reserved.

The ADE Technologies logo is a registered trademark and Microsense is a trademark of
ADE Technologies in the United States and other countries.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

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Содержание MicrosenseTM II 5130

Страница 1: ... and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos In stock Ready to ship TAR certified secure asset solutions Expert team I Trust guarantee I 100 satisfaction All trademarks brand names and brands appearing herein are the property of their respective owners Find th...

Страница 2: ... electronic or mechanical for any purpose without the express written permission of ADE Technologies except for copies made as working documents for use with ADE Technologies supplied equipment 2000 2002 ADE Technologies All rights reserved The ADE Technologies logo is a registered trademark and Microsense is a trademark of ADE Technologies in the United States and other countries Artisan Technolo...

Страница 3: ...02 25 00 2 Microsense II Model 5300 Gaging System Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 4: ...oltage 14 Changing Fuses 15 Input power Voltage Monitor 15 RS 232 Connector 15 Remote Calibration Connector 15 Analog Output Connector 16 Microsense Probes 17 Probe Theory of Operation 18 Probe Placement 18 Probe Mounting 19 Cleaning Probes 19 Available Probe Styles 20 Axial Probes 21 Blade Probes 22 Environmental Considerations 23 Temperature Stability 23 Humidity 23 Electrical Grounding 23 Setti...

Страница 5: ...tion 33 Outputs 33 Connections 34 Pinouts 34 User Adjustments 36 Front Panel Adjustments 36 Configuration Adjustments 38 Scale Factor Adjustment 40 Range Calibration Adjustment 41 Appendix A Grounding 42 Model 5210 Velocity Acceleration Gaging Module Velocity and Acceleration Functions 45 Velocity and Acceleration Outputs 45 Available Filters 46 Overrange Detector 46 Arithmetic Circuits 46 Artisan...

Страница 6: ...le Series 5000 Probe Styles 20 Models 5504 5501 5502 and 5503 Axial Probes 21 Models 5601 5602 5603 5604 and 5605 Blade Probes 22 Runout Measurements 25 Zero Reading with Master 26 Negative Reading with Sample 27 A B Thickness Measurement Applications 28 Probe Operating Range and Standoffs 30 Probe to Target Distances 31 Model 5130 Gaging Module Front Panel 37 Model 5130 Jumper Locations 43 Model ...

Страница 7: ...UT incorrectly specified as Pin 24 changed to Pin 26 B 04 20 00 Released per ECO 624 Manual rewritten to include sections on Model 5300 Console and Model 5210 Velocity and Acceleration Module Topics from the Model 3401 Gaging System operation manual also included Formatting and font style of manual changed as well Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisa...

Страница 8: ...tion and displacement of A B A B and A B as selected by the operator Please refer to the individual sections on the Model 5130 and Model 5210 modules for details on their operation Applications The Model 5300 gaging system provides noncontact one to four channel measurements suited to a wide variety of applications The system can be used to measure values including thickness step height dy namic d...

Страница 9: ...ocity and Acceleration measurements are derived for the probe selected on the channel switch Filtering is provided by three pole Bessel or Butterworth low pass plug in filters The user selects the upper roll off frequency as defined by ANSI standards over a range from 1 20 kHz Mechanical Parameters Dimensions Width 16 5 inches 42 31 cm Height 5 75 inches 14 74 cm Depth 13 0 inches 33 33 cm Shippin...

Страница 10: ... described briefly in the pages which follow Displacement Displacement is the distance change between the probe and a target surface Surface variations can be examined by measuring displacement values over the entire surface of a moving object Target Target Probe Sensing Surface Probe Sensing Surface Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 11: ...of rotation to all points on the rotating surface examined by the probe Axial runout examines variations in displacement from the probe to a flat surface as it spins around an axis Flatness runout examines variations in displacement from the probe to a flat surface as it moves parallel to the probe sensing surface Radial Runout Axial Runout Flatness Runout Artisan Technology Group Quality Instrume...

Страница 12: ... be displayed on an oscilloscope Velocity The surface velocity of a measured object describes the rate at which the displacement measurement is changing This value is equal to the first derivative of displacement with respect to time Acceleration The surface acceleration of a measured object describes the rate at which the surface velocity is chang ing This value is equal to the second derivative ...

Страница 13: ...og meter and the Model 5210 module if this module is installed in your system Channels A B A B or A B are available as inputs to the Model 5210 module channels C and D are not available for connection to the 5210 For purposes of this discussion channel A refers to the module that is plugged into the left most slot of the Model 5300 console Channel B is the next module to the right of channel A and...

Страница 14: ...ust the position of the probe As the probe is pulled away from its target the meter will swing toward the Far position As the probe is pushed toward its target the meter will swing toward the Near position When the meter is centered the probe is also centered in its range allowing symmetrical deviation of the target from its current position Analog Meter Display Module Selector Switch Microsense I...

Страница 15: ...ate the small circuit card inside to the correct position for the available power line voltage and replace the cover Note that the 5300 can be set to accept four international voltages n 100 VAC 50 to 60 Hz n 120 VAC 50 to 60 Hz n 220 VAC 50 to 60 Hz n 240 VAC 50 to 60 Hz The Model 5300 has a built in safety mechanism to protect the electronics against improper line voltages For example if the pow...

Страница 16: ... voltage supplied to the Model 5300 is too low This may indicate that the power entry module has been set incorrectly or that the line voltage is not to specification Analogously when the High light is on the power entry module is either not set correctly or the line voltage is not to specification RS 232 Connector This connector is provided for future enhancements and carries no signals at presen...

Страница 17: ...ch2 com 17 8 ch3 5 9 ch3 18 10 ch3 com 6 11 ch4 19 12 ch4 7 13 ch4 com 20 14 velacc ch5 8 15 velacc ch5 21 16 velacc ch5 com 9 17 display module 22 18 display module 10 19 display module com 23 20 display module com 11 21 display module com 24 22 O R com 12 23 O R com 25 24 velacc O R 13 25 display module O R NOTE Signals are listed by order of their cable position and not by order of their pin nu...

Страница 18: ...onstraints Microsense probes are available in a variety of physical configurations such as axial and blade The surface of the probe tip contains a sensor insulated from the housing During operation the sensor is mounted in close proximity to a target This creates a capacitor with the probe sensor and target surface serving as its plates The driver supplies a high frequency voltage signal to the se...

Страница 19: ... minimized by keeping the stray capaci tance constant over the temperature and measurement ranges to be used or by constructing the probes in such a way as to reduce stray values as much as possible If probe components are selected with matching coefficients of thermal expansion measurement problems stemming from temperature related stress and distortion can be kept to insignificant levels over th...

Страница 20: ...k well The probe should be mounted in a stand that will prevent a collision with the sample The fixturing stand should be close enough to the console to allow cable connection If the probe cable becomes damaged it may be easily replaced Cleaning Probes In order to provide accurate measurements the system probe s should be protected from excessive dirt and dust Remove foreign materials that may acc...

Страница 21: ...as a variety of fixturing and target access limitations Series 5000 Microsense probes are offered in a variety of shapes and sizes Axial style is usually preferred however other styles are available to facilitate target access Refer to the outline diagrams provided for each probe Available Series 5000 Microsense Probe Styles Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE...

Страница 22: ...Model 5300 Gaging System 21 Axial Probes Model 5504 Axial Probe Model 5501 Axial Probe Model 5502 Axial Probe Model 5503 Axial Probe Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 23: ...02 25 00 22 Microsense II Model 5300 Gaging System Blade Probes Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 24: ...ment Grounding is accomplished either by electrically connecting the holding fixture to the console the surface being measured and the probe housing or by directly grounding the sample surface to the console The probe is grounded to the console through the probe cable A single ground point for all grounding requirements is recommended In dynamic measurements such as spindle runout some type of bru...

Страница 25: ...ads approximately zero 5 Secure the probe into place 6 Adjust the ZERO A control to obtain an exact zero reading if required 7 Repeat Steps 2 through 6 if two or more probes are to be used The system is now set up and ready to make measurements Negative readings at the Model 5130 s connector indicate surfaces closer to the probe than the reference surface positive readings indicate surfaces furthe...

Страница 26: ...le rotation and or a single longitudinal pass along the section to be measured While doing this observe the displacement output of the probe and reposition the probe to balance the positive and negative meter deflections over the surface to be measured If the largest positive reading is greater than the largest negative reading the probe is too far and should be moved closer If the largest negativ...

Страница 27: ...rface is then the sum of the master height and the value displayed on the meter The probe to surface distance is obtained by subtracting the system output from the displacement to the master surface In the figure shown below the system is set up to provide a zero reading for the displacement to the master part Figure a When the master part is replaced by a sample part Figure b the meter indicates ...

Страница 28: ...II Model 5300 Gaging System 27 Negative Reading with Sample Nominal Standoff Near Standoff Far Standoff Sample b Reference Surface Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 29: ...d at one point of a stationary part a at many points of a moving part b or at many points of a rotating part c Positioning two probes facing toward each other allows space measurements between two surfaces Con centricity is examined by measuring the spacing between circular parts A B Thickness Measurement Applications Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www ar...

Страница 30: ...ale depending on probe selection Measurement Resolution Typically 1 to 10 nanometers rms Actual resolution depends on probe selection bandwidth and operating range Resolution improves with larger sensor area reduced bandwidth and smaller range Bandwidth Jumper selectable from 1 kHz 5 kHz 20 kHz 100 kHz Linearity Typically 0 1 over full scale range depending on probe model and operating range Stabi...

Страница 31: ...e the absolute distance between the probe and target surface but variations from a nominal position known as the probe s Nominal Standoff This probe to target distance at the midpoint of the probe s operating range yields an output of 0 V As the target moves closer to the probe the voltage decreases At Near Standoff the smallest probe to target distance within the probe s operating range the outpu...

Страница 32: ...reading Target closer to probe than nominal yields negative displacement reading Target outside probe s operating range yields overrange condition with measurement data not reported 10 V 5 V 0 V 5 V 10 V 10 V 5 V 0 V 5 V 10 V Probe to Target Distances Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 33: ...0 A max 15V 11 A B C 0 10 A max GND 10 A B C NOTE The three available pins are interconnected on the printed circuit board inside the Model 5130 Probe Connection Connect the probe to the Model 5130 front panel receptacle Use care when handling probes and cables Do not pull on the cable The probe cable and its connectors should never be cut spliced or disassembled NOTE The target MUST be at the sam...

Страница 34: ...00 volts The NEAR limit trips when the gage output is less than 10 00 volts Outputs Outputs are available on the designated pins of the I O connector ANALOG OUT Pin 25 This output is the standard analog output Voltage increases with distance At Near displacement the voltage will be negative and will increase with increasing distance This voltage is relative to analog ground P1 pin 4 ANALOG OUT Pin...

Страница 35: ...Pin Number Analog Out 25A 25B 25C Analog Out 26A 26B 26C Analog Return 27A 27B 27C Analog Ground 24A 24B 24C Far 23A 23B 23C Near 22A 22B 22C 15 Volt Power 9A 9B 9C Power Common 10A 10B 10C 15 Volt Power 11A 11B 11C Clock In 1C Clock In 1B Data In 2C Data In 2B Load In 3C Load In 2C Data Out 2A Data Out 1A Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 36: ...patible signals representing the state of the limit LEDs Noise Immunity ARTN Pin 27 The ARTN connection may be used to reduce noise due to non uniform grounds between the Model 5130 and any data collection equipment ARTN is a separate return which allows external equipment to float 0 1v from analog ground This allows the creation of a pseudodifferential connection to external monitoring equipment ...

Страница 37: ...eading without having to move the probe or target The allowable range is 10 of the full scale operating range Adjustment to the Zero pot has no effect on the Scale Factor Limits Two limit pots are available for setting trip points of the and limit lines and LEDs Both limit pots may be set anywhere in the range of the probe The limits are set by adjusting the probe to target distance until the trip...

Страница 38: ...e II Model 5300 Gaging System 37 Model 5130 Gaging Module Front Panel PROBE OUTPUT 5130 5130 LIM NR LIM FR ZERO SF LIM NR LIM FR Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 39: ...onfigurable Function Default Configuration if applicable Output Scaling 10 volts for probe range Bandwidth 20 kHz Chassis GND Enable Grounded See Appendix A Gain Setting Adjusted at factory Linearity Setting Adjusted at factory NOTE Probe range is a function of the last two items listed above These jumpers are set at the factory for a specific range Descriptions of individual parameters follow If ...

Страница 40: ...polar IN OUT IN IN IN IN 0 to 10V Unipolar IN OUT IN IN IN OUT default setting NOTE The voltage on ANALOG OUT will be the negative of ANALOG OUT If you want a negative unipolar output set up the jumpers as in case 3 above and use the ANALOG OUT output This will give you a 0 to 10 V swing Chassis GND A jumper has been provided allowing the chassis of the Model 5130 to be either grounded or unground...

Страница 41: ... probe at near standoff so that the DVM reads 10 000 volts on ANALOG OUT output 2 Move the probe or target so that the gap between them increases by the total measurement range i e for a 100 µm range increase by 200µm Measure according to the fixturing equipment 3 Note this voltage 4 Adjust the potentiometer so that the reading on the DVM ANALOG OUT is 10 10 reading in step 3 2 Example If step 3 r...

Страница 42: ...ne at the factory A description of this feature has not been included in this manual Please contact ADE Technologies for more information The Model 5130 has a remote calibration feature This feature allows two 12 bit calibration constants to be downloaded via a 3 wire serial interface In addition the interface allows any number of Model 5130 mod ules to be daisy chained Please contact ADE Technolo...

Страница 43: ...ly coupled to Analog Ground A jumper has been provided P13 which will explicitly ground the chassis The default configuration is with the jumper in place This will connect the case to ground directly For some applications it may be desirable to remove this jumper to improve noise performance or remove ground loops caused by the fixtured position of the Model 5130 module Analog Return The ARTN conn...

Страница 44: ...0 Gaging System 43 Model 5130 Jumper Locations Bipolar Output Enable Filter Chassis Ground Output Scaling Indicates jumper in default position Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 45: ...02 25 00 44 Microsense II Model 5300 Gaging System NOTES Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 46: ...n is the second derivative of displacement By cascading two differentiator circuits the Model 5210 calculates acceleration The gain of any circuit that calculates the second derivative increases with the square of the frequency Therefore it is even more important to limit bandwidth Velocity Acceleration Outputs The velocity output is scaled at 1000 times the full scale displacement range per secon...

Страница 47: ...placement input to the 5210 one could not tell by looking at the velocity or acceleration signals if the 5210 s input had gone out of range and therefore was producing erroneous outputs For this reason the 5210 has an overrange circuit This circuit lights an LED on the 5210 front panel and produces an isolated open collector output at the rear panel Analog Output connector The rear panel output is...

Страница 48: ...02 25 00 Microsense II Model 5300 Gaging System 47 NOTES Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 49: ...02 25 00 48 Microsense II Model 5300 Gaging System NOTES Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 50: ...quipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentation Artisan Scientific Corporation dba Artisan Technology Group is not an affiliate representative or authorized distributor for any manufacturer listed herein We re here to make your life easier How...

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